JPH0353848U - - Google Patents

Info

Publication number
JPH0353848U
JPH0353848U JP11485689U JP11485689U JPH0353848U JP H0353848 U JPH0353848 U JP H0353848U JP 11485689 U JP11485689 U JP 11485689U JP 11485689 U JP11485689 U JP 11485689U JP H0353848 U JPH0353848 U JP H0353848U
Authority
JP
Japan
Prior art keywords
wafer
supported
wafers
unloading machine
support rollers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11485689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11485689U priority Critical patent/JPH0353848U/ja
Publication of JPH0353848U publication Critical patent/JPH0353848U/ja
Pending legal-status Critical Current

Links

JP11485689U 1989-09-29 1989-09-29 Pending JPH0353848U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11485689U JPH0353848U (enrdf_load_stackoverflow) 1989-09-29 1989-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11485689U JPH0353848U (enrdf_load_stackoverflow) 1989-09-29 1989-09-29

Publications (1)

Publication Number Publication Date
JPH0353848U true JPH0353848U (enrdf_load_stackoverflow) 1991-05-24

Family

ID=31663204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11485689U Pending JPH0353848U (enrdf_load_stackoverflow) 1989-09-29 1989-09-29

Country Status (1)

Country Link
JP (1) JPH0353848U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010094278A1 (de) * 2009-02-19 2010-08-26 Jonas & Redmann Automationstechnik Gmbh Verfahren und vorrichtung zum bilden einer paketartigen back-to-back-wafercharge

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010094278A1 (de) * 2009-02-19 2010-08-26 Jonas & Redmann Automationstechnik Gmbh Verfahren und vorrichtung zum bilden einer paketartigen back-to-back-wafercharge

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