JPH0357190U - - Google Patents
Info
- Publication number
- JPH0357190U JPH0357190U JP11715989U JP11715989U JPH0357190U JP H0357190 U JPH0357190 U JP H0357190U JP 11715989 U JP11715989 U JP 11715989U JP 11715989 U JP11715989 U JP 11715989U JP H0357190 U JPH0357190 U JP H0357190U
- Authority
- JP
- Japan
- Prior art keywords
- truck
- air supply
- jigs
- pipe joint
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Automatic Assembly (AREA)
- Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
- Pipe Accessories (AREA)
Description
第1図は本考案の一実施例を示す斜視図、第2
図は側面図、第3図は平面図、第4図は管継手ユ
ニツトの構成を示す正面図、第5図は第4図の側
断面図、第6図ないし第8図は管継手を示す図、
第9図および第10図は従来例を示す説明図であ
る。
22……台車、23……治具、25……エア供
給用配管、29……エア供給ユニツト、26,3
0……管継手ユニツト、27,31……管継手。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a side view, Fig. 3 is a plan view, Fig. 4 is a front view showing the structure of the pipe fitting unit, Fig. 5 is a side sectional view of Fig. 4, and Figs. 6 to 8 show the pipe fitting. figure,
FIG. 9 and FIG. 10 are explanatory diagrams showing a conventional example. 22...Dolly, 23...Jig, 25...Air supply piping, 29...Air supply unit, 26,3
0... Pipe joint unit, 27, 31... Pipe joint.
Claims (1)
台車の走行位置に待機し前記各治具にエア供給を
行うエア供給ユニツトとを備えたものにおいて、
前記台車の各治具のエア供給用配管と前記エア供
給ユニツトとを、前記台車の治具に対応する複数
の管継手を有する2次側管継手ユニツトと、この
2次側管継手ユニツトの管継手に対応する複数の
管継手を有して前記エア供給ユニツトに進退可能
に設けられた1次側管継手ユニツトとにより接続
可能としたことを特徴とする治具台車用エア供給
装置。 A truck equipped with a plurality of air-driven jigs and an air supply unit that waits at a traveling position of the truck and supplies air to each of the jigs,
The air supply piping of each jig of the truck and the air supply unit are connected to a secondary pipe joint unit having a plurality of pipe joints corresponding to the jigs of the truck, and a pipe of this secondary pipe joint unit. An air supply device for a jig truck, characterized in that it has a plurality of pipe joints corresponding to the joints, and is connectable to a primary side pipe joint unit which is provided so as to be movable forward and backward from the air supply unit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11715989U JPH0357190U (en) | 1989-10-06 | 1989-10-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11715989U JPH0357190U (en) | 1989-10-06 | 1989-10-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0357190U true JPH0357190U (en) | 1991-05-31 |
Family
ID=31665398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11715989U Pending JPH0357190U (en) | 1989-10-06 | 1989-10-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0357190U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007187289A (en) * | 2006-01-16 | 2007-07-26 | Tokyo Electron Ltd | Decompression container and decompression processing apparatus |
KR20190051654A (en) * | 2017-11-07 | 2019-05-15 | 삼성전자주식회사 | method for treating substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58156449A (en) * | 1982-03-12 | 1983-09-17 | マツダ株式会社 | Carrier truck for work |
-
1989
- 1989-10-06 JP JP11715989U patent/JPH0357190U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58156449A (en) * | 1982-03-12 | 1983-09-17 | マツダ株式会社 | Carrier truck for work |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007187289A (en) * | 2006-01-16 | 2007-07-26 | Tokyo Electron Ltd | Decompression container and decompression processing apparatus |
KR20190051654A (en) * | 2017-11-07 | 2019-05-15 | 삼성전자주식회사 | method for treating substrate |