JPH0357866B2 - - Google Patents
Info
- Publication number
- JPH0357866B2 JPH0357866B2 JP56163644A JP16364481A JPH0357866B2 JP H0357866 B2 JPH0357866 B2 JP H0357866B2 JP 56163644 A JP56163644 A JP 56163644A JP 16364481 A JP16364481 A JP 16364481A JP H0357866 B2 JPH0357866 B2 JP H0357866B2
- Authority
- JP
- Japan
- Prior art keywords
- adhesive layer
- liquid
- substrate
- recording head
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 30
- 239000012790 adhesive layer Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000010410 layer Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 description 15
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000005557 antagonist Substances 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
Description
本発明は、液体噴射記録ヘツドの製造法に係わ
るものであり、特に高密度に多数のノズルが配設
されたフルマルチオリフイス化された液体噴射記
録ヘツドの製造法に関する。
インクジエツト記録法（液体噴射記録法）は、
記録特における騒音の発生が無視し得る程度に極
めて小さいという点高速記録が可能であり、耐も
所謂普通紙に定着という特別な処理を必要とせず
に記録の行なえる点において最近関心を集めてい
る。
その中で、例えばドイツ公開（DOLS）第
2843064号公報に記載されてある液体噴射記録法
は、熱エネルギーを液体に作用させて、液滴吐出
の為の原動力を得るという点において、他の液体
噴射記録法とは、異なる特徴を有している。
即ち、上記の公報に開示されてある記録法の代
表例は、熱エネルギーの作用を受けた液体が急峻
な体積の増大を伴う状態変化を起し、該状態変化
に基づく作用力によつて、記録ヘツド部先端のオ
リフイスより液体が吐出されて、飛翔的液滴が形
成され、該液滴が被記録部材に付着し記録が行わ
れるという特徴を有する。
そして、DOLS2843064号公報に開示されてい
る液体噴射記録法は、所謂drop−on demand記
録法に極めて有効に適用されるばかりではなく、
記録ヘツド部をfull lineタイプで高密度マルチオ
リフイス化された記録ヘツドが容易に具現化出来
るので、高解像度、高品質の画像を高速で得られ
るという特徴を有している。
該記録法に使用される液体噴射記録ヘツドは、
従来第１図ａ乃至第１図ｃに示された方法で作成
されていた。
即ちガラス又は、シリコーン等の平面性の良い
基板１０１上にアンカー剤を塗布し、更に、エポ
キシ樹脂等の半硬化状態の接着剤層１０２を形成
する（第１図ａ）。
次に、ダイヤモンド等を研削剤にしたブレード
を回転切削させピツチｐ、巾Ｗ、深さｈの溝１０
３−１，１０３−２，１０３−３…を作成する。
この際溝部分の接着層１０２はブレードにより除
去される（第１図ｂ）。こうして溝付板１０４が
作成される。
次に、その表面に、微細加工法により電気熱変
換体が形成された基板１０５上に、電気熱変換体
部が、溝１０３−１，１０３−２，１０３−３、
…と一致する様に溝付板１０４を接着する。
こうして、マルチオリフイス化された液体噴射
記録ヘツドが形成され前述の如き吐出原理に基づ
いた記録法が実行される。
しかし、第１図ａ乃至第１図ｃに説明した如
き、溝付板１０４の作成方法には非常に困難な点
が存在した。即ち巾ｗと深さｈの比は、良好な液
滴吐出特性を得るためには、ｗ≦ｈが望ましく、
ブレードをかなり深く切込まなくてはならない
（例えばｗ＝50μの場合ｈ＝50μ以上）という点で
ある。このため、ブレードの切削速度は遅く、又
ブレード消耗、破損が早いため、溝付板の作成時
間が長くかかつたり、各溝の深さが不揃いだつた
りするという不都合な点が多く発生した。
そこで本発明者らは、以上の不都合な点を解消
すべく鋭意研究の結果、次の作成方法を見出し
た。
本発明の液体噴射記録ヘツドの製造法は、液体
を吐出する吐出口に連通する液流路のパターンに
対応して、基板上の接着剤層を除去する工程と、
前記基板の前記接着剤層が除去された箇所を、
除去されずに残つた接着剤層を耐エツチング層と
して用いてエツチングすることにより、前記液流
路を形成するための溝を前記基板に形成する工程
と、
該溝が設けられた前記基板と別の基板とを、前
記溝を内側にして、除去されずに残つた前記接着
剤層を介して接合することにより、前記液流路を
形成する工程と、
を含むことを特徴とする。
以下、図面に従つて本発明による液体噴射記録
ヘツドの作成方法の主要部を以下に述べる。
第２図ａに示す如く先ず基板２０１上に半硬化
した接着剤層２０２を形成する。次に、第２図ｂ
に示す如くに、接着剤層２０２を巾ｗで基板２０
１に達する如くに浅く切削溝２０３−１，２０３
−２，２０３−３、…を形成する。次に第２図ｃ
の如くに基板２０１を、化学エツチング液中に浸
し、除去されずに残つた接着剤層を耐エツチング
層として用いてエツチングすることにより、深さ
ｈまで切削する。こうして溝付板２０４を形成す
る。次に、例えばDOLS2843064に記載されてあ
る構造を有する電気熱変換体をその表面に有する
ヒータ基板２０５と、電気熱変換体部上に溝２０
３−１，２０３−２、…が来る様に位置合せを
し、しかる後に接着剤層２０２により、接着す
る。以上の様にしてマルチオリフイス化された記
録ヘツドが作成される。
次に実施例をもつて本発明を詳述する。
実施例 １
厚み0.7mmの両面研摩テンパクスガラス（シヨ
ツト社製）上に、エポキシ樹脂、アミン硬化剤、
シランカプリング剤を混入したアン剤を、薄く塗
布する。乾燥後、アンカー層上にエポキシ樹脂、
芳香族系アミン硬化剤及びシランカプリング剤を
混合した接着剤層を、厚み約2μに形成する。該
接着剤層を半硬化後、厚み50μのダイヤモンドブ
レードを用いて、溝作成を行つたところ下表の如
き結果になつた。
The present invention relates to a method of manufacturing a liquid jet recording head, and more particularly to a method of manufacturing a liquid jet recording head having a fully multi-orifice structure in which a large number of nozzles are arranged at high density. The inkjet recording method (liquid jet recording method) is
It has recently attracted attention because it is capable of high-speed recording in that the noise generated during recording is negligible, and its durability is such that recording can be done without the need for special processing such as fixing on so-called plain paper. There is. Among them, for example, the German Publication (DOLS)
The liquid jet recording method described in Publication No. 2843064 has a different feature from other liquid jet recording methods in that thermal energy is applied to the liquid to obtain the driving force for ejecting droplets. ing. That is, in a typical example of the recording method disclosed in the above-mentioned publication, a liquid subjected to the action of thermal energy undergoes a state change accompanied by a steep increase in volume, and by the acting force based on the state change, The liquid is ejected from an orifice at the tip of the recording head to form flying droplets, and the droplets adhere to the recording member to perform recording. The liquid jet recording method disclosed in DOLS2843064 is not only very effectively applied to the so-called drop-on demand recording method, but also
Since the recording head section can be easily implemented as a full line type recording head with high density multi-orifice, it has the feature that high resolution and high quality images can be obtained at high speed. The liquid jet recording head used in this recording method is
Conventionally, it has been produced by the method shown in FIGS. 1a to 1c. That is, an anchor agent is applied onto a substrate 101 with good flatness such as glass or silicone, and a semi-cured adhesive layer 102 such as epoxy resin is further formed (FIG. 1a). Next, a blade using diamond or the like as an abrasive is rotated to cut a groove 10 with pitch p, width W, and depth h.
3-1, 103-2, 103-3... are created.
At this time, the adhesive layer 102 in the groove portion is removed by a blade (FIG. 1b). In this way, the grooved plate 104 is created. Next, on the substrate 105 on the surface of which electrothermal converters are formed by microfabrication, the electrothermal converter portions are formed into grooves 103-1, 103-2, 103-3,
Glue the grooved plate 104 so that it matches... In this way, a multi-orifice liquid ejecting recording head is formed, and a recording method based on the above-described ejection principle is performed. However, as explained in FIGS. 1a to 1c, the method of making the grooved plate 104 has very difficult points. That is, the ratio of width w to depth h is preferably w≦h in order to obtain good droplet ejection characteristics.
The point is that the blade must cut quite deeply (for example, if w = 50μ, h = 50μ or more). For this reason, the cutting speed of the blade is slow, and the blade wears out and breaks quickly, resulting in many inconveniences such as the long time it takes to create a grooved plate and the depth of each groove being uneven. . Therefore, the inventors of the present invention conducted extensive research to solve the above-mentioned disadvantages, and as a result, discovered the following production method. A method for manufacturing a liquid jet recording head according to the present invention includes the steps of: removing an adhesive layer on a substrate in accordance with a pattern of liquid flow paths communicating with ejection ports for ejecting liquid; and the adhesive layer on the substrate. The part where was removed is
forming a groove for forming the liquid flow path on the substrate by etching the adhesive layer that remained unremoved as an etching-resistant layer; forming the liquid flow path by bonding the liquid flow path to the substrate with the groove facing inside through the adhesive layer that remains without being removed. The main parts of the method for manufacturing a liquid jet recording head according to the present invention will be described below with reference to the drawings. As shown in FIG. 2a, first, a semi-cured adhesive layer 202 is formed on a substrate 201. Next, Figure 2b
As shown in FIG.
Cutting grooves 203-1, 203 shallow enough to reach 1
-2, 203-3,... are formed. Next, Figure 2c
The substrate 201 is immersed in a chemical etching solution and etched using the remaining adhesive layer as an etching-resistant layer, thereby cutting to a depth h. In this way, the grooved plate 204 is formed. Next, a heater substrate 205 having an electrothermal transducer having a structure described in DOLS2843064 on its surface, and a groove 205 on the electrothermal transducer part are provided.
3-1, 203-2, . . . are aligned, and then bonded using the adhesive layer 202. In the manner described above, a multi-orifice recording head is created. Next, the present invention will be explained in detail with reference to Examples. Example 1 Epoxy resin, amine curing agent,
Apply a thin layer of an antagonist mixed with a silane coupling agent. After drying, apply epoxy resin on the anchor layer,
An adhesive layer containing a mixture of an aromatic amine curing agent and a silane coupling agent is formed to a thickness of approximately 2 μm. After the adhesive layer was semi-hardened, grooves were formed using a diamond blade with a thickness of 50 μm, and the results were as shown in the table below.
【表】
本発明による浅く切削した溝付板を、弗酸及び
弗化アンモニウムを混合したエツチング液に浸漬
し、除去されずに残つた接着剤層を耐エツチング
層として用いてエツチングすることにより、約
40μの切削を行つた。次に本発明により作成した
溝付板を表面に発熱体部（電気熱変換体部）を持
つヒータ基板と接着し、マルチオリフイスタイプ
のインクジエツトヘツド（液体噴射記録ヘツド）
を作成し液滴吐出実験を行つた。
本発明による液滴吐出は、作成した溝内壁が、
従来に較べて滑らかな為により良好な液滴形成が
行われ、解像度のすぐれた画質を持つインクジエ
ツト記録が得られた。
本発明により、
ブレード等を用いた機械的方法に較べて溝作
成速度が早まる。
同上の切削材料の摩耗が少ない。
エツチングにより大量の溝作成が出来る。
エツチングにより構内壁が滑らかになり、良
好な液滴形成が出来る。
等のメリツトが見出された。
以上説明した様に、本発明は、除去されずに残
つた接着剤層を耐エツチング層として用いるとい
う最たる特徴事項を有する。即ち、本発明では、
接着剤層が、基板同士の接着作用と耐エツチング
作用との双方の役割を果たすために兼用される。
これにより、液流路を形成するための溝をエツ
チング法によつて形成した後、特別な処理工程
（例えば耐エツチング材料層を除去する除去工程
や、基板同士の接合を行うための接着剤層を新た
に塗布する塗布工程等）を経ずに、基板同士の接
合工程へとそのまま移行することができる。
従つて、本発明によれば、エツチング法の長所
を最大限に活かしながら、極めて簡易且つ正確に
液体噴射記録ヘツドを製造することができる。[Table] By immersing the shallowly cut grooved plate according to the present invention in an etching solution containing a mixture of hydrofluoric acid and ammonium fluoride, and etching the adhesive layer that remained without being removed as an etching-resistant layer, about
A 40μ cut was made. Next, the grooved plate produced according to the present invention is adhered to a heater substrate having a heating element (electrothermal converter) on its surface, and a multi-orifice type inkjet head (liquid jet recording head) is created.
We created a droplet discharge experiment. In the droplet ejection according to the present invention, the created groove inner wall
Since the ink jet was smoother than the conventional inkjet recording, better droplet formation was achieved, and inkjet recording with excellent resolution and image quality was obtained. The present invention increases the speed of groove creation compared to mechanical methods using blades or the like. Same as above, the cutting material has less wear. A large amount of grooves can be created by etching. Etching makes the internal walls smooth and allows for good droplet formation. The following merits were discovered. As explained above, the most distinctive feature of the present invention is that the remaining adhesive layer is used as an etching-resistant layer. That is, in the present invention,
The adhesive layer serves both of the functions of adhesion between the substrates and the anti-etching function. As a result, after grooves for forming liquid flow paths are formed by etching, special processing steps (for example, a removal step for removing an etching-resistant material layer, and an adhesive layer for bonding substrates) are performed. It is possible to directly proceed to the process of bonding the substrates together without going through a process of newly applying the coating material, etc.). Therefore, according to the present invention, a liquid jet recording head can be manufactured extremely simply and accurately while making full use of the advantages of the etching method.
第１図ａ乃至第１図ｃは各々従来例の作成法を
説明する為の模式的説明図、第２図ａ乃至第２図
ｄは各々本発明による作成法を説明する為の模式
的説明図である。
１０１……基板、１０２……接着剤層、１０３
……溝、１０４……溝付板。
1a to 1c are schematic explanatory diagrams for explaining the manufacturing method of the conventional example, and FIGS. 2a to 2d are schematic explanatory diagrams for explaining the manufacturing method according to the present invention, respectively. It is a diagram. 101...Substrate, 102...Adhesive layer, 103
... Groove, 104 ... Grooved plate.
Claims (1)
ターンに対応して、基板上の接着剤層を除去する
工程と、 前記基板の前記接着剤層が除去された箇所を、
除去されずに残つた接着剤層を耐エツチング層と
して用いてエツチングすることにより、前記液流
路を形成するための溝を前記基板に形成する工程
と、 該溝が設けられた前記基板と別の基板とを、前
記溝を内側にして、除去されずに残つた前記接着
剤層を介して接合することにより、前記液流路を
形成する工程と、 を含むことを特徴とする液体噴射記録ヘツドの製
造法。 ２ 前記吐出口から液体を吐出するために利用さ
れるエネルギーを発生するエネルギー発生体が、
前記液流路に沿つて設けられる特許請求の範囲第
１項に記載の液体噴射記録ヘツドの製造法。 ３ 前記エネルギー発生体は、前記エネルギーと
して熱エネルギーを発生する電気熱交換体である
特許請求の範囲第２項に記載の液体噴射記録ヘツ
ドの製造法。[Scope of Claims] 1. A step of removing an adhesive layer on a substrate corresponding to a pattern of a liquid flow path communicating with an ejection port for ejecting a liquid, and a portion of the substrate from which the adhesive layer is removed. of,
forming a groove for forming the liquid flow path on the substrate by etching the adhesive layer that remained unremoved as an etching-resistant layer; forming the liquid flow path by bonding the substrate with the groove facing inside through the adhesive layer that remains without being removed. Head manufacturing method. 2. An energy generator that generates energy used to eject liquid from the ejection port,
A method of manufacturing a liquid jet recording head according to claim 1, wherein the liquid jet recording head is provided along the liquid flow path. 3. The method of manufacturing a liquid jet recording head according to claim 2, wherein the energy generator is an electric heat exchanger that generates thermal energy as the energy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16364481A JPS5863466A (en) | 1981-10-13 | 1981-10-13 | Manufacture of liquid jet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16364481A JPS5863466A (en) | 1981-10-13 | 1981-10-13 | Manufacture of liquid jet recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5863466A JPS5863466A (en) | 1983-04-15 |
| JPH0357866B2 true JPH0357866B2 (en) | 1991-09-03 |
Family
ID=15777859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16364481A Granted JPS5863466A (en) | 1981-10-13 | 1981-10-13 | Manufacture of liquid jet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5863466A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5703631A (en) * | 1992-05-05 | 1997-12-30 | Compaq Computer Corporation | Method of forming an orifice array for a high density ink jet printhead |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55129472A (en) * | 1979-03-29 | 1980-10-07 | Canon Inc | Method of adhesion |
| JPS55146771A (en) * | 1979-05-02 | 1980-11-15 | Seiko Epson Corp | Ink-jet head and preparation thereof |
-
1981
- 1981-10-13 JP JP16364481A patent/JPS5863466A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55129472A (en) * | 1979-03-29 | 1980-10-07 | Canon Inc | Method of adhesion |
| JPS55146771A (en) * | 1979-05-02 | 1980-11-15 | Seiko Epson Corp | Ink-jet head and preparation thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5863466A (en) | 1983-04-15 |
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