JPH0358525B2 - - Google Patents

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Publication number
JPH0358525B2
JPH0358525B2 JP59280364A JP28036484A JPH0358525B2 JP H0358525 B2 JPH0358525 B2 JP H0358525B2 JP 59280364 A JP59280364 A JP 59280364A JP 28036484 A JP28036484 A JP 28036484A JP H0358525 B2 JPH0358525 B2 JP H0358525B2
Authority
JP
Japan
Prior art keywords
laminate
frame
green sheets
ceramic green
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59280364A
Other languages
Japanese (ja)
Other versions
JPS61159719A (en
Inventor
Kenji Matsui
Yukio Tanaka
Kenichi Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP28036484A priority Critical patent/JPS61159719A/en
Publication of JPS61159719A publication Critical patent/JPS61159719A/en
Publication of JPH0358525B2 publication Critical patent/JPH0358525B2/ja
Granted legal-status Critical Current

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  • Laminated Bodies (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は積層セラミツク電子部品の製造方法
に関し、特にたとえばセラミツクグリーンシート
を積層して積層コンデンサなどの電子部品を作る
のに用いられる積層セラミツク電子部品の製造方
法に関する。
Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for manufacturing laminated ceramic electronic components, and in particular to a method for manufacturing laminated ceramic electronic components, which is used to manufacture electronic components such as a laminated capacitor by laminating ceramic green sheets. Concerning a method for manufacturing parts.

(従来技術) 第10図はこの発明の背景となる積層セラミツ
ク電子部品の一例としての積層コンデンサを示す
図である。積層コンデンサ1は、セラミツク2の
内部に複数の内部電極(図示せず)を形成し、そ
の両端部に内部電極と電気的に接続された外部電
極3を形成したものである。
(Prior Art) FIG. 10 is a diagram showing a multilayer capacitor as an example of a multilayer ceramic electronic component which is the background of the present invention. The multilayer capacitor 1 has a plurality of internal electrodes (not shown) formed inside a ceramic 2, and external electrodes 3 electrically connected to the internal electrodes at both ends thereof.

このような積層コンデンサ1を製造する方法と
して、従来では、セラミツクグリーンシート上に
長方形の電極を複数形成しておき、このような複
数の電極が形成されたグリーンシートを複数枚積
層した後、これを剛体プレスで圧着する。剛体プ
レスによる圧着工程は、金型の下型内へ積層した
グリーンシートを入れ、上型を加圧することによ
り、各グリーンシートと内部電極とを層内に隙間
なく圧着する。この場合、もし隙間があれば、切
断時もしくは焼成時に層剥がれ(デラミネーシヨ
ン)を生じるので、大きな圧力でプレスする必要
がある。
Conventionally, as a method for manufacturing such a multilayer capacitor 1, a plurality of rectangular electrodes are formed on a ceramic green sheet, a plurality of green sheets on which such a plurality of electrodes are formed are laminated, and then the green sheets are stacked. Crimp with a rigid press. In the crimping process using a rigid press, the stacked green sheets are put into the lower die of the mold, and the upper die is pressurized, thereby crimping each green sheet and the internal electrode without any gaps within the layers. In this case, if there is a gap, delamination will occur during cutting or firing, so it is necessary to press with high pressure.

圧着後は、グリーンシートを直方体に切断して
チツプ化し、これを焼成した後両側に外部電極を
形成する。
After crimping, the green sheet is cut into rectangular parallelepiped chips, which are fired and then external electrodes are formed on both sides.

(発明が解決しようとする問題点) 内部電極の形成された部分と形成されていない
部分とでシートの厚みに差が生じるため、剛体は
プレスを用いて圧着する方法では、内部電極の形
成されていない部分の成型密度が上がらず、この
部分で層剥がれが生じ易いという問題がある。特
に、グリーンシートの積層枚数が増える程、圧着
時における密度差が顕著となるので、その影響が
大きい。このため、多層の積層コンデンサを製造
する場合は、圧着不良に起因して、不良品が生じ
易く、歩留りが大幅に悪くなるという問題があ
る。
(Problem to be Solved by the Invention) Since there is a difference in the thickness of the sheet between the part where the internal electrodes are formed and the part where the internal electrodes are not formed, the method of crimping the rigid body using a press makes it difficult to form the internal electrodes. There is a problem in that the molding density does not increase in the areas where it is not coated, and layer peeling is likely to occur in these areas. In particular, as the number of stacked green sheets increases, the difference in density during pressure bonding becomes more pronounced, so the effect is greater. For this reason, when manufacturing a multilayer multilayer capacitor, there is a problem that defective products are likely to occur due to poor crimping, and the yield will be significantly reduced.

また、剛体プレスによる圧着方法は、加圧した
ときに金型の歪みを生じるので、上型と下型の作
用位置によつて力の加わり方が異なり、加圧力の
不均一を生じ易くなり、これまた層はがれの原因
となつている。
In addition, in the crimping method using a rigid press, the mold is distorted when pressure is applied, so the way the force is applied differs depending on the working position of the upper and lower molds, which tends to cause uneven pressing force. This also causes layer peeling.

さらに、剛体プレスで圧着したものは、焼成後
のチツプがほぼ完全な直方体になるので、これに
外部電極を形成すると外部電極の厚み分だけ直方
体から突出するようになるため、基板への実装性
を低下させる問題もある。
Furthermore, when the chip is crimped with a rigid press, the chip becomes an almost perfect rectangular parallelepiped after firing, so when an external electrode is formed on this chip, it protrudes from the rectangular parallelepiped by the thickness of the external electrode, making it easier to mount it on the board. There are also problems that reduce the

それゆえに、この発明の主たる目的は、積層さ
れたセラミツクのグリーンシートを均一に圧着す
ることにより、層剥がれが生じることなく、製品
の歩留りを向上させ得る、積層セラミツク電子部
品の製造方法を提供することである。
Therefore, the main object of the present invention is to provide a method for manufacturing laminated ceramic electronic components that can improve the yield of products by uniformly pressing laminated ceramic green sheets without causing layer peeling. That's true.

(問題点を解決するための手段) この発明は、電極の付与されたセラミツクグリ
ーンシートを積層して圧着する場合に、セラミツ
クグリーンシートの積層体を枠に入れた状態で真
空包装した後、これを静水圧プレスすることによ
つて圧着する工程を含む、製造方法である。
(Means for Solving the Problems) In the present invention, when ceramic green sheets provided with electrodes are laminated and pressure bonded, the laminate of ceramic green sheets is placed in a frame and vacuum packaged, and then the ceramic green sheets are vacuum-packed. This is a manufacturing method including a step of crimping by hydrostatic pressing.

(発明の効果) この発明によれば、積層したセラミツクグリー
ンシートを枠に入れた状態で静水圧プレスにより
圧着しているので、電極部分とそれ以外の部分と
において成型密度の差による圧力の不均一が解消
でき層剥がれを防止できるとともに、セラミツク
グリーンシートの周側端部分に加わる圧力が枠で
抑制されてセラミツクグリーンシートに直接加わ
らないため、その周側端部分に縮みが生じるのを
防止でき、縮みの発生によるチツプ形状の不揃い
を解消することができる。その結果、製品の歩留
りを大幅に向上することができる。
(Effects of the Invention) According to this invention, since the laminated ceramic green sheets are placed in a frame and pressed together using a hydrostatic press, there is no pressure difference between the electrode portion and other portions due to the difference in molding density. This eliminates uniformity and prevents layer peeling, and since the pressure applied to the peripheral edge of the ceramic green sheet is suppressed by the frame and is not applied directly to the ceramic green sheet, shrinkage can be prevented from occurring at the peripheral edge. , it is possible to eliminate irregularities in chip shape caused by shrinkage. As a result, the yield of products can be significantly improved.

また、積層数にかかわらず圧力を均一化できる
ので、多層の積層形電子部品を歩留りよく製造で
きる。さらに、結果として、内部電極の積層数の
少ない部分が多い部分よりも薄くなるように加圧
されるので、この部分に外部電極を形成すれば、
外部電極による不所望な突出部が形成されず、基
板への実装性や包装の際の収納の安定性などを向
上できる。
Furthermore, since the pressure can be made uniform regardless of the number of laminated layers, multilayer laminated electronic components can be manufactured with high yield. Furthermore, as a result, the parts of the internal electrodes with fewer layers are pressurized to be thinner than the parts with more layers, so if the external electrodes are formed on these parts,
Undesirable protrusions caused by external electrodes are not formed, and it is possible to improve mounting performance on a board and stability of storage during packaging.

この発明の上述の目的およびその他の目的、特
徴および利点は、図面を参照して行なう以下の実
施例の詳細な説明から一層明らかとなろう。
The above objects and other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.

(実施例) 第1A図、第1B図、第2図、第3図、第4
図、第5図および第6図はこの発明の一実施例と
しての積層コンデンサの製造工程を示す図であ
り、特に第1A図はセラミツクグリーンシートの
積層体を形成する工程の斜視図、第1B図はその
断面図である。
(Example) Figure 1A, Figure 1B, Figure 2, Figure 3, Figure 4
5 and 6 are diagrams showing the manufacturing process of a multilayer capacitor as an embodiment of the present invention. Particularly, FIG. 1A is a perspective view of the process of forming a laminate of ceramic green sheets, and FIG. The figure is a sectional view thereof.

まず、第1A図および第1B図に示すように、
内部電極12a〜12cの形成された複数のセラ
ミツクグリーンシート14を積層した積層体10
が準備され、この積層体10が枠15に入れた状
態で保持される。すなわち、積層体10は、1枚
のグリーンシート141に複数の内部電極121
を形成し、同様に複数の電極122,123を形
成したグリーンシート142,143を各内部電
極121,122,123が交互に少しづづずれ
るように積層し、その上にグリーンシート144
を積層して作られる。なお、図示では、内部電極
を3層(121,122,123)としかつグリ
ーンシート4層(141〜144:これらを総称
して14で示す)とし、積層された1つの積層体
10の横方向に3つのグループの内部電極12
a,12b,12cを形成した場合を示す。しか
しながら、これらの数は、任意である。
First, as shown in FIGS. 1A and 1B,
A laminate 10 in which a plurality of ceramic green sheets 14 on which internal electrodes 12a to 12c are formed are laminated.
is prepared, and this laminate 10 is held in a frame 15. That is, the laminate 10 includes a plurality of internal electrodes 121 on one green sheet 141.
, green sheets 142 and 143 on which a plurality of electrodes 122 and 123 are similarly formed are stacked so that the internal electrodes 121, 122, and 123 are alternately shifted slightly, and green sheets 144
It is made by laminating. In addition, in the illustration, there are three layers of internal electrodes (121, 122, 123) and four layers of green sheets (141 to 144, collectively referred to as 14), and the horizontal direction of one stacked laminate 10 is 3 groups of internal electrodes 12
A case where a, 12b, and 12c are formed is shown. However, these numbers are arbitrary.

このようにして作られた積層体10が枠15に
入れらて、枠15によつて保持される。この枠1
5はその内部空間が積層体10の平面形状とほぼ
同じ大きさであり、その厚みが積層体10の厚さ
とほぼ同じに選ばれる。
The thus produced laminate 10 is placed in the frame 15 and held by the frame 15. This frame 1
5 has an internal space approximately the same size as the planar shape of the laminate 10, and a thickness thereof is selected to be approximately the same as the thickness of the laminate 10.

このように、枠15を用いて積層体10を保持
するのは、次の理由による。すなわち、もし枠1
5を用いなければ、積層体10を静水圧プレスす
る際に、積層体10の縦と横の側端部に加わる圧
力によつて、積層体10の額縁状の周側部分に縮
みが生じ、積層体10を切り出してチツプ化した
際に縮みの生じた周側端部分のものがチツプサイ
ズや形状の不揃いを生じる。ところが、積層セラ
ミツクコンデンサの容量は、面積をS、厚みをt
とすれば、S/tに比例するので、縮みの生じた
チツプの静電容量が縮んだ面積に比例して小さく
なり、設計どおりの容量のものを製造できないも
のが含まれ、これらが不良品となるので歩留りが
悪くなる。そこで、この実施例のように枠15を
用いて積層体10を保持した状態で後述の第3図
に示すように静水圧プレスを行なえば、積層体1
0の上下方向からのみ圧力が加わり、その側面部
分に加わる圧力が枠15で抑制されて積層体10
に直接加わらないので、その周側端部分に縮みが
生じるのを防げ、それによつてチツプサイズや形
状の不揃いをなくすことができるからである。
The reason why the frame 15 is used to hold the laminate 10 in this way is as follows. That is, if frame 1
If 5 is not used, when the laminate 10 is hydrostatically pressed, the pressure applied to the vertical and horizontal side edges of the laminate 10 will cause the frame-shaped peripheral portion of the laminate 10 to shrink. When the laminate 10 is cut out and made into chips, the shrinkage at the circumferential end portion causes irregularities in chip size and shape. However, the capacitance of a multilayer ceramic capacitor is determined by the area S and thickness t.
Since it is proportional to S/t, the capacitance of the shrunk chip decreases in proportion to the shrunk area, and this includes chips that cannot be manufactured with the designed capacity, and these are considered defective products. As a result, the yield becomes worse. Therefore, if hydrostatic pressing is performed as shown in FIG. 3, which will be described later, while holding the laminate 10 using the frame 15 as in this embodiment, the laminate 10
Pressure is applied only from the top and bottom directions of the laminate 10, and the pressure applied to the side surfaces is suppressed by the frame 15.
This is because since it is not directly applied to the chip, it is possible to prevent shrinkage from occurring at the peripheral end portion, thereby making it possible to eliminate irregularities in chip size and shape.

なお、前述の説明では、積層体10を枠15で
保持する方法して、第1B図に示すように予め積
層されたものをそのまま枠15内へ入れる場合を
述べたが、その他に次の方法を適用してもよい。
すなわち、先に枠15を台の上に載せておき、枠
15の中へ電極の付与されたグリーンシートを積
層しながら入れてもよい。このようにすれば、枠
15がグリーンシートおよび内部電極の位置決め
用の治具となり、これらの積層と位置決めが容易
に行なえる利点がある。
In the above description, the method of holding the laminate 10 in the frame 15 was described in which the stacked bodies 10 are placed in the frame 15 as they are, as shown in FIG. 1B, but there are other methods as follows. may be applied.
That is, the frame 15 may be placed on a stand first, and green sheets provided with electrodes may be stacked and placed into the frame 15. In this way, the frame 15 becomes a jig for positioning the green sheets and the internal electrodes, and there is an advantage that the stacking and positioning of these can be easily performed.

その後、枠15で保持された積層体10は、第
2A図に示すように、枠で囲まれた領域を真空で
引きながらたとえばゴムのような柔軟材16で包
装(すなわち真空包装)される。柔軟材16の材
質としては、ゴムやビニールなどの耐水性に優
れ、かつ被圧着体の形状になじむものであればよ
い。このように真空包装した状態では、その負圧
の影響で、内部電極121〜123の重なりの多
い部分または重なりの少ない部分は、重なりの多
い部分に比べてわずかに窪んでいる。
Thereafter, the laminate 10 held by the frame 15 is wrapped (ie, vacuum packed) with a flexible material 16 such as rubber while applying a vacuum to the area surrounded by the frame, as shown in FIG. 2A. The flexible material 16 may be made of any material such as rubber or vinyl, as long as it has excellent water resistance and is compatible with the shape of the object to be pressed. In this vacuum packaged state, due to the influence of the negative pressure, the parts of the internal electrodes 121 to 123 that overlap more or less overlap are slightly depressed compared to the parts that overlap more.

なお、真空包装の方法は、第2B図に示すよう
に、積層体10および枠15の両面を柔軟材16
で被い、枠15と柔軟材16とをボルトで締めつ
けた後脱気する方法でもよい。
Note that the vacuum packaging method involves wrapping both sides of the laminate 10 and the frame 15 with a flexible material 16, as shown in FIG. 2B.
Alternatively, the frame 15 and the flexible material 16 may be covered with a bolt, and then the frame 15 and the flexible material 16 are tightened with bolts and then degassed.

次に、柔軟材16で真空包装された積層体10
が第3図に示すように、高圧成型容器18内に溜
められた水または油20の中に入れられる。そし
て、高圧成型容器18内の静水圧が高められる。
したがつて、積層体10は水圧によつてその外周
部に柔軟材16の上から均一な圧力が加えられ
る。換言すれば、積層体10は、内部電極の重な
りのない部分または重なりの少ない部分と重なり
の多い部分とにかかわらず、グリーンシート14
の全面にわたつて均一に加圧されて圧着されるの
で、積層体10の成型密度のばらつきがなくな
る。そして、所定の成型密度になるまで圧着した
後減圧される。
Next, the laminate 10 vacuum-packed with the flexible material 16
is placed in water or oil 20 stored in a high-pressure molding container 18, as shown in FIG. Then, the hydrostatic pressure within the high-pressure molded container 18 is increased.
Therefore, uniform pressure is applied to the outer circumference of the laminate 10 from above the flexible material 16 by water pressure. In other words, the laminate 10 has green sheets 14 regardless of whether the internal electrodes have no overlap, a small overlap, or a large overlap.
Since the entire surface of the laminate 10 is uniformly pressed and bonded, there is no variation in the molding density of the laminate 10. After crimping until a predetermined molding density is achieved, the pressure is reduced.

積層体10は高圧成型容器18から取り出さ
れ、柔軟材16が剥がされた後、枠15から取り
出される。この圧着後の積層体10が第4図に示
される。圧着後の積層体10は、第4図の矢印で
示す部分、すなわち交互にずらされた内部電極の
両端部分で切断されてチツプ化される。
The laminate 10 is taken out from the high-pressure molding container 18, and after the flexible material 16 is peeled off, it is taken out from the frame 15. The laminate 10 after this pressure bonding is shown in FIG. The laminated body 10 after being crimped is cut into chips at the portions indicated by arrows in FIG. 4, that is, at both ends of the internal electrodes which are alternately shifted.

その後、チツプ化されたものが高温で焼成され
る。この焼成されたチツプ24が第5図に示され
る。第5図から明らかなように、チツプ24は、
内部電極121,123がその一方端部241に
露出し、内部電極122がその他方端部242か
ら露出する。このチツプ24の両端部241,2
42の近傍部分は、内部電極121〜123の重
なりの生じている部分に比べてくびれた部分24
3となる。
The chips are then fired at high temperatures. This fired chip 24 is shown in FIG. As is clear from FIG. 5, the chip 24 is
Internal electrodes 121 and 123 are exposed at one end 241 thereof, and internal electrode 122 is exposed from the other end 242. Both ends 241, 2 of this chip 24
42 is a constricted portion 24 compared to the portion where the internal electrodes 121 to 123 overlap.
It becomes 3.

チツプ24の両端部241,242およびくび
れた部分243の周囲部分には、たとえば電極ペ
ーストの塗布焼き付けによつて、外部電極26
a,26bが形成される。この外部電極26aは
内部電極121,123と電気的に接続され、外
部電極26bは内部電極122と電気的に接続さ
れる。
External electrodes 26 are formed on both ends 241 and 242 of the chip 24 and around the constricted portion 243 by applying and baking an electrode paste, for example.
a, 26b are formed. The external electrode 26a is electrically connected to the internal electrodes 121 and 123, and the external electrode 26b is electrically connected to the internal electrode 122.

このようにして作られた積層コンデンサ28
は、外部電極26a,26bを、その部分の厚み
がチツプ24とほぼ同程度にできるので、第7図
に示すように基板30に実装した場合に、安定し
た状態で実装できることになり、実装性が向上す
る。
Multilayer capacitor 28 made in this way
Since the thickness of the external electrodes 26a and 26b can be made almost the same as that of the chip 24, when mounted on the board 30 as shown in FIG. will improve.

また、上述のように作られた積層コンデンサ2
8をパツケージングする場合は、第8図に示すよ
うにマガジン32内へ入れるか、または第9図に
示すテープ体34に入れられることになる。マガ
ジン32に第10図に示す従来の剛体プレスで製
造した複数の積層コンデンサ1を入れると、外部
電極3がセラミツク2の厚さよりも大きいので各
積層コンデンサ1間で隙間が生じ、マガジン32
の内壁にあたつて配列がずれてうまく取り出せな
い場合がある。しかし、この実施例による積層コ
ンデンサ28はセラミツクの厚さと外部電極の厚
さとをほぼ等しくできるので、複数個重ねてマガ
ジン32へ入れても配列がずれたりすることなく
取り出しが容易となる利点がある。
In addition, the multilayer capacitor 2 made as described above
8 is packaged, it is placed in a magazine 32 as shown in FIG. 8 or in a tape body 34 as shown in FIG. When a plurality of multilayer capacitors 1 manufactured by a conventional rigid press shown in FIG.
When it hits the inner wall, the alignment may be misaligned and it may not be possible to remove it properly. However, in the multilayer capacitor 28 according to this embodiment, since the thickness of the ceramic and the thickness of the external electrode can be made almost equal, there is an advantage that even if a plurality of multilayer capacitors are stacked and placed in the magazine 32, the arrangement will not be misaligned and it can be taken out easily. .

また、第9図に示すテープ体34の穴に積層コ
ンデンサ28を入れることにより、テープ体34
に貼着された粘着テープ36に貼りつけて包装す
る場合において、第10図に示す積層コンデンサ
1では外部電極3の部分しか粘着テープ36に付
着せず輸送途中で剥がれたりずれ易いが、この実
施例によつて作られた積層コンデンサ28は外部
電極26a,26bのみならずチツプ24も粘着
テープ36に十分に付着させることができるの
で、輸送中に剥がれることもない。
Furthermore, by inserting the multilayer capacitor 28 into the hole of the tape body 34 shown in FIG.
When packaging the multilayer capacitor 1 shown in FIG. 10, only the external electrode 3 is attached to the adhesive tape 36 and is likely to peel off or shift during transportation. In the multilayer capacitor 28 manufactured according to the example, not only the external electrodes 26a and 26b but also the chip 24 can be sufficiently attached to the adhesive tape 36, so that they will not come off during transportation.

なお、上述の実施例では多数の積層コンデンサ
を同時に製造する場合について説明したが、個々
に製造するものの場合でも当然実施可能で、しか
も電子部品は積層コンデンサに限るものではな
い。
In the above embodiment, a case where a large number of multilayer capacitors are manufactured at the same time has been described, but it is naturally possible to manufacture them individually, and the electronic components are not limited to multilayer capacitors.

【図面の簡単な説明】[Brief explanation of drawings]

第1A図、第1B図、第2A図、第2B図、第
3図、第4図、第5図および第6図はこの発明の
一実施例の製造工程を示す図であり、特に第1A
図はセラミツクグリーンシートの積層体を形成す
る工程の斜視図を示し、第1B図はその断面図を
示し、第2A図および第2B図は積層体を真空包
装した工程における断面図を示し、第3図は静水
圧プレスする工程を示し、第4図は圧着後の積層
体の断面図を示し、第5図は焼成後のチツプを示
し、第6図は電極形成後の積層コンデンサを示
す。第7図はこの実施例によつて作られた積層コ
ンデンサを基板に装着した状態を示す断面図であ
る。第8図および第9図はこの実施例によつて作
られた積層コンデンサをパツケージングした状態
を示す図である。第10図はこの発明の背景とな
る積層セラミツク電子部品の一例としての積層コ
ンデンサを示す図である。 図において、10は積層体、121〜123は
内部電極、14はセラミツクグリーンシート、1
5は枠、16は真空包装用柔軟材、18は高圧成
型容器、20は水または油、28は積層コンデン
サを示す。
1A, 1B, 2A, 2B, 3, 4, 5, and 6 are diagrams showing the manufacturing process of an embodiment of the present invention.
The figure shows a perspective view of the step of forming a laminate of ceramic green sheets, FIG. 1B shows a sectional view thereof, FIGS. 2A and 2B show a sectional view of the step of vacuum packaging the laminate, 3 shows the hydrostatic pressing process, FIG. 4 shows a cross-sectional view of the laminate after pressure bonding, FIG. 5 shows the chip after firing, and FIG. 6 shows the multilayer capacitor after electrode formation. FIG. 7 is a sectional view showing a multilayer capacitor manufactured according to this embodiment mounted on a substrate. FIGS. 8 and 9 are diagrams showing the state in which the multilayer capacitor manufactured according to this embodiment is packaged. FIG. 10 is a diagram showing a multilayer capacitor as an example of a multilayer ceramic electronic component which is the background of the present invention. In the figure, 10 is a laminate, 121 to 123 are internal electrodes, 14 is a ceramic green sheet, 1
5 is a frame, 16 is a flexible material for vacuum packaging, 18 is a high-pressure molded container, 20 is water or oil, and 28 is a laminated capacitor.

Claims (1)

【特許請求の範囲】 1 それぞれに電極が付与されかつ積層されたセ
ラミツクグリーンシートを枠に保持させるステツ
プ、 前記枠で保持されたセラミツクグリーンシート
を真空で引きながら、枠で囲まれた領域を可撓性
シートで覆うステツプ、 前記可撓性シートに覆われたセラミツクグリー
ンシートを静水圧プレスするステツプ、および 前記静水圧プレスした後のセラミツクグリーン
シートを取り出すステツプを含む、積層セラミツ
ク電子部品の製造方法。
[Claims] 1. A step of holding stacked ceramic green sheets, each of which has an electrode, in a frame. While vacuuming the ceramic green sheets held by the frame, the area surrounded by the frame is removed. A method for producing a laminated ceramic electronic component, comprising: covering with a flexible sheet; hydrostatically pressing the ceramic green sheet covered with the flexible sheet; and taking out the hydrostatically pressed ceramic green sheet. .
JP28036484A 1984-12-29 1984-12-29 Manufacture of laminated ceramic electronic component Granted JPS61159719A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28036484A JPS61159719A (en) 1984-12-29 1984-12-29 Manufacture of laminated ceramic electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28036484A JPS61159719A (en) 1984-12-29 1984-12-29 Manufacture of laminated ceramic electronic component

Publications (2)

Publication Number Publication Date
JPS61159719A JPS61159719A (en) 1986-07-19
JPH0358525B2 true JPH0358525B2 (en) 1991-09-05

Family

ID=17623977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28036484A Granted JPS61159719A (en) 1984-12-29 1984-12-29 Manufacture of laminated ceramic electronic component

Country Status (1)

Country Link
JP (1) JPS61159719A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0670940B2 (en) * 1988-12-15 1994-09-07 株式会社村田製作所 Method for manufacturing ceramic laminated body

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51103910A (en) * 1975-03-10 1976-09-14 Ngk Spark Plug Co SERAMITSUKUSEKISOTAINOSEIZOHO
JPS5727802A (en) * 1980-07-25 1982-02-15 Hitachi Ltd Steel pipe transfer noise prevention device
JPS59114894A (en) * 1982-12-22 1984-07-03 株式会社日立製作所 Method of producing multilayer printed circuit board

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51103910A (en) * 1975-03-10 1976-09-14 Ngk Spark Plug Co SERAMITSUKUSEKISOTAINOSEIZOHO
JPS5727802A (en) * 1980-07-25 1982-02-15 Hitachi Ltd Steel pipe transfer noise prevention device
JPS59114894A (en) * 1982-12-22 1984-07-03 株式会社日立製作所 Method of producing multilayer printed circuit board

Also Published As

Publication number Publication date
JPS61159719A (en) 1986-07-19

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