JPH0352815U - - Google Patents
Info
- Publication number
- JPH0352815U JPH0352815U JP11217189U JP11217189U JPH0352815U JP H0352815 U JPH0352815 U JP H0352815U JP 11217189 U JP11217189 U JP 11217189U JP 11217189 U JP11217189 U JP 11217189U JP H0352815 U JPH0352815 U JP H0352815U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- disk
- holding part
- groove
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989112171U JP2510127Y2 (ja) | 1989-09-26 | 1989-09-26 | 磁気ディスクの成膜用保持具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989112171U JP2510127Y2 (ja) | 1989-09-26 | 1989-09-26 | 磁気ディスクの成膜用保持具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0352815U true JPH0352815U (th) | 1991-05-22 |
JP2510127Y2 JP2510127Y2 (ja) | 1996-09-11 |
Family
ID=31660621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989112171U Expired - Lifetime JP2510127Y2 (ja) | 1989-09-26 | 1989-09-26 | 磁気ディスクの成膜用保持具 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2510127Y2 (th) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007213730A (ja) * | 2006-02-10 | 2007-08-23 | Tdk Corp | 基板保持装置及び磁気記録媒体の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63259838A (ja) * | 1987-04-17 | 1988-10-26 | Showa Denko Kk | 磁性薄膜記録媒体の製造方法および製造装置 |
JPH0198165U (th) * | 1987-12-18 | 1989-06-30 |
-
1989
- 1989-09-26 JP JP1989112171U patent/JP2510127Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63259838A (ja) * | 1987-04-17 | 1988-10-26 | Showa Denko Kk | 磁性薄膜記録媒体の製造方法および製造装置 |
JPH0198165U (th) * | 1987-12-18 | 1989-06-30 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007213730A (ja) * | 2006-02-10 | 2007-08-23 | Tdk Corp | 基板保持装置及び磁気記録媒体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2510127Y2 (ja) | 1996-09-11 |