JPH0353597B2 - - Google Patents

Info

Publication number
JPH0353597B2
JPH0353597B2 JP16959882A JP16959882A JPH0353597B2 JP H0353597 B2 JPH0353597 B2 JP H0353597B2 JP 16959882 A JP16959882 A JP 16959882A JP 16959882 A JP16959882 A JP 16959882A JP H0353597 B2 JPH0353597 B2 JP H0353597B2
Authority
JP
Japan
Prior art keywords
waste liquid
transfer
tank
cladding
selection circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16959882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5960298A (ja
Inventor
Katsuo Niizawa
Yoji Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Engineering Corp
Toshiba Corp
Original Assignee
Toshiba Engineering Corp
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Engineering Corp, Toshiba Corp filed Critical Toshiba Engineering Corp
Priority to JP16959882A priority Critical patent/JPS5960298A/ja
Publication of JPS5960298A publication Critical patent/JPS5960298A/ja
Publication of JPH0353597B2 publication Critical patent/JPH0353597B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Suspended Particles By Flocculating Agents (AREA)
JP16959882A 1982-09-30 1982-09-30 廃棄物処理設備における廃液移送処理装置 Granted JPS5960298A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16959882A JPS5960298A (ja) 1982-09-30 1982-09-30 廃棄物処理設備における廃液移送処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16959882A JPS5960298A (ja) 1982-09-30 1982-09-30 廃棄物処理設備における廃液移送処理装置

Publications (2)

Publication Number Publication Date
JPS5960298A JPS5960298A (ja) 1984-04-06
JPH0353597B2 true JPH0353597B2 (esLanguage) 1991-08-15

Family

ID=15889454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16959882A Granted JPS5960298A (ja) 1982-09-30 1982-09-30 廃棄物処理設備における廃液移送処理装置

Country Status (1)

Country Link
JP (1) JPS5960298A (esLanguage)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2930307B2 (ja) * 1988-09-20 1999-08-03 東京エレクトロン株式会社 基板処理装置における液排出機構

Also Published As

Publication number Publication date
JPS5960298A (ja) 1984-04-06

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