JPH0355145A - Aligning device - Google Patents

Aligning device

Info

Publication number
JPH0355145A
JPH0355145A JP18909689A JP18909689A JPH0355145A JP H0355145 A JPH0355145 A JP H0355145A JP 18909689 A JP18909689 A JP 18909689A JP 18909689 A JP18909689 A JP 18909689A JP H0355145 A JPH0355145 A JP H0355145A
Authority
JP
Japan
Prior art keywords
axis
stage
axis stage
main shaft
detection sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18909689A
Other languages
Japanese (ja)
Inventor
Katsuhisa Okawa
大川 勝久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP18909689A priority Critical patent/JPH0355145A/en
Publication of JPH0355145A publication Critical patent/JPH0355145A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide aligning possibility while servo-inherent vibration avoided by using an X-axis stage and a Y-axis stage having the same product of the rigidity of stage for the movable direction and the weight applied to the stage, adjusting the timing for the X and Y stages after aligning, and performing servo motion. CONSTITUTION:A servo-off control device 12 receives a signal from an encoder 7, and a command value is fixed, wherein the command value is for a control part 10 to drive an X-stage 1 when the rotational angle of a rotary spindle 5 is such that the X-stage 1 is neutral relative to the gravitation. This is followed by fixation of a command value, which is for the control part 10 to drive a Y-stage 2 when the rotational angle of the rotary spindle 5 is such that the Y-stage 2 becomes neutral relative to the gravitation.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、調心装置に関し、特に施盤の主軸等の回転軸
に取付けられた対象ワークをその回転軸の回転に従い対
象ワーク上の所定の中心軸を中心に回転させる調心装置
に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an alignment device, and in particular, the present invention relates to an alignment device that aligns a workpiece attached to a rotating shaft such as the main shaft of a lathe to a predetermined position on the target workpiece according to the rotation of the rotating shaft. This invention relates to an alignment device that rotates around a central axis.

〔従来の技術〕[Conventional technology]

第2図は従来の調心装置の一例を示す構成図である。 FIG. 2 is a configuration diagram showing an example of a conventional alignment device.

第2図に示す調心装置は、ベースに固定された軸受に水
平に軸支された中空の回転主軸5と、回転主軸5に取付
けられ可動方向が回転主軸5の中心軸に垂直なX軸ステ
ージ1と、X軸ステージ1の可動部分に取付けられ可動
方向が回転主軸5の中心軸およびX軸ステージ1の可動
方向に垂直なY@ステージ2と、X軸ステージ1にとり
つけられて訃りX軸ステージ1の可動方向の変位を検出
するX軸変位検出センサ3と、Y軸ステージ2にとりつ
けられてか#)Y軸ステージ2の可動方向の変位を検出
するY軸変位検出センサ4と、Y軸ステージ2の可動部
分に固定され把持されるワークがほぼ回転主軸5の中心
軸上に〈るチャック8と、回転主軸5のX,Yステージ
1.  2と反対側の端面に接続してかり回転部分とベ
ース側の固定部分の電気的接続を行なうスリプグリング
6と、スリップリング6を介してX軸ステージ1とY軸
ステージ2に接続しているステージコントローラ11と
、スリップリング6を介してX@笈位検出センサ3とY
軸変位検出センサ4に接続しているセンサアンプ9と、
センサアンプ9からのXY2軸の出力(X軸変位検出セ
ンサ3、Y$lI]変位検出センサ4の出力に対応)を
各々の目標値に一致させるようにステージコントローラ
llVc指令を与える制御装置]Oとを含んでいる。
The alignment device shown in FIG. 2 consists of a hollow rotating main shaft 5 that is horizontally supported by a bearing fixed to a base, and an X axis that is attached to the rotating main shaft 5 and whose movable direction is perpendicular to the central axis of the rotating main shaft 5. Stage 1, Y@stage 2, which is attached to the movable part of the X-axis stage 1 and whose movable direction is perpendicular to the center axis of the rotating main shaft 5 and the movable direction of the X-axis stage 1, and a Y@stage 2, which is attached to the X-axis stage 1 and is An X-axis displacement detection sensor 3 detects the displacement of the X-axis stage 1 in the movable direction, and a Y-axis displacement detection sensor 4 attached to the Y-axis stage 2 detects the displacement of the Y-axis stage 2 in the movable direction. , a chuck 8 in which the workpiece fixed and gripped by the movable part of the Y-axis stage 2 is located approximately on the central axis of the rotating main shaft 5, and an X, Y stage 1 of the rotating main shaft 5. A slip ring 6 is connected to the end face on the opposite side of 2 and performs electrical connection between the rotating part and the fixed part on the base side, and the stage is connected to the X-axis stage 1 and the Y-axis stage 2 via the slip ring 6. Controller 11 and X @ light position detection sensor 3 and Y via slip ring 6
A sensor amplifier 9 connected to the shaft displacement detection sensor 4,
A control device that gives commands to the stage controller llVc so that the outputs of the two axes of the XY axis (corresponding to the outputs of the X-axis displacement detection sensor 3, Y$lI and displacement detection sensor 4) from the sensor amplifier 9 match the respective target values]O Contains.

チャック8にワークを・チャックし、圓転主軸5を回転
する。X軸変位検出センサ3とYIllI変位検出セン
サ4の出力が回転主軸5の中空部分を通ってスリップリ
ング6に接続され、スリッグリンク6を介してセンサア
ンプ9から出力され、制{IKI装置10V(入る。制
御装置1oはセンサアンプ9がらのXY2軸の入力を各
々の目標直に一致させるようにステージコントローラ1
1に指令を与え、ステージコントローラl1はスリップ
リング6を介してX軸ステージ1とY軸ステージ2を制
御装置10の指令通ジr(駆動する(X,Y棚ステージ
1,2の駆動源は例えば圧電素子を用いる)。
A workpiece is chucked on the chuck 8, and the rotary spindle 5 is rotated. The outputs of the X-axis displacement detection sensor 3 and the YIllI displacement detection sensor 4 are connected to the slip ring 6 through the hollow part of the rotating main shaft 5, and are output from the sensor amplifier 9 via the slip link 6. The control device 1o controls the stage controller 1 so that the inputs of the sensor amplifier 9 on the X and Y axes correspond directly to the respective targets.
1, the stage controller l1 drives the X-axis stage 1 and the Y-axis stage 2 via the slip ring 6 through the command of the control device 10 (the drive source of the X, Y shelf stages 1 and 2 is For example, using a piezoelectric element).

回転主4I!]5の回転により各ステージ1,2にかか
る重力による荷重方向が各ステージ1,2の可動方向に
対し相対的に変わるため各ステージ1.2の可動方向の
荷重によるたわみ量が汝化する。このたわみ量の変化を
センサ3,4で検出し、X,Y軸ステージ1.  2を
駆動して桶正することによシワーク上の調心ざれる所定
の輸が一定の位置(目転主軸5の回転による回転中心)
に(4)定されるようにする。調心は制御装置10に与
える目標匝を袈化させることによfi、X,Y軸ステー
ジ1,2を笈位させて行なう。
Rotating master 4I! ] 5, the direction of the load due to gravity applied to each stage 1, 2 changes relative to the movable direction of each stage 1, 2, so the amount of deflection due to the load in the movable direction of each stage 1.2 becomes smaller. This change in the amount of deflection is detected by sensors 3 and 4, and the X and Y axis stages 1. By driving 2 and correcting the bucket, a predetermined position on the shearwork that is not aligned is kept at a constant position (rotation center due to rotation of the rotation main shaft 5)
(4). Alignment is carried out by adjusting the target value given to the control device 10 to position the fi, X, and Y axis stages 1 and 2.

第3図はステージにかかる荷重とステージの変位の説明
図である。ステージ剛性のX軸ステージ1の可動方向、
Y@ステージ2の可動方向それぞれのものをB X r
 B Y sステージにかかる荷重をWx,WY とす
ると(WXぱテヤック8、Y軸ステージ2, X@if
ステージ1,Y軸変位検出センサ4それそれの重量の和
、Wyはチャック8,  Y軸ステーシ1それぞれのM
量の和)、)[1ステージのふれbりklt’lBzW
x cosθ,Y軸ステージのふれ回υ童はByWyc
os(B−90’) となる。
FIG. 3 is an explanatory diagram of the load applied to the stage and the displacement of the stage. Stage rigidity X-axis Stage 1 movable direction,
Y@B for each movable direction of stage 2
If the load applied to the B Y s stage is Wx, WY (WX path rack 8, Y axis stage 2, X@if
The sum of the weights of stage 1 and Y-axis displacement detection sensor 4, Wy is M of each of chuck 8 and Y-axis station 1.
sum of amounts),)[1 stage deflectionklt'lBzW
x cos θ, Y-axis stage movement υ is ByWyc
os(B-90').

このふれ回!)量をOとするように袖正する。This interaction! ) Adjust the sleeve so that the amount is O.

〔晃明が解決しようとする殊題〕[Special problem that Komei tries to solve]

−5 上述した従来の調心装置は、調心中、変位検出センサか
らの信号を一定に保つようにステージを制御し続けてい
るめで、サーボ特有の&動が訃こるという欠点があった
-5 The conventional alignment device described above has the disadvantage that during alignment, the stage is continuously controlled so as to keep the signal from the displacement detection sensor constant, and the & movement peculiar to the servo is lost.

(課題を解決するための手段コ 本発明の調心装置は、中心軸が水平な回転主軸と、前記
回転主軸に取付けられ可動方向が前記一転主軸の中心軸
に垂直なX +lll+ステージと、前記X軸ステージ
の川動部分に取付けられ可動方向が前記口転主軸の中心
軸および前記X軸ステージの可動力向K垂直で可動方向
に対する剛性と負荷されるlr重の積が前記X軸ステー
ジと等しいYIIIIステージと、前記X軸ステージの
可動方向の変位を検出するX軸変位倹出センサと、前記
Y軸ステージのoT動方向の変位を検出するY棚変位槓
出センサと、前記Y軸ステージの可動部分に固定さi″
L把持するソークがほほ前記目転主軸の中心軸上にくる
チャックと、前記X軸変位検出センサふ・よび前記Ys
I変位検出センサそれぞれの出力が目標f直に一致する
ように前記X軸ステージをよひ前記Y軸スー6 〜 転角を検出するエンコーダと、前記エンコーダからの信
号を受け前記X軸ステージが重力に対し中立となる前記
b転主JPf!Jの回転角の時の前記制御部が前記X軸
ステージを駆動する指令値を固定させ前Ht Y軸ステ
ージが重力に対し中立となる前記回転主軸の一転角0時
Qノ前記制御部が前記Y軸ステージをJAs 動する指
令1直を固定させるサーボオフ制御袈甑とを含んで構威
される。
(Means for Solving the Problems) The alignment device of the present invention comprises: a rotating main shaft whose center axis is horizontal; an It is attached to the river motion part of the X-axis stage, and the movable direction is perpendicular to the center axis of the main shaft and the movable force direction K of the X-axis stage, and the product of the rigidity with respect to the movable direction and the loaded lr weight is the product of the X-axis stage and an equal YIII stage, an X-axis displacement sensor that detects the displacement of the X-axis stage in the movable direction, a Y-shelf displacement ejection sensor that detects the displacement of the Y-axis stage in the OT movement direction, and the Y-axis stage. fixed to the movable part of i″
A chuck whose gripped soak is almost on the center axis of the rotation main shaft, the X-axis displacement detection sensor, and the Ys.
The X-axis stage is moved so that the output of each I displacement detection sensor coincides with the target f. The b-transfer owner JPf, who is neutral against JPf! The control unit fixes the command value for driving the X-axis stage when the rotation angle is J, and the control unit fixes the command value for driving the X-axis stage before Ht. It is configured to include a servo-off control cap that fixes the first shift command to move the Y-axis stage.

〔実施例] 次に、本発明の実施例について、図面を参照して詳細に
説明する。
[Example] Next, an example of the present invention will be described in detail with reference to the drawings.

第1図は本発明の一実施例を示す構戊図・である。FIG. 1 is a schematic diagram showing an embodiment of the present invention.

第1図に示す調心装置は、ベースに固定された軸受に水
平に軸支された回転主軸5と、回転主軸5に堆付けられ
可動方向が回転主軸5の中心軸に垂直なX軸ステージ1
と、X軸ステージlの可動部分に取付けられ可動方向が
回転主軸5の中心軸釦よひXlllステージ1の0]動
方向に垂直でステージの可動方向に対する剛性と負荷さ
れる荷重の槓BYWYがX軸ステージ1の積Bxwx 
と等しいY4441ステージ2と、X軸ステージ1にと
りつけられてかりX軸ステージ1の可動方向の変位を検
出するX軸変位検出センサ3と、Y軸ステージ2にとう
つけられておbY軸ステージ2の可動方向変位を検出す
るY軸変位検出センサ4と、Y軸ステージ2の可動部分
に固定され把持されるワークがほぼ四転主軸5の中心軸
上にくるチャック8と、回転主軸5に接続してかυ目転
部分とペース側の固定部分の電気的接続を行なうスリッ
プリング6と、スリップリング6を介してX44Ilス
テージ1とY軸ステージ2に接続しているステージコン
トロ一211と、スリップリング6を介してX軸変位検
出センサ3とY軸変位検出センサ4に接続しているセン
サアンプ9と、セ/サアンプ9からのXY2軸の出力を
各々の目標値に一致させるようにステージコントローラ
11に指令を与える制御装置10と、回転主軸5に接続
しており回転主軸5の回転角を検出するエンコーダ7と
、X軸ステージ1とY軸ステージ2への指令値をそれぞ
れ別個にエンコーダ7からの信号より一定値に保つよう
制御装置10に指令を与えるサーボオフ制御装置12と
を含んで構或される。
The alignment device shown in FIG. 1 includes a rotating main shaft 5 that is horizontally supported by a bearing fixed to a base, and an X-axis stage that is mounted on the rotating main shaft 5 and whose movable direction is perpendicular to the central axis of the rotating main shaft 5. 1
is attached to the movable part of the X-axis stage l, and the movable direction is the center axis button of the rotating main shaft 5. Product Bxwx of X-axis stage 1
Y4441 stage 2, which is attached to the X-axis stage 1 and detects the displacement of the X-axis stage 1 in the movable direction; A Y-axis displacement detection sensor 4 that detects displacement in the movable direction of the Y-axis stage 2, a chuck 8 whose gripped workpiece is fixed to the movable part of the Y-axis stage 2 approximately on the central axis of the quadrilateral spindle 5, and a rotary spindle 5 connected to the chuck 8. The slip ring 6 electrically connects the υ rotation part and the fixed part on the pace side, the stage controller 211 which is connected to the X44Il stage 1 and the Y-axis stage 2 via the slip ring 6, and the slip The sensor amplifier 9 is connected to the X-axis displacement detection sensor 3 and the Y-axis displacement detection sensor 4 via the ring 6, and the stage controller is configured to match the outputs of the two XY axes from the sensor amplifier 9 to their respective target values. 11, an encoder 7 that is connected to the rotating main shaft 5 and detects the rotation angle of the rotating main shaft 5, and an encoder 7 that separately sends command values to the X-axis stage 1 and the Y-axis stage 2. and a servo-off control device 12 that gives a command to the control device 10 to maintain a constant value based on a signal from the servo-off control device 12.

チャック8にワークをチャックし回転主軸5を回転する
。XIplII変位検出センサ3とY軸変位検出センサ
4の出力が回転主軸5の中空部分を通ってスリップリン
グ6に接続され、スリップリング6を介してセンサアン
プ9から出力され制御装置1oに入る。制御装置10は
センサアンプ9からのXY2軸の入力を各々の目標値に
一致させるようにステージコントローラー1に指令を与
え、ステージコントローラー1はスリップリング6を介
してX軸ステージ1とY軸ステージ2を制御装置10の
指令通ルに駆動する。これによりX軸ステージ1とY軸
ステージ2を固定し、制御装置1oに与える目標値を変
化させることによりX軸ステージ1とY軸ステージ2を
変化させチャック8に把持したワークを調心する。
A workpiece is chucked on the chuck 8 and the rotating main shaft 5 is rotated. The outputs of the XIplII displacement detection sensor 3 and the Y-axis displacement detection sensor 4 are connected to the slip ring 6 through the hollow part of the rotating main shaft 5, and are output from the sensor amplifier 9 via the slip ring 6 and enter the control device 1o. The control device 10 gives a command to the stage controller 1 to match the inputs of the two X and Y axes from the sensor amplifier 9 to their respective target values, and the stage controller 1 controls the X-axis stage 1 and the Y-axis stage 2 via the slip ring 6. is driven according to the commands of the control device 10. As a result, the X-axis stage 1 and the Y-axis stage 2 are fixed, and by changing the target value given to the control device 1o, the X-axis stage 1 and the Y-axis stage 2 are changed to align the work gripped by the chuck 8.

その後X軸ステージ1が重力に対し中立の位置になるI
OJ転主軸5の角度をエンコーダ7により検9 出し、このときサーボオフ制御装置12はX軸ステージ
のサーボを切りステージコントローラ11のX軸ステー
ジ1への指令1直を以後一定値に保つようにステージコ
ントローラ11を制御する。次にY軸ステージ2が重力
に対し中立の位置になる回転主軸5の角度をエンコーダ
7によb検出し、このときサーボオフ制御装置12はY
軸ステージのサーボを切りステージコントローラ11の
Y軸ステージ2への指令値を以後一定直に保つようにス
テージコントローラ1lを制御する。X軸ステージ1と
Y軸ステージ2の可動方向は90°ずれてかり、Y軸ス
テージ2が中立位置のとき先にサーボを切ったX軸ステ
ージlはBXWXだけ変位する。この結果、XY軸ステ
ージ1.2トモ”)−−ボが切れ重力の影響によるふれ
まわυを釦こす。
After that, the X-axis stage 1 becomes in a neutral position with respect to gravity.
The angle of the OJ rotation spindle 5 is detected by the encoder 7, and at this time the servo-off control device 12 turns off the servo of the X-axis stage so that the stage controller 11 commands the X-axis stage 1 to maintain a constant value. Controls the controller 11. Next, the encoder 7 detects the angle of the rotation main shaft 5 at which the Y-axis stage 2 is in a neutral position with respect to gravity, and at this time the servo-off control device 12
The stage controller 1l is controlled so that the servo of the axis stage is turned off and the command value from the stage controller 11 to the Y-axis stage 2 is kept constant from then on. The moving directions of the X-axis stage 1 and the Y-axis stage 2 are shifted by 90 degrees, and when the Y-axis stage 2 is at the neutral position, the X-axis stage 1 whose servo is turned off first is displaced by BXWX. As a result, the XY-axis stage 1.2")--bow is cut off, causing the button to swing υ due to the influence of gravity.

ステージの可動方向に対するM性と負荷される荷重の積
がX軸ステージIY軸ステージ2について咎し〈なるよ
うに各ステージの剛性を決めてあるから、 BXWX−BYWY 10 このX軸Y軸のふれ回bを合成すると第3図から、 X−−B XWX COSθsinθ−’B yW y
 cos (θ−90°)sin((/−90°)BX
WXCOSθsinθ+ByWysinθcosθ=O Y=−BXWXCOSθcosO−ByWycos(θ
−90’)cos((/−90’)=−B XWX c
os# cosU−B yWy s in(/ s i
nO=−BXWX (X,Yはワークの水平方向のたわみ量鮫よび垂直方向
のたわみ童、θはX軸ステージ1の可動方向と水平方向
の間の角度である) となう、ふれ回りがキャンセルされ、ワークは目標値に
より調心した位置よりステージにかかる重量分(BxW
x)だけ下がった位置で調心されることになる。回転主
軸5の中心軸とワークの回転の中心軸はずれるが、向転
に対してワークは調心されている。
Since the rigidity of each stage is determined so that the product of the M property in the moving direction of the stage and the applied load is for the X-axis stage IY-axis stage 2, BXWX-BYWY 10 This X-axis and Y-axis deflection When combining the times b, from Figure 3, we get: X--B XWX COSθsinθ-'B yW y
cos (θ-90°) sin ((/-90°) BX
WXCOSθsinθ+ByWysinθcosθ=O Y=−BXWXCOSθcosO−ByWycos(θ
-90')cos((/-90')=-B XWX c
os# cosU-B yWy s in (/s i
nO=-BXWX (X, Y is the horizontal deflection of the workpiece and vertical deflection, and θ is the angle between the movable direction of the X-axis stage 1 and the horizontal direction). The work is canceled and the workpiece is moved from the position centered by the target value to the weight applied to the stage (BxW
It will be centered at a position lowered by x). Although the central axis of the rotating main shaft 5 and the central axis of rotation of the workpiece are misaligned, the workpiece is aligned with respect to rotation.

〔発明の効果〕〔Effect of the invention〕

本発明の一心装置は、ステージの可動方向に対する剛性
とステージにかかる重量の積が等しいX軸ステージとY
軸ステージを用い、調心後、X,Y軸ステージについて
タイミングをとってザーボを切ることにより、サーボ特
有の振動をさけて調心できるという効果がある。
The single-center device of the present invention has an
By using an axis stage and turning off the servo at the appropriate timing for the X and Y axis stages after alignment, there is an effect that alignment can be achieved while avoiding vibrations peculiar to the servo.

【図面の簡単な説明】[Brief explanation of drawings]

第1国は本兄19」の一実施例を示す構成図、第2図は
従来の調心装置を示す槙或図、鉛3圓はザボを切った場
合の第1図に示1゛ステージ1.2の動作を説明する図
である。 1・・・・・・X軸ステージ、2・・・・・・Y軸ステ
ージ、3・・・・・・X軸変位検出センサ、4・・・・
・・Yll411f位検出センサ、5・・・・・・−1
転主軸、6・・・・・・スリップリング、7・・・・・
・エンコータ、8・・・・・・チャック、9・・・・・
・センサアンプ、10・・・・・・制御装置、11・・
・・・・ステージコントローラ、12・・・・・・サー
ボオフ制御装置。
The first country is a configuration diagram showing an example of the main brother 19. Figure 2 is a diagram showing a conventional centering device. Figure 1 shows the 1st stage when the lead 3 round is cut. 1.2 is a diagram explaining the operation. 1...X-axis stage, 2...Y-axis stage, 3...X-axis displacement detection sensor, 4...
・・Yll411f position detection sensor, 5・・・・・・-1
Spindle, 6...Slip ring, 7...
・Encoder, 8... Chuck, 9...
・Sensor amplifier, 10... Control device, 11...
... Stage controller, 12 ... Servo-off control device.

Claims (1)

【特許請求の範囲】[Claims] 中心軸が水平な回転主軸と、前記回転主軸に取付けられ
可動方向が前記回転主軸の中心軸に垂直なX軸ステージ
と、前記X軸ステージの可動部分に取付けられ可動方向
が前記回転主軸の中心軸および前記X軸ステージの可動
方向に垂直で可動方向に対する剛性と負荷される荷重の
積が前記X軸ステージと等しいY軸ステージと、前記X
軸ステージの可動方向の変位を検出するX軸変位検出セ
ンサと、前記Y軸ステージの可動方向の変位を検出する
Y軸変位検出センサと、前記Y軸ステージの可動部分に
固定され把持するワークがほぼ前記回転主軸の中心軸上
にくるチャックと、前記X軸変位検出センサおよび前記
Y軸変位検出センサそれぞれの出力が目標値に一致する
ように前記X軸ステージおよび前記Y軸ステージを駆動
させる制御部と、前記回転主軸の回転角を検出するエン
コーダと、前記エンコーダからの信号を受け前記X軸ス
テージが重力に対し中立となる前記回転主軸の回転角の
時の前記制御部が前記X軸ステージを駆動する指令値を
固定させ前記Y軸ステージが重力に対し中立となる前記
回転主軸の回転角の時の前記制御部が前記Y軸ステージ
を駆動する指令値を固定させるサーボオフ制御装置とを
含むことを特徴とする調心装置。
a rotating main shaft whose central axis is horizontal; an X-axis stage that is attached to the rotating main shaft and whose movable direction is perpendicular to the central axis of the rotating main shaft; a Y-axis stage that is perpendicular to the moving direction of the axis and the X-axis stage and whose product of the rigidity in the moving direction and the applied load is equal to that of the X-axis stage;
an X-axis displacement detection sensor that detects the displacement of the axis stage in the movable direction; a Y-axis displacement detection sensor that detects the displacement of the Y-axis stage in the movable direction; and a workpiece fixed to the movable part of the Y-axis stage to be gripped. Control for driving the X-axis stage and the Y-axis stage so that the chuck is located approximately on the central axis of the rotational main shaft, and the outputs of the X-axis displacement detection sensor and the Y-axis displacement detection sensor match target values. an encoder for detecting a rotation angle of the rotary main shaft; and a control unit that receives a signal from the encoder and detects a rotation angle of the rotary main shaft such that the X-axis stage is neutral with respect to gravity. a servo-off control device that fixes a command value for driving the Y-axis stage, and fixes a command value for driving the Y-axis stage by the control unit when the rotation angle of the rotational main shaft is such that the Y-axis stage is neutral with respect to gravity. A centering device characterized by:
JP18909689A 1989-07-20 1989-07-20 Aligning device Pending JPH0355145A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18909689A JPH0355145A (en) 1989-07-20 1989-07-20 Aligning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18909689A JPH0355145A (en) 1989-07-20 1989-07-20 Aligning device

Publications (1)

Publication Number Publication Date
JPH0355145A true JPH0355145A (en) 1991-03-08

Family

ID=16235279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18909689A Pending JPH0355145A (en) 1989-07-20 1989-07-20 Aligning device

Country Status (1)

Country Link
JP (1) JPH0355145A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200482377Y1 (en) * 2016-06-16 2017-01-17 한인복 Umbrella and parasol prop for bicycle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200482377Y1 (en) * 2016-06-16 2017-01-17 한인복 Umbrella and parasol prop for bicycle

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