JPH0352147Y2 - - Google Patents

Info

Publication number
JPH0352147Y2
JPH0352147Y2 JP4255786U JP4255786U JPH0352147Y2 JP H0352147 Y2 JPH0352147 Y2 JP H0352147Y2 JP 4255786 U JP4255786 U JP 4255786U JP 4255786 U JP4255786 U JP 4255786U JP H0352147 Y2 JPH0352147 Y2 JP H0352147Y2
Authority
JP
Japan
Prior art keywords
cleaning
liquid
area
steam
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4255786U
Other languages
Japanese (ja)
Other versions
JPS62156389U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4255786U priority Critical patent/JPH0352147Y2/ja
Publication of JPS62156389U publication Critical patent/JPS62156389U/ja
Application granted granted Critical
Publication of JPH0352147Y2 publication Critical patent/JPH0352147Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Description

【考案の詳細な説明】 産業上の利用分野 本考案は、ネジの如き小型物品の製造装置に付
設されるところの製造された小型物品の振動洗浄
装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a vibration cleaning device for small manufactured articles, such as a screw, which is attached to a manufacturing apparatus for small articles such as screws.

従来の技術 小型物品の振動洗浄装置としては、既に、特開
昭48−27578号公報に示されるように、洗浄槽内
に配置した螺旋状移送路の下部を洗浄液内に浸漬
しておき、被洗浄物が螺旋状移送路に沿つて洗浄
液内からその上方へ移行する間に洗浄を行なわせ
る装置が知られている。
BACKGROUND TECHNOLOGY As shown in Japanese Patent Laid-Open No. 48-27578, a vibration cleaning device for small articles has already been used, in which the lower part of a spiral transfer path arranged in a cleaning tank is immersed in a cleaning liquid. 2. Description of the Related Art Apparatuses are known in which cleaning is performed while an object to be washed moves from within a cleaning liquid to above it along a helical transfer path.

考案が解決しようとする問題点 上述の既知の装置では、被洗浄物を洗浄液に浸
して洗浄したのち、直ちに螺旋状移送路に沿わせ
て上昇させる間に乾燥させる作用のものであるた
め、洗浄液に、被洗浄物に付着していた油脂等が
含有されている状態で洗浄が行なわれ、従つて油
脂分を含有する洗浄液が被洗浄物の表面に付着し
ている状態で乾燥が行なわれることとなり、完全
な油脂分除去等の洗浄を行ない難い欠点があつ
た。
Problems to be Solved by the Invention In the above-mentioned known device, the object to be cleaned is immersed in the cleaning liquid and then immediately raised along the spiral conveyance path to dry it. In addition, cleaning is performed while the object to be cleaned contains oils and fats, etc., and therefore drying is performed while the cleaning liquid containing oil and fats is still attached to the surface of the object to be cleaned. Therefore, there was a drawback that cleaning such as complete removal of oil and fat was difficult.

このため、本考案では、洗浄液で洗浄された被
洗浄物を更に洗浄液の蒸気中に導き、被洗浄物表
面における該蒸気の凝縮液化、凝縮液の滴下を利
用することにより、被洗浄物の油脂分等を完全に
除去しうる振動洗浄装置を提供することを目的と
している。
Therefore, in the present invention, the object to be cleaned that has been cleaned with the cleaning liquid is further introduced into the vapor of the cleaning liquid, and by utilizing the condensation and liquefaction of the vapor on the surface of the object to be cleaned and the dripping of the condensed liquid, the oil and fat of the object to be cleaned is removed. It is an object of the present invention to provide a vibration cleaning device that can completely remove particles.

問題点を解決するための手段 本考案では、上記目的を達成するため、下底部
から上端開口部に向つて螺旋状移送路が形成され
ている振動パーツフイーダのボールの下底部に、
前記螺旋状移送路の所定高さ部分を浸漬させうる
洗浄液貯溜部たる液洗浄域が設けられ、該ボール
の上端開口部には、前記洗浄液の蒸気の送込管が
開口されており、前記液洗浄域の上方の螺旋状移
送路の所定高さ部分の存するボール内が前記蒸気
の凝縮域たる蒸気洗浄域とされ、更にその上方の
ボールの開口部に至る螺旋状移送路部分の存する
ボール内が前記洗浄液の乾燥域とされていると云
う構成を採用している。
Means for Solving the Problems In the present invention, in order to achieve the above object, at the bottom of the ball of the vibrating parts feeder, in which a spiral transfer path is formed from the bottom to the top opening.
A liquid cleaning area is provided as a cleaning liquid reservoir in which a predetermined height portion of the spiral transfer path can be immersed, and a feeding pipe for the vapor of the cleaning liquid is opened at the upper end opening of the ball. The inside of the bowl where a predetermined height portion of the spiral transfer path above the cleaning area exists is the steam cleaning area, which is the condensation area of the steam, and the inside of the ball where the spiral transfer path portion extending to the opening of the ball above the cleaning area exists. is used as a drying area for the cleaning liquid.

作 用 本考案は、上述の構成であるから、被洗浄物は
初めに液洗浄域で油脂分等の液洗浄を受け次いで
蒸気洗浄域に移行されて洗浄液の蒸気と接触し、
被洗浄物表面における蒸気の凝縮によつて生じた
油脂分を全く含有しない液による洗浄、該液の滴
下による残存油脂分の除去を受け、更に乾燥域に
おいて乾燥を受け、振動洗浄装置外へ送り出され
る。
Function Since the present invention has the above-mentioned configuration, the object to be cleaned first undergoes liquid cleaning of oil and fat in the liquid cleaning area, and then is transferred to the steam cleaning area where it comes into contact with the vapor of the cleaning liquid.
The object to be cleaned is cleaned with a liquid that does not contain any oil or fat produced by the condensation of steam on the surface of the object to be cleaned, the remaining oil or fat is removed by dripping the liquid, and then dried in a drying area before being sent out of the vibration cleaning equipment. It can be done.

この結果、被洗浄物は、1工程で油脂分等の完
全な除去が行なわれる。
As a result, oil and fats, etc., are completely removed from the object to be cleaned in one step.

実施例 第1図は第1の実施例の縦断面図であつて、ネ
ジ等の小型物品たる被洗浄物の振動パーツフイー
ダ1は、振動部2と、該振動部2によつて微振動
を与えられる倒截頭円錐筒形状のボール3とで構
成されており、ボール3の内周壁には、下底部4
から上端開口部5に向つて螺旋状移送路6が形成
されている。
Embodiment FIG. 1 is a longitudinal cross-sectional view of a first embodiment, in which a vibrating parts feeder 1 for small articles such as screws to be cleaned has a vibrating part 2 and a micro-vibration applied by the vibrating part 2. The inner peripheral wall of the ball 3 has a lower bottom portion 4.
A spiral transfer path 6 is formed from the top toward the upper end opening 5.

ボール3の内腔部の螺旋状移送路6で囲まれた
部分には、倒截頭円錐筒状のホツパー7が配置さ
れ、該ホツパー7の周壁には、冷却槽8が一体に
形成されている。またホツパー7は出口間隔調整
ノブ9に固着されており、該ノブ9の適宜手段に
よる双矢印A方向への昇降と、その位置の固定と
により、出口10とボール3の下底部4との間隔
を、被洗浄物の大きさに適合した高さに、高低に
調整できる。
An inverted truncated conical cylindrical hopper 7 is disposed in a portion of the inner cavity of the ball 3 surrounded by the spiral transfer path 6, and a cooling tank 8 is integrally formed on the peripheral wall of the hopper 7. There is. The hopper 7 is fixed to an outlet interval adjustment knob 9, and by raising and lowering the knob 9 in the direction of the double arrow A and fixing its position, the interval between the outlet 10 and the lower bottom 4 of the ball 3 is adjusted. The height can be adjusted to suit the size of the object to be cleaned.

ボール3の下底部4から所定高さHだけ上方に
は、洗浄液排出口11が開口されており、該排出
口11の下縁と下底部4との間が洗浄液の貯溜部
とされ、螺旋状移送路6の所定高さ、即ち前記高
さHに相当する部分が、貯溜されている洗浄液中
に浸漬され、この部分が被洗浄物の液洗浄域12
とされている。この液洗浄域12の高さたる前記
高さHは、被洗浄物の大きさ、液洗浄域12中に
存在させられる数量、時間等に応じ最適のものが
選定されるが、洗浄液排出口11の位置を上下に
調節できるようにしておいてもよい。
A cleaning liquid discharge port 11 is opened at a predetermined height H above the lower bottom portion 4 of the ball 3, and a portion between the lower edge of the discharge port 11 and the lower bottom portion 4 is used as a storage portion for the cleaning liquid. A predetermined height of the transfer path 6, that is, a portion corresponding to the height H is immersed in the stored cleaning liquid, and this portion is used as the liquid cleaning area 12 of the object to be cleaned.
It is said that The height H, which is the height of the liquid cleaning area 12, is optimally selected depending on the size of the object to be cleaned, the amount of liquid to be present in the liquid cleaning area 12, the time, etc. The position may be adjusted up and down.

上述の洗浄液としては、金属製品に付着する油
脂類の洗浄のためには1,1,1−トリクロール
エタンが使用されるが低沸点のものであれば、他
の洗浄液でよいことは勿論である。
As the above-mentioned cleaning liquid, 1,1,1-trichloroethane is used to clean oils and fats adhering to metal products, but it goes without saying that other cleaning liquids may be used as long as they have a low boiling point. be.

上述のボール3の上端開口部5には、螺旋状移
送路6に臨んで、前記洗浄液の蒸気をボール3内
へ噴出する蒸気送管39が配設されている。蒸気
送管12からボール3内へ噴出された洗浄液の蒸
気は、矢印B,Cで示すように、ホツパー7の冷
却槽8の外周面と螺旋状移送路6との間〓を下方
に通り、液洗浄液域12に在る螺旋状移送路6の
高さHに相当する部分の上方たる所定高さ部分L
の存するボール3内に滞溜し、徐徐に凝縮し、ボ
ール3の下底部4方向へ滴下する。
A steam pipe 39 is disposed at the upper end opening 5 of the ball 3, facing the spiral transfer path 6, and for spouting the steam of the cleaning liquid into the ball 3. The steam of the cleaning liquid ejected from the steam pipe 12 into the ball 3 passes downward between the outer peripheral surface of the cooling tank 8 of the hopper 7 and the spiral transfer path 6, as shown by arrows B and C. A predetermined height portion L above a portion corresponding to the height H of the spiral transfer path 6 in the cleaning liquid area 12
It accumulates in the ball 3 where it exists, gradually condenses, and drips toward the bottom 4 of the ball 3.

既述のように、ホツパー7には冷却槽8が付設
されているので、上述の蒸気の凝縮が助長される
と共に、後述するように、螺旋状移送路6に沿つ
て液洗浄域12から上昇して来る被洗浄物の表面
との接触によつて蒸気の大部分は凝縮されるもの
であり、この被洗浄物の表面において凝縮し再び
洗浄液と化した蒸気は、油脂分等を全く含有しな
い純な洗浄液であるから、その滴下時に、被洗浄
物の表面の油脂等は完全に洗浄,除去されること
となる。
As mentioned above, since the cooling tank 8 is attached to the hopper 7, the above-mentioned condensation of the vapor is facilitated, and as will be explained later, the vapor rises from the liquid cleaning area 12 along the spiral transfer path 6. Most of the steam is condensed when it comes into contact with the surface of the object to be cleaned, and the steam that condenses on the surface of the object and becomes the cleaning liquid again does not contain any oil or fat. Since it is a pure cleaning liquid, when it is dripped, oils and fats on the surface of the object to be cleaned are completely cleaned and removed.

上述のボール3内における所定高さ部分Lは、
前記の蒸気の凝縮とそれに伴なう洗浄作用とによ
り、蒸気洗浄域13を形成している。
The predetermined height portion L in the ball 3 described above is
A steam cleaning area 13 is formed by the condensation of the steam and the accompanying cleaning action.

上述蒸気洗浄域13からボール3の上端開口部
5に至る螺旋状移送路6の存するボール3内は、
被洗浄物の表面に付着している洗浄液が気化する
乾燥域14とされている。洗浄液が既述の1,
1,1−トリクロールエタンの如く約74℃と云う
ように低沸点の液体であれば、乾燥域14内の螺
旋状移送路6の長さを選定することにより、ボー
ル3の上端開口部5より出る被洗浄物は完全に乾
燥した状態とされる。
Inside the bowl 3, where the spiral transfer path 6 from the steam cleaning area 13 to the upper end opening 5 of the bowl 3 exists,
This is a drying area 14 where the cleaning liquid adhering to the surface of the object to be cleaned is vaporized. The cleaning solution is the one mentioned above.
If the liquid has a low boiling point of about 74°C, such as 1,1-trichloroethane, the upper end opening 5 of the ball 3 can be adjusted by selecting the length of the spiral transfer path 6 in the drying area 14. The items to be cleaned that come out are completely dry.

第1図中符号15は冷却水入口、符号16は冷
却水出口である。
In FIG. 1, reference numeral 15 is a cooling water inlet, and reference numeral 16 is a cooling water outlet.

第1図に示される実施例では、被洗浄物たるネ
ジ等の小型物品は、該物品の製造機から矢印D,
E,Fの如くホツパー7内へ供給され、液洗浄域
12内へ入る。
In the embodiment shown in FIG.
The liquid is supplied into the hopper 7 as shown in E and F, and enters the liquid cleaning area 12.

第2図は第2の実施例を示しており、ボール1
7が直筒状とされ、その内部に直筒状の冷却筒1
8が配置され、該冷却筒の外周面に螺旋状移送路
19が配設されており、ボール17の内周面と螺
旋状移送路19との間が被洗浄物の供給路20と
され、この供給路20の形成されるボール17の
上端開口部21に洗浄液の蒸気の蒸気送管22が
配置されており、また第1の実施例におけるホツ
パー7の出口間隔調整ノブ9が設けられていない
点で、前記第1の実施例と構成が異なるが、ボー
ル17内に液洗浄域23、蒸気洗浄域24、乾燥
域25が形成されている点と作用とは、第1図に
示す第1の実施例と全く同一である。
FIG. 2 shows a second embodiment, in which the ball 1
7 has a straight cylindrical shape, and a straight cylindrical cooling cylinder 1 is installed inside it.
8 is arranged, a spiral transfer path 19 is arranged on the outer peripheral surface of the cooling cylinder, and a space between the inner peripheral surface of the ball 17 and the spiral transfer path 19 is a supply path 20 for the object to be cleaned, A steam pipe 22 for the cleaning liquid vapor is arranged in the upper end opening 21 of the ball 17 where the supply path 20 is formed, and the outlet interval adjustment knob 9 of the hopper 7 in the first embodiment is not provided. Although the structure is different from the first embodiment in this point, the liquid cleaning area 23, the steam cleaning area 24, and the drying area 25 are formed in the ball 17, and the function is the same as that of the first embodiment shown in FIG. This is exactly the same as the embodiment.

第3図は、本考案に係る振動洗浄装置を適用し
たネジ製造ラインのレイアウトであつて、転造機
26で製造されたネジは、該転造機26から排出
される毎に、コンベア27で、本考案に係る振動
洗浄装置28に連続供給され、コンベア29で連
続的に搬出される。
FIG. 3 shows the layout of a screw manufacturing line to which the vibration cleaning device according to the present invention is applied, and each time the screws manufactured by the rolling machine 26 are discharged from the rolling machine 26, they are transferred to the main body by a conveyor 27. It is continuously supplied to the vibration cleaning device 28 according to the invention, and is continuously carried out by a conveyor 29.

上述の振動洗浄装置28には、洗浄液の蒸気発
生槽30で発生させられた蒸気が蒸気送管31で
供給される。この蒸気送管31は、第4図に示さ
れるように、断熱筒32で囲まれた内腔に蒸気給
送パイプ33と保温パイプ34とが併列配置され
た構造とされている。
The above-mentioned vibration cleaning device 28 is supplied with steam generated in a cleaning liquid steam generation tank 30 through a steam pipe 31 . As shown in FIG. 4, this steam feed pipe 31 has a structure in which a steam feed pipe 33 and a heat insulation pipe 34 are arranged in parallel in an inner cavity surrounded by a heat insulating cylinder 32.

なお、蒸気発生槽30には、振動洗浄装置28
の液洗浄域からオーバーフローした洗浄液がパイ
プ35で復帰され、油脂等で汚れた洗浄液はパイ
プ36で再生槽37へ送られ、調整槽38で基準
成分とされたうえで蒸気発生槽30へ供給され
る。
Note that the steam generation tank 30 is equipped with a vibration cleaning device 28.
The cleaning liquid that overflows from the liquid cleaning area is returned through the pipe 35, and the cleaning liquid contaminated with oil and fat is sent to the regeneration tank 37 through the pipe 36, and after being made into a reference component in the adjustment tank 38, it is supplied to the steam generation tank 30. Ru.

第5図は、第3図に示される1台の蒸気発生槽
30と複数の振動洗浄装置28A,28B,28
Cとの組み合わせ状態を平面図として示したレイ
アウト図であつて、図中符号26A,26B,2
6Cはそれぞれネジの転造機を示している。
FIG. 5 shows one steam generation tank 30 and a plurality of vibration cleaning devices 28A, 28B, 28 shown in FIG.
It is a layout diagram showing a state of combination with C as a plan view, and the reference numerals 26A, 26B, 2 in the figure are
6C indicates a thread rolling machine.

本考案に係る振動洗浄装置は、上述の構成であ
るから、振動パーツフイーダのボールの下底部を
含む液洗浄域で、被洗浄物は液中において洗浄を
受け、その上部の螺旋状移送路の蒸気洗浄域に移
行した際には、該洗浄液の蒸気に触れ、被洗浄物
の表面で凝縮し、液化した清浄な凝縮液で再洗浄
されることとなり、所謂蒸気洗浄を受け、液洗浄
域を経て蒸気洗浄域へ移行した被洗浄物の表面に
付着しているところの若干の油脂等を含む洗浄液
膜の洗浄、除去を受ける。
Since the vibration cleaning apparatus according to the present invention has the above-mentioned configuration, the object to be cleaned is washed in the liquid in the liquid cleaning area including the bottom of the ball of the vibrating parts feeder, and the object to be cleaned is washed by the steam in the spiral transfer path above the liquid cleaning area. When the object moves to the cleaning area, it comes into contact with the vapor of the cleaning liquid, condenses on the surface of the object, and is re-cleaned with the liquefied clean condensate, undergoing so-called steam cleaning, and then passing through the liquid cleaning area. The cleaning liquid film containing some oil and fat adhering to the surface of the object transferred to the steam cleaning area is cleaned and removed.

そして、蒸気洗浄域の上方の螺旋状移送路の存
する乾燥域で乾燥される。
The material is then dried in a drying area with a spiral transfer path above the steam cleaning area.

従つて、本考案に係る振動洗浄装置をネジ等の
小型物品の製造装置に隣接配置すれば、該小型物
品は製造工程に連続する洗浄工程に移行されるこ
ととなり、設備面積の縮少、生産効率の向上を図
りうるものである。
Therefore, if the vibration cleaning device according to the present invention is placed adjacent to the manufacturing equipment for small items such as screws, the small items will be transferred to the cleaning process that is continuous with the manufacturing process, reducing the equipment area and reducing production. This can improve efficiency.

効 果 本考案は、以上説明した構成、作用のものであ
つて、、被洗浄物は、振動パーツフイーダのボー
ル内の下部に設けられている液洗浄域において、
洗浄に浸漬されて液洗浄を受け、ついで螺旋移送
路に沿つて上方の蒸気洗浄域に送られ、該洗浄域
で清浄な洗浄液蒸気に触れ、被洗浄物表面におけ
る蒸気の凝縮、液化により、清浄な凝縮液で洗浄
されることとなり、該凝縮液の滴下によつて、液
洗浄域から蒸気洗浄域へ移行するとき、表面に付
着していた洗浄液膜を洗浄、除去され、清浄な状
態で乾燥域へ移行されることとなり、被洗浄物表
面の油脂分等の完全な除去を行ないうる効果があ
る。
Effects The present invention has the configuration and operation described above, and the object to be cleaned is cleaned in the liquid cleaning area provided at the lower part of the ball of the vibrating parts feeder.
The object is immersed in the cleaning liquid to undergo liquid cleaning, and is then sent along a spiral transfer path to an upper steam cleaning area, where it comes into contact with clean cleaning liquid vapor, and the surface of the object to be cleaned is condensed and liquefied, resulting in cleaning. By dropping the condensate, the cleaning liquid film adhering to the surface is cleaned and removed when moving from the liquid cleaning area to the steam cleaning area, and the surface is dried in a clean state. This has the effect of completely removing oil and fat from the surface of the object to be cleaned.

また設備を比較的簡単な構造としうるので小型
物品の製造装置に直結するよう配置でき設備設置
面積を比較的小としうると共に、小型物品の製造
と洗浄との間のストツク場所、ストツク時間等を
省略することも可能となり、生産性を向上させる
効果も有している。
Furthermore, since the equipment can be of relatively simple structure, it can be placed so as to be directly connected to the manufacturing equipment for small items, and the installation area of the equipment can be relatively small. It can also be omitted, which has the effect of improving productivity.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は第1の実施例の略示縦断面図、第2図は
第2の実施例の略示縦断面図、第3図は本考案に
係る振動洗浄装置を適用したネジ製造ラインのレ
イアウト図、第4図は第3図中−線断面拡大
図、第5図は複数のネジ製造装置に本考案の振動
洗浄装置を適用した別の例のレイアウトを示す平
面図である。 1:振動パーツフイーダ、3:ボール、4:下
底部、5:上端開口部、6:螺旋状移送路、7:
ホツパー、12:液洗浄域、13:蒸気洗浄域、
14:乾燥域、39:蒸気送管。
FIG. 1 is a schematic vertical cross-sectional view of the first embodiment, FIG. 2 is a schematic vertical cross-sectional view of the second embodiment, and FIG. 3 is a screw manufacturing line to which the vibration cleaning device according to the present invention is applied. 4 is an enlarged cross-sectional view taken along the line 3 in FIG. 3, and FIG. 5 is a plan view showing the layout of another example in which the vibration cleaning device of the present invention is applied to a plurality of screw manufacturing devices. 1: Vibrating parts feeder, 3: Ball, 4: Lower bottom, 5: Upper end opening, 6: Spiral transfer path, 7:
Hopper, 12: liquid cleaning area, 13: steam cleaning area,
14: Dry area, 39: Steam pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 下底部4から上端開口部5,21に向つて螺旋
状移送路6,19が形成されている振動パーツフ
イーダ1のボール3,17の下底部4に、前記螺
旋状移送路6,21の所定高さ部分を浸漬させう
る洗浄液貯留部たる液洗浄域12,23が設けら
れ、該ボールの上端開口部5,21には、前記洗
浄液の蒸気の送管39,22が開口されており、
前記液洗浄域12,23の上方の螺旋状移送路
6,19の所定高さ部分の存するボール内が前記
蒸気の凝縮域たる蒸気洗浄域13,24とされ、
更にその上方のボールの開口部5,21に至る螺
旋状移送路部分の存するボール内が前記洗浄液の
乾燥域14,25とされている小型物品の振動洗
浄装置。
A predetermined height of the helical transfer paths 6, 21 is provided at the lower bottom portion 4 of the balls 3, 17 of the vibrating parts feeder 1, in which the helical transfer paths 6, 19 are formed from the lower bottom portion 4 toward the upper end openings 5, 21. Liquid cleaning areas 12 and 23 are provided as cleaning liquid reservoirs in which the parts of the bowl can be immersed, and pipes 39 and 22 for the vapor of the cleaning liquid are opened in the upper end openings 5 and 21 of the bowl,
The inside of the ball where the predetermined height portion of the spiral transfer path 6, 19 above the liquid cleaning area 12, 23 exists is the steam cleaning area 13, 24, which is the condensation area of the steam,
Furthermore, the vibration cleaning apparatus for small articles has a drying area 14, 25 for the cleaning liquid inside the bowl where a spiral transfer path portion extending to the openings 5, 21 of the bowl above the bowl exists.
JP4255786U 1986-03-24 1986-03-24 Expired JPH0352147Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4255786U JPH0352147Y2 (en) 1986-03-24 1986-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4255786U JPH0352147Y2 (en) 1986-03-24 1986-03-24

Publications (2)

Publication Number Publication Date
JPS62156389U JPS62156389U (en) 1987-10-05
JPH0352147Y2 true JPH0352147Y2 (en) 1991-11-11

Family

ID=30858581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4255786U Expired JPH0352147Y2 (en) 1986-03-24 1986-03-24

Country Status (1)

Country Link
JP (1) JPH0352147Y2 (en)

Also Published As

Publication number Publication date
JPS62156389U (en) 1987-10-05

Similar Documents

Publication Publication Date Title
US5992431A (en) Device for treating substrates in a fluid container
US3632480A (en) Vapor degreasing apparatus with falling film heat exchange surface
JPH0352147Y2 (en)
US3589023A (en) Process and apparatus for removing water from solid surfaces at low temperatures
CN102496590A (en) Isopropyl alcohol dryer with ultrasonic or megasonic vibrators
US4745690A (en) Method of replenishing and/or preparing treating liquids
KR20070033129A (en) Apparatus for washing chuck for wafer
JP3093767B2 (en) Cleaning equipment
US3208506A (en) Splash guard-mist extractor
USRE24281E (en) Degreasing apparatus
JPS6381931A (en) Drying device
KR200241308Y1 (en) Washing-Machine Applied by Liquid-Solid Fluidized Bed System
US4510053A (en) Vapor degreaser apparatus
JPH0340398Y2 (en)
JPH0429898Y2 (en)
SU1186698A1 (en) Device for desorption cleaning
JPS6337109Y2 (en)
JPS62245639A (en) Vapor drying device
JPS57170537A (en) Treating method and device for semiconductor wafer
RU2132215C1 (en) Mass-exchange column
JPS62150827A (en) Surface processing device
SU1674890A1 (en) Evaporator
JP3808956B2 (en) Cleaning device
SU995904A1 (en) Washing machine
JPH0319988Y2 (en)