JPH0353557U - - Google Patents
Info
- Publication number
- JPH0353557U JPH0353557U JP11451489U JP11451489U JPH0353557U JP H0353557 U JPH0353557 U JP H0353557U JP 11451489 U JP11451489 U JP 11451489U JP 11451489 U JP11451489 U JP 11451489U JP H0353557 U JPH0353557 U JP H0353557U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- vapor phase
- phase growth
- core tube
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11451489U JPH0353557U (sv) | 1989-09-29 | 1989-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11451489U JPH0353557U (sv) | 1989-09-29 | 1989-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0353557U true JPH0353557U (sv) | 1991-05-23 |
Family
ID=31662878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11451489U Pending JPH0353557U (sv) | 1989-09-29 | 1989-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353557U (sv) |
-
1989
- 1989-09-29 JP JP11451489U patent/JPH0353557U/ja active Pending
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