JPH0353833U - - Google Patents
Info
- Publication number
- JPH0353833U JPH0353833U JP11529789U JP11529789U JPH0353833U JP H0353833 U JPH0353833 U JP H0353833U JP 11529789 U JP11529789 U JP 11529789U JP 11529789 U JP11529789 U JP 11529789U JP H0353833 U JPH0353833 U JP H0353833U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- vapor phase
- growth apparatus
- infrared lamp
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims 2
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11529789U JPH0353833U (cs) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11529789U JPH0353833U (cs) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353833U true JPH0353833U (cs) | 1991-05-24 |
Family
ID=31663629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11529789U Pending JPH0353833U (cs) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353833U (cs) |
-
1989
- 1989-09-29 JP JP11529789U patent/JPH0353833U/ja active Pending
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