JPH0350987B2 - - Google Patents
Info
- Publication number
- JPH0350987B2 JPH0350987B2 JP59027042A JP2704284A JPH0350987B2 JP H0350987 B2 JPH0350987 B2 JP H0350987B2 JP 59027042 A JP59027042 A JP 59027042A JP 2704284 A JP2704284 A JP 2704284A JP H0350987 B2 JPH0350987 B2 JP H0350987B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- sample
- scanning
- thin film
- piezoelectric thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 11
- 238000002604 ultrasonography Methods 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 7
- 239000011295 pitch Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 20
- 238000005259 measurement Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59027042A JPS60171455A (ja) | 1984-02-17 | 1984-02-17 | 超音波顕微鏡による撮像方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59027042A JPS60171455A (ja) | 1984-02-17 | 1984-02-17 | 超音波顕微鏡による撮像方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60171455A JPS60171455A (ja) | 1985-09-04 |
| JPH0350987B2 true JPH0350987B2 (cs) | 1991-08-05 |
Family
ID=12210007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59027042A Granted JPS60171455A (ja) | 1984-02-17 | 1984-02-17 | 超音波顕微鏡による撮像方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60171455A (cs) |
-
1984
- 1984-02-17 JP JP59027042A patent/JPS60171455A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60171455A (ja) | 1985-09-04 |
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