JPH0355156U - - Google Patents

Info

Publication number
JPH0355156U
JPH0355156U JP11362289U JP11362289U JPH0355156U JP H0355156 U JPH0355156 U JP H0355156U JP 11362289 U JP11362289 U JP 11362289U JP 11362289 U JP11362289 U JP 11362289U JP H0355156 U JPH0355156 U JP H0355156U
Authority
JP
Japan
Prior art keywords
polishing
surface plate
abrasive
liquid
cloth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11362289U
Other languages
English (en)
Japanese (ja)
Other versions
JP2523129Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989113622U priority Critical patent/JP2523129Y2/ja
Publication of JPH0355156U publication Critical patent/JPH0355156U/ja
Application granted granted Critical
Publication of JP2523129Y2 publication Critical patent/JP2523129Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1989113622U 1989-09-28 1989-09-28 鏡面研磨装置 Expired - Fee Related JP2523129Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989113622U JP2523129Y2 (ja) 1989-09-28 1989-09-28 鏡面研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989113622U JP2523129Y2 (ja) 1989-09-28 1989-09-28 鏡面研磨装置

Publications (2)

Publication Number Publication Date
JPH0355156U true JPH0355156U (cg-RX-API-DMAC7.html) 1991-05-28
JP2523129Y2 JP2523129Y2 (ja) 1997-01-22

Family

ID=31662030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989113622U Expired - Fee Related JP2523129Y2 (ja) 1989-09-28 1989-09-28 鏡面研磨装置

Country Status (1)

Country Link
JP (1) JP2523129Y2 (cg-RX-API-DMAC7.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334361A (ja) * 1986-07-25 1988-02-15 Sansui Electric Co ねじ送り装置
JPH01210268A (ja) * 1988-02-17 1989-08-23 Toshiba Mach Co Ltd 研磨方法および研磨装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6334361A (ja) * 1986-07-25 1988-02-15 Sansui Electric Co ねじ送り装置
JPH01210268A (ja) * 1988-02-17 1989-08-23 Toshiba Mach Co Ltd 研磨方法および研磨装置

Also Published As

Publication number Publication date
JP2523129Y2 (ja) 1997-01-22

Similar Documents

Publication Publication Date Title
CA1215841A (en) Wet surface treating device and element therefor
EP1334802B1 (en) Method for dressing a polishing cloth
US7083506B2 (en) Polishing apparatus
US8197306B2 (en) Method and device for the injection of CMP slurry
JPH0355156U (cg-RX-API-DMAC7.html)
JPS57168856A (en) Grinding machine selectively performing rough and finish grinding
CN218639346U (zh) 多孔化学机械抛用光垫
JP2000343406A5 (cg-RX-API-DMAC7.html)
JPH0929617A (ja) 研磨装置
CN220296876U (zh) 一种eva涂附磨具
CN211103441U (zh) 一种机械制造用打磨装置
CN212859859U (zh) 一种应用于胚体卫具的旋转喷釉装置
JPS61144952U (cg-RX-API-DMAC7.html)
JPS6154459U (cg-RX-API-DMAC7.html)
JPH01125158U (cg-RX-API-DMAC7.html)
JPS6327256U (cg-RX-API-DMAC7.html)
JPH02126752U (cg-RX-API-DMAC7.html)
JPH01135474A (ja) 研磨装置
JPH0551426B2 (cg-RX-API-DMAC7.html)
JPS63172562U (cg-RX-API-DMAC7.html)
JPS62162468A (ja) ウエハ用研削装置
JPS62147454U (cg-RX-API-DMAC7.html)
Indge CERAMIC MACHINING
JPS63136867U (cg-RX-API-DMAC7.html)
JPH0166962U (cg-RX-API-DMAC7.html)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees