JPH0356872A - Testing device for semiconductor device - Google Patents

Abstract

PURPOSE:To precisely attain the measurement of an output voltage of a semiconductor device by connecting a constant voltage source to a voltmeter in series, measuring a difference voltage between the output voltage of the semiconductor device and the constant voltage of the constant voltage source. CONSTITUTION:The constant voltage source 300 of a precise voltage is provided on the inside of a test head 2, and connected between the voltmetr VM and the ground. The voltage value, etc., of the head 2 inside and a variable voltage source 9 of a tester 8 inside is set to a desired measuring condition. And, with the voltmeter VM the difference voltage between the output voltage of a three terminal regulator 1 and the constant voltage of the voltage source 300 is measured. In such a manner, with the minimum measuring range of the voltmeter VM the output voltage of the device can be measured, and the measuring precision is enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a testing device for semiconductor devices, and in particular to a device for testing semiconductor devices that can accurately control the output voltage of a single conductor device by δ-1. This relates to testing equipment.

[Conventional technology]

FIG. 4 is a block diagram showing a conventional semiconductor device testing apparatus. A three-end regulator 1, which is an example of a semiconductor device to be tested, is attached to a socket 3 of a test head 2. Although not shown, peripheral circuits necessary for determining various characteristics of the three-terminal regulator 1 are incorporated inside the test head 2. An input terminal 4, an output terminal T5, and a GND terminal 6 of the three-terminal regulator 1 are connected to a tester 8 via a test head 2 and a cable 7.

The input terminal 4 is connected to GND through the +IL variable voltage source 9 inside the tester 8, and the output terminal 5 is connected to GND through the parallel circuit of iiJ & current source 10 and the voltage changer H inside the tester 8.
The terminals 6 are each connected to GND.

[CPU section] 1 is provided inside the tester 8, and controls the peripheral circuits necessary for +111 constant provided inside the test head 2 via the bus line 100, and also controls the variable voltage inside the tester 8. The voltage of source 9 riri.
The measurement range of the current value and voltage to VX of the variable current source 10 is controlled via the bus line 200.

Next, the operation will be explained. The voltage values of the peripheral circuits inside the test head 2 and the variable voltage source 9 inside the tester 8 are set to desired values ('F) according to commands from the CPU section 11. At this time, the input of the two-terminal regulator 1 The voltage is applied from a variable voltage source 9 through a cable 7.The voltage is applied from a variable current source 10 through a cable 7.The voltage is applied from a variable current source 10 through a cable 7. The terminal regulator 1 outputs a voltage corresponding to the input voltage from the variable voltage source 9 from the output terminal 5, and this output voltage is measured by the voltage H. In this case, the contact method of the socket 3 is changed to the Kelvin method. By doing so, the influence of the parasitic resistance component of the cable 7, etc. on the ALL constant value has been reduced to a negligible value, and the influence of disturbance noise such as electromagnetic induction, which the cable 7, etc. are subjected to, has been reduced to a negligible value by shielding technology. Then, the error component of the output voltage measurement value is mainly the error component of the voltage, il,.Now, the voltmeter VM is 200mV, 2
It has three voltage ranges of V and 20V, and its illumination
Assume that the N constant error is expressed by the following equation.

(Measurement error) - (Measurement value) X O. 1 (%) + (A
PI fixed range)XO. l(%)...0> Note that the value of 0.1(%) shown in equation (1) is just an example, and in reality, it can be replaced with a more specific value of the voltage i1 to be used.

For example, if the measured value of the output voltage of three-terminal regulator 1 is 1
Assume that it is 0.100 (V). At this time, the measurement range of the voltage illvH is set to 20V, and in this way, the a-1 constant error is expressed as (1) by equation (1).
JFJ constant error) -10.100 (V) x O.
1 (%) + 20 (V) x O, 1 (%) - 0.0301 (V) 90.03 (V)
becomes. In other words, the Jl constant error of the voltmeter VM is ±o. oa (v), and the actual output voltage of three-terminal regulator 1 is 10.070 (V) ~ 10.1
30 (V). Therefore, if the tolerance in determining AFl is ±0.03 (V) or more, this voltage pull VM can be used as is, but if the tolerance is less than ±0.03 (V), the voltmeter VM should be changed to Need to change to something higher.

[Problem to be solved by the invention]

Conventional testing equipment for semiconductor devices is configured as shown below, and when trying to measure the output voltage of the three-terminal regulator 1 with high accuracy, a pressure gauge VM is required. However, there was a problem that the tester 8 was inevitably expensive.

This invention was made to solve the above-mentioned problem, and it is possible to accurately measure the output voltage of a semiconductor element even if a voltage of not so high as 1 is used. It is assumed that the test equipment for P-conductor elements is 111.

[Means to solve the problem]

A semiconductor device testing device according to the present invention is a semiconductor device testing device that applies a predetermined input to a semiconductor device and tests the Kei exclusive device r based on the output of the semiconductor device derived in response to the input. applied to.

The testing device for a semiconductor element r according to the present invention has a voltage 1! A constant voltage source is connected in series with the semiconductor element, and the difference voltage between the voltage at the peak of the semiconductor element and the constant voltage of the constant voltage source is measured using the voltage M1.

[Effect]

In this invention, a constant voltage source is connected in series with the voltage 5I for determining the output voltage of the semiconductor element, and the difference II voltage between the output voltage of the conductive element 1' and the constant voltage of the constant voltage source is is measured by the voltage M1, and the voltage to be measured by the voltage j1 is made smaller.

[For implementation]

FIG. 1 is a block diagram showing an embodiment of a semiconductor device testing apparatus according to the present invention. In the figure, the difference from the conventional device shown in FIG. ! !
This is because a constant voltage source 30o with an accurate voltage value is newly installed. The constant voltage source 30o is a power source 71. 1t. VM and GN
It is connected between D. Other constructions are the same as before.

Next, the operation will be explained. As before, cPU I'
ll ( 1 Based on the command from 1, set the vehicle pressure r, f, "j; of the peripheral circuit in the western part of the test head 2 and the IIJ variable voltage source 9 inside the tester 8 to the desired measurement conditions.Voltage"
' ``M is the output voltage of Tamata Ryoreku L Notor 1,
Constant/7 pressure? The differential 11 with the constant vehicle pressure of "+<30n" is defined as A1.

For example, the constant voltage of the constant voltage source 300 or l[l. Of+
00 (V), and the voltage is set to 71' V M (regular 1 direct voltage 0.1000 (V). At this time, the measurement range of voltage: lVH is 2 C) O m V. In this way, the constant error is (
From formula 1), (measurement error) - 0. I. OH (V
) x [1.1 (%) + 200 (rnV
) x O. 1 (?6)-0.3(mV
) becomes. In other words, the difference is ±0.3 (mV) when the voltage is 31 vM, and the actual output of the terminal regulator 1 is 10.0997 (V
)~In. It exists in the range of +003 (V).The conventional 4PI constant 1;f
．． 03V), so it's all constant; cold is about 1/+00
This means that it has decreased to In this practical advantage, constant voltage source 30
A new opening is provided, and the voltage jl is set above the difference tliI between the output voltage of the three-terminal r regulator 1 and the constant voltage of the constant voltage source 30 ().
VM minimum ill constant range (200rnV)) 11
1 constant, the All constant 1τ1 difference is smaller than in the past.

FIG. 2 is a block diagram showing another embodiment of the invention. In the figure, the difference with the device shown in FIG. 3 different IEs
Two constant voltage sources 3 0 0 a, 3 (1 0 b
, 30 (1c is provided, and the switch 400 connects constant voltage sources 300a, 300b, 3
0 0 c can be selected. The other 4M configurations are the same as the device shown in FIG. Furthermore, m? Is pressure #. 3 0
It is assumed that the constant rIS pressures of 0 a , 3 0 0 b , and 3 0 0 c are the highest for the constant voltage source 300 a and then decrease in the order of the constant voltage sources 300 b and 300 c. In addition, the difference in constant voltage between the constant voltage source 300a and the constant voltage source 300b and the constant voltage source 30('
The difference in constant voltage between 1b and constant voltage source 300c is
It is assumed that the minimum value of E÷1vH is set to be at least twice the value of the fixed range.

For example, if the output voltage of the three-terminal regulator 1 is ln. o0
Consider the case where it is expected to take a certain value between 0V±500mV. As mentioned above, the minimum fixed range of the pressure it' VM is 200 mV. Regarding this, L
Constant voltage 1 (i 3 0 0 a, 3 0 f:.
] b, 3 0 0 c constant: 'is pressure, respectively I
0.4.00 (1.7). 10.000 (V)
, 9. Set to 600 (V). The output voltage of three-terminal regulator 1 is 9.500 (V) to 9.80
When p is assumed to take a value between 0 (V), CP
Switch 4. is activated by a command from U section 11. Switch O O and select constant voltage source 3 0 0C, 9.8110 (
V) ~ 10.200 (V) If you take 1 straight hair; t! ! When this happens, the Suinochi 400 is switched according to the 1i signal from the CPU section 11, and the constant voltage source 3f') (
．． Select 1lb and 10.200 (V) to I.
When the value is expected to be between 0.500 (V), the switch 400 is switched in response to a command from the CPU section 11, and the pressure 7 is selected to be 3f 3 0 0 a. In each case, the output voltage of the three-terminal r-regulator 1 and the constant voltage source 3 0 0 a 3 0 0 b 3 0
Considering the constant voltage line f''1'' of the previous series, the voltage with a constant 7B voltage of 0 c is within 200 mV.

Therefore, the measurement range for voltage 1■H is set to the minimum range/2.
It may be set to 0 0 tn V. Therefore, (1
) to the formula. ! The measurement error required based on I(I) is smaller than that when using a measurement range of 2 or 20. Therefore, even if the output voltage range of 1' + 1111 is relatively wide, a high accuracy can be obtained. Measurement becomes possible.

In addition, in the embodiment described in -L, constant voltage sources 30 0, '3 (
-) O a, 73 D O b , 3 0 0
Although the constant voltage of c is set, it is not necessarily necessary to set it to use the minimum I1-1 constant range, and any constant voltage that allows measurement in a lower range may be used.

In addition, in the above embodiment, the output voltage of the three-terminal regulator 1 and the constant voltage source 3 0 (.) , 3 0 0 a
, 300. Is the differential voltage from the constant voltage of 300c fully determined by direct voltage pull VM, or is the differential voltage detected by a good differential amplifier of 16 degrees, and this detected voltage? It may be measured by lit-E÷1vH.

In addition, although the 12th embodiment example-C includes the three-terminal regulator 1 as the semiconductor under test, various other types of semiconductor devices such as D/A converters, reset ICs, etc. This invention is also suitable for testing equipment of 1"c.

In addition, in the case of ``Second Record 1 Crit'', the measurement legon of voltmeter V9 is 3 fII class (200 mV, 2 V. 20V)
Although the above case has been described, two types or four or more types may be distributed. Conversely, the electric meter VM may have only one type of 71111 constant range. In other words, by providing a constant voltage source 300 etc., the right side of equation (1) (
71! II constant value) can be made small, so ( , 1il
+ fixed error) can also be reduced. In addition, the second
In the illustrated embodiment, three types of constant voltage sources 300a and 300b' are used.
Regarding the case of combining 3 0 0 c] Li1, but
Due to the expected output voltage range of the three-way regulator 1,
It may be set in any number of ways. Also constant voltage FA 300
a, 300b. 300c and the switch 400 do not necessarily have to be provided inside the test head 2, but may be provided inside the tester 8. Further, in the embodiment shown in FIG. 2, the switch 400 connects the constant voltage source 3 0 0 a , -
．． 300b and 300c were switched to obtain three types of constant pressure, but switch 4
00 and constant pressure source 3 0 0 a , 3 0 0
As shown in Fig. 4, install a D/A converter 50o instead of 300c and 300c, and set the voltage to vM! The constant voltage that can be applied may be digitally controlled. In this case, a constant voltage can be obtained by a combination of predetermined voltage values corresponding to the bits of each digit, so that a smaller test device can be obtained than in the above embodiment.

〔Effect of the invention〕

As described above, according to the present invention, a constant voltage source is connected in series with a voltage source for measuring the output voltage of a semiconductor element, and the output voltage of the semiconductor element and the constant voltage of the constant voltage source are connected in series. Since the differential voltage is measured by voltage, it is possible to reduce the voltage that must be determined by voltage measurement, and as a result, the voltage of the output of the semiconductor element r can be determined with accuracy < llpl. There is an effect.

4. Explanation of Drawings FIG. 1 shows an embodiment of a semiconductor device testing apparatus according to the present invention. 1, 2 and 3 are configuration diagrams showing other embodiments of the present invention, and FIG. 4 is a groove diagram showing a conventional semiconductor device testing apparatus.

In the figure, 1 is a three-end R regulator, VM is a 7U pressure gauge, and 300 is a constant pressure source.

Note that the same reference numerals in each figure indicate the same or relevant parts.

Claims (1)

[Claims] (1) A semiconductor device testing device that applies a predetermined input to a semiconductor device and tests the semiconductor device based on the output of the semiconductor device derived in response to the input, the device comprising: A constant voltage source is connected in series with a voltmeter for measuring voltage, and the voltage difference between the output voltage of the semiconductor element and the constant voltage of the constant voltage source is measured by the voltmeter. Characteristic testing equipment for semiconductor devices.