JPH0351839U - - Google Patents
Info
- Publication number
- JPH0351839U JPH0351839U JP1989113121U JP11312189U JPH0351839U JP H0351839 U JPH0351839 U JP H0351839U JP 1989113121 U JP1989113121 U JP 1989113121U JP 11312189 U JP11312189 U JP 11312189U JP H0351839 U JPH0351839 U JP H0351839U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- flow rate
- detection sensor
- mounter
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10W72/0711—
-
- H10W72/07341—
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989113121U JPH0351839U (enExample) | 1989-09-26 | 1989-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989113121U JPH0351839U (enExample) | 1989-09-26 | 1989-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0351839U true JPH0351839U (enExample) | 1991-05-20 |
Family
ID=31661546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989113121U Pending JPH0351839U (enExample) | 1989-09-26 | 1989-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0351839U (enExample) |
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1989
- 1989-09-26 JP JP1989113121U patent/JPH0351839U/ja active Pending