JPH0352801B2 - - Google Patents

Info

Publication number
JPH0352801B2
JPH0352801B2 JP3618484A JP3618484A JPH0352801B2 JP H0352801 B2 JPH0352801 B2 JP H0352801B2 JP 3618484 A JP3618484 A JP 3618484A JP 3618484 A JP3618484 A JP 3618484A JP H0352801 B2 JPH0352801 B2 JP H0352801B2
Authority
JP
Japan
Prior art keywords
magnet
measured
displacement
present
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3618484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60181603A (ja
Inventor
Masanori Kunieda
Takeo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP3618484A priority Critical patent/JPS60181603A/ja
Publication of JPS60181603A publication Critical patent/JPS60181603A/ja
Publication of JPH0352801B2 publication Critical patent/JPH0352801B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP3618484A 1984-02-29 1984-02-29 磁力式形状測定方法 Granted JPS60181603A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3618484A JPS60181603A (ja) 1984-02-29 1984-02-29 磁力式形状測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3618484A JPS60181603A (ja) 1984-02-29 1984-02-29 磁力式形状測定方法

Publications (2)

Publication Number Publication Date
JPS60181603A JPS60181603A (ja) 1985-09-17
JPH0352801B2 true JPH0352801B2 (enrdf_load_stackoverflow) 1991-08-13

Family

ID=12462640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3618484A Granted JPS60181603A (ja) 1984-02-29 1984-02-29 磁力式形状測定方法

Country Status (1)

Country Link
JP (1) JPS60181603A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006509193A (ja) * 2002-12-05 2006-03-16 レニショウ　パブリック　リミテッド　カンパニー 高速走査用プローブ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102247337B1 (ko) * 2014-11-24 2021-05-06 재단법인 포항산업과학연구원 자기력을 이용한 무접촉 압전형 변위 센서 및 이를 이용한 회전체의 변위 측정 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006509193A (ja) * 2002-12-05 2006-03-16 レニショウ　パブリック　リミテッド　カンパニー 高速走査用プローブ

Also Published As

Publication number Publication date
JPS60181603A (ja) 1985-09-17

Similar Documents

Publication Publication Date Title
JP2988588B2 (ja) 位置測定装置
CN101282823B (zh) 确定虚拟工具中心点的方法及用于该方法的装置
JP2873404B2 (ja) ワークピースの表面をスキャンする方法とその装置
US5396712A (en) Coordinate measuring device
US5832416A (en) Calibration system for coordinate measuring machine
JP3075981B2 (ja) 形状測定装置
EP1875158B1 (en) Surface sensing device with optical sensor
GB1597842A (en) Indexing mechanism
US4942671A (en) Probe head mount for a deflectable probe or the like
JP2001330428A (ja) ３次元測定機の測定誤差評価方法及び３次元測定機用ゲージ
JPH08327344A (ja) 多座標走査ヘッド
JP2001091203A (ja) 工作機械精度計測装置
JP4890188B2 (ja) 運動誤差測定基準体及び運動誤差測定装置
US5109610A (en) True position probe
JPH0352801B2 (enrdf_load_stackoverflow)
JP2504561B2 (ja) 形状測定装置
JP3189557B2 (ja) 三次元形状計測方法および装置
CN110524577A (zh) 一种用于机器人关节力矩刚性的测量方法和装置
JPH10213403A (ja) 三次元座標測定装置
JP2005181023A (ja) 平面間の高低差と傾斜角度の測定装置及び方法
Chu et al. Development of a surface scanning touch probe for micro-CMM
JPH07218207A (ja) 表面形状測定装置
JPH0413609Y2 (enrdf_load_stackoverflow)
JPS62228101A (ja) 測定機用検出器
JPH01308902A (ja) 接触センサー

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees