JPH0353554U - - Google Patents
Info
- Publication number
- JPH0353554U JPH0353554U JP11385689U JP11385689U JPH0353554U JP H0353554 U JPH0353554 U JP H0353554U JP 11385689 U JP11385689 U JP 11385689U JP 11385689 U JP11385689 U JP 11385689U JP H0353554 U JPH0353554 U JP H0353554U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film forming
- receptacle
- annular
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 5
- 230000003028 elevating effect Effects 0.000 claims description 2
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 210000000078 claw Anatomy 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989113856U JPH0730683Y2 (ja) | 1989-09-28 | 1989-09-28 | 成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989113856U JPH0730683Y2 (ja) | 1989-09-28 | 1989-09-28 | 成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0353554U true JPH0353554U (tr) | 1991-05-23 |
| JPH0730683Y2 JPH0730683Y2 (ja) | 1995-07-12 |
Family
ID=31662254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989113856U Expired - Lifetime JPH0730683Y2 (ja) | 1989-09-28 | 1989-09-28 | 成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0730683Y2 (tr) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741369A (en) * | 1980-08-27 | 1982-03-08 | Hitachi Ltd | Continuous vacuum treatment device |
| JPS63125678A (ja) * | 1986-05-19 | 1988-05-28 | Matsushita Electric Ind Co Ltd | 連続成膜装置 |
-
1989
- 1989-09-28 JP JP1989113856U patent/JPH0730683Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741369A (en) * | 1980-08-27 | 1982-03-08 | Hitachi Ltd | Continuous vacuum treatment device |
| JPS63125678A (ja) * | 1986-05-19 | 1988-05-28 | Matsushita Electric Ind Co Ltd | 連続成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0730683Y2 (ja) | 1995-07-12 |