JPH0353848U - - Google Patents
Info
- Publication number
- JPH0353848U JPH0353848U JP11485689U JP11485689U JPH0353848U JP H0353848 U JPH0353848 U JP H0353848U JP 11485689 U JP11485689 U JP 11485689U JP 11485689 U JP11485689 U JP 11485689U JP H0353848 U JPH0353848 U JP H0353848U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- supported
- wafers
- unloading machine
- support rollers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 10
- 238000000926 separation method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485689U JPH0353848U (enExample) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11485689U JPH0353848U (enExample) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353848U true JPH0353848U (enExample) | 1991-05-24 |
Family
ID=31663204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11485689U Pending JPH0353848U (enExample) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353848U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010094278A1 (de) * | 2009-02-19 | 2010-08-26 | Jonas & Redmann Automationstechnik Gmbh | Verfahren und vorrichtung zum bilden einer paketartigen back-to-back-wafercharge |
-
1989
- 1989-09-29 JP JP11485689U patent/JPH0353848U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010094278A1 (de) * | 2009-02-19 | 2010-08-26 | Jonas & Redmann Automationstechnik Gmbh | Verfahren und vorrichtung zum bilden einer paketartigen back-to-back-wafercharge |