JPH0353566U - - Google Patents
Info
- Publication number
- JPH0353566U JPH0353566U JP1989111657U JP11165789U JPH0353566U JP H0353566 U JPH0353566 U JP H0353566U JP 1989111657 U JP1989111657 U JP 1989111657U JP 11165789 U JP11165789 U JP 11165789U JP H0353566 U JPH0353566 U JP H0353566U
- Authority
- JP
- Japan
- Prior art keywords
- load lock
- lock chamber
- inlet
- molecular beam
- moved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989111657U JPH0353566U (enExample) | 1989-09-26 | 1989-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989111657U JPH0353566U (enExample) | 1989-09-26 | 1989-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353566U true JPH0353566U (enExample) | 1991-05-23 |
Family
ID=31660129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989111657U Pending JPH0353566U (enExample) | 1989-09-26 | 1989-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353566U (enExample) |
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1989
- 1989-09-26 JP JP1989111657U patent/JPH0353566U/ja active Pending