JPH0350049U - - Google Patents
Info
- Publication number
- JPH0350049U JPH0350049U JP11060489U JP11060489U JPH0350049U JP H0350049 U JPH0350049 U JP H0350049U JP 11060489 U JP11060489 U JP 11060489U JP 11060489 U JP11060489 U JP 11060489U JP H0350049 U JPH0350049 U JP H0350049U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- spring
- ring
- film forming
- tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11060489U JPH0350049U (de) | 1989-09-21 | 1989-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11060489U JPH0350049U (de) | 1989-09-21 | 1989-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0350049U true JPH0350049U (de) | 1991-05-15 |
Family
ID=31659129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11060489U Pending JPH0350049U (de) | 1989-09-21 | 1989-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0350049U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001218799A (ja) * | 2000-02-10 | 2001-08-14 | Azuma:Kk | 車椅子形成機能併備の介護用ベッド |
-
1989
- 1989-09-21 JP JP11060489U patent/JPH0350049U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001218799A (ja) * | 2000-02-10 | 2001-08-14 | Azuma:Kk | 車椅子形成機能併備の介護用ベッド |
| JP4521087B2 (ja) * | 2000-02-10 | 2010-08-11 | 株式会社アヅマ | 介護用ベッド |