JPH0357955U - - Google Patents
Info
- Publication number
- JPH0357955U JPH0357955U JP11852589U JP11852589U JPH0357955U JP H0357955 U JPH0357955 U JP H0357955U JP 11852589 U JP11852589 U JP 11852589U JP 11852589 U JP11852589 U JP 11852589U JP H0357955 U JPH0357955 U JP H0357955U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- drive shaft
- workpiece
- crucible
- ion plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000007733 ion plating Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Structure Of Printed Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11852589U JPH0357955U (tr) | 1989-10-09 | 1989-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11852589U JPH0357955U (tr) | 1989-10-09 | 1989-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0357955U true JPH0357955U (tr) | 1991-06-05 |
Family
ID=31666683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11852589U Pending JPH0357955U (tr) | 1989-10-09 | 1989-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0357955U (tr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010258478A (ja) * | 2003-10-30 | 2010-11-11 | Nichia Corp | 半導体素子用の支持体及びその製造方法並びに半導体装置 |
-
1989
- 1989-10-09 JP JP11852589U patent/JPH0357955U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010258478A (ja) * | 2003-10-30 | 2010-11-11 | Nichia Corp | 半導体素子用の支持体及びその製造方法並びに半導体装置 |
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