JPH0351726Y2 - - Google Patents
Info
- Publication number
- JPH0351726Y2 JPH0351726Y2 JP765983U JP765983U JPH0351726Y2 JP H0351726 Y2 JPH0351726 Y2 JP H0351726Y2 JP 765983 U JP765983 U JP 765983U JP 765983 U JP765983 U JP 765983U JP H0351726 Y2 JPH0351726 Y2 JP H0351726Y2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- casing
- support base
- pressure
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000002775 capsule Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP765983U JPS59113733U (ja) | 1983-01-22 | 1983-01-22 | 半導体圧力変換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP765983U JPS59113733U (ja) | 1983-01-22 | 1983-01-22 | 半導体圧力変換器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59113733U JPS59113733U (ja) | 1984-08-01 |
| JPH0351726Y2 true JPH0351726Y2 (de) | 1991-11-07 |
Family
ID=30139185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP765983U Granted JPS59113733U (ja) | 1983-01-22 | 1983-01-22 | 半導体圧力変換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59113733U (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2832894B2 (ja) * | 1988-07-26 | 1998-12-09 | 日立建機株式会社 | 圧力センサ及びその製造方法、並びに圧力センサを備える油圧機器 |
| JP2625225B2 (ja) * | 1989-12-22 | 1997-07-02 | 株式会社日立製作所 | 半導体圧力センサ |
-
1983
- 1983-01-22 JP JP765983U patent/JPS59113733U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59113733U (ja) | 1984-08-01 |
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