JPH03470Y2 - - Google Patents

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Publication number
JPH03470Y2
JPH03470Y2 JP1984058901U JP5890184U JPH03470Y2 JP H03470 Y2 JPH03470 Y2 JP H03470Y2 JP 1984058901 U JP1984058901 U JP 1984058901U JP 5890184 U JP5890184 U JP 5890184U JP H03470 Y2 JPH03470 Y2 JP H03470Y2
Authority
JP
Japan
Prior art keywords
pipe
rod
propulsion
tube
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984058901U
Other languages
Japanese (ja)
Other versions
JPS60172897U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5890184U priority Critical patent/JPS60172897U/en
Publication of JPS60172897U publication Critical patent/JPS60172897U/en
Application granted granted Critical
Publication of JPH03470Y2 publication Critical patent/JPH03470Y2/ja
Granted legal-status Critical Current

Links

Description

【考案の詳細な説明】 本考案は管体推進埋設先導管、詳しくは、立坑
間に正確に推進するための方向制御棒とローリン
グ防止手段を備えた管体推進埋設先導管に関する
ものである。
[Detailed Description of the Invention] The present invention relates to a pipe-propelled buried lead pipe, and more particularly, to a pipe-propelled buried lead pipe equipped with a directional control rod and rolling prevention means for accurately propelling the pipe between shafts.

従来、下水道管等の中小口径管を地中に推進埋
設工事を行なう場合、予め所定の位置に小口径管
を埋設しておいて、該小口径管を引き抜きながら
中口径管を推進埋設する作業が行なわれている。
この小口径管のことを通常先導管と称され、この
先導管の埋設精度がそのまま中口径管の埋設精度
に波及することになる。そのため多くの場合、こ
の先導管の先端には方向制御装置が組込まれてい
るが、先導管先端部の構造が著しく複雑となり、
また故障の原因ともなるばかりでなく、操作用駆
動源等の配線のために先端管内に測量用の空間が
とれないなどの欠点がある。又、先導管が推進中
にローリングを起こして正確な埋設作業が困難と
なる場合が生じる。
Conventionally, when carrying out work to push and bury small and medium diameter pipes such as sewer pipes underground, the small diameter pipe was buried in a predetermined position in advance, and the medium diameter pipe was pushed and buried while pulling out the small diameter pipe. is being carried out.
This small diameter pipe is usually called a leading pipe, and the burying accuracy of this leading pipe directly affects the burying accuracy of the medium diameter pipe. Therefore, in many cases, a direction control device is built into the tip of the leading tube, but the structure of the leading tube tip becomes extremely complicated.
Moreover, it not only causes failure, but also has drawbacks such as the fact that there is no space for surveying within the tip tube due to the wiring of the driving source for operation and the like. Additionally, the leading pipe may roll during propulsion, making accurate burying difficult.

本考案は上記欠点を解消することを目的として
なされたものであつて、先端の構造が簡単にして
操作を立坑内で行なうことができる管体推進埋設
先導管を提供するものである。
The present invention has been made with the aim of eliminating the above-mentioned drawbacks, and provides a pipe-propelled buried lead pipe that has a simple tip structure and can be operated within a shaft.

以下本考案の実施例を示した図面にもとずいて
説明すると、第1図は埋設工事の全体の簡略断面
図を示しているもろであり、1は小口径の先導管
であつて、該先導管1は発進立坑2から到達立坑
3間に埋設され、ヒユーム等からなる中口径管4
を推進埋設するためのガイドとなるものである。
該中口径管4を埋設するには先導管1の後端に掘
削部5を接続し、該掘削部5の後方に密接嵌装し
た中口径管4の押圧装置6を発進立坑2に設置
し、該掘削部5で先導管1の外周部地盤を掘削
し、掘削土砂を中口径管内に取り込みながら押圧
装置6で押圧して前後の立坑2,3間に中口径管
6を貫通させることによつて達成される。上記埋
設作業中の中口径管4内に取り入れられた土砂
は、地上の泥水タンク7から送水管8を介して到
達立坑3内に開口した先導管1の先端部から該先
導管1内に低濃度泥水を送給し、該泥水の流動力
によつて発進立坑2側に順次排出搬送され、該立
坑2で土砂と泥水とが分離されて泥水は再び上記
泥水タンク7に返送される。
The following explanation will be given based on the drawings showing the embodiments of the present invention. Fig. 1 shows a simplified sectional view of the entire buried construction work, and 1 is a small-diameter leading pipe; The leading pipe 1 is buried between the starting shaft 2 and the reaching shaft 3, and is a medium-diameter pipe 4 made of hume, etc.
This serves as a guide for promoting burial.
To bury the medium diameter pipe 4, an excavation part 5 is connected to the rear end of the leading pipe 1, and a pressing device 6 for the medium diameter pipe 4, which is tightly fitted behind the excavation part 5, is installed in the starting shaft 2. The ground around the outer periphery of the leading pipe 1 is excavated by the excavation section 5, and the excavated soil is taken into the medium-diameter pipe while being pressed by a pressing device 6, so that the medium-diameter pipe 6 penetrates between the front and rear shafts 2 and 3. It is achieved by doing so. The earth and sand taken into the medium-diameter pipe 4 during the above-mentioned burying work flows from the tip of the leading pipe 1 that opens into the reaching shaft 3 from the muddy water tank 7 on the ground via the water pipe 8 into the leading pipe 1. Concentrated mud water is fed, and is sequentially discharged and conveyed to the starting shaft 2 side by the fluidity of the mud water, where the earth and sand are separated from the mud water, and the mud water is returned to the mud water tank 7 again.

本考案に係る小口径の先導管1は第2〜7図に
示しているように推進ヘツド9と後続管10とか
らなり、推進ヘツド9は可動部11と固定部12
とを備えている。該可動部11は円筒形状をなし
てその両端面が閉塞され、その後端閉塞部材13
の外側面は凹球面部となつている。そして該可動
部11の外周面には軸心方向に延びる少なくとも
3個のブラケツト14,14を備え、該ブラケツ
ト14,14の後方には中間ロツド15,15が
それぞれ回動自在に枢着されている。また、上記
固定部12は該可動部11と同径の円筒形状をな
し、その前端側面は上記凹球面部に嵌合する凸球
面部を備えた閉塞部材16で閉塞され、該凸球面
部、上記凹球面部とを嵌合対接させることによつ
て球座となり、可動部11が該球座を中心として
回転できるようになつている。この球座部分の外
径は可動部11および回定部12の外径よりも若
干小さく形成されて対接部の外周部には環状溝1
7が形成され、該環状溝17を肉薄の可撓性短管
18でもつて被覆し、球座面に土砂等が浸入する
のを防止している。
The small-diameter leading pipe 1 according to the present invention consists of a propulsion head 9 and a trailing pipe 10, as shown in FIGS.
It is equipped with The movable part 11 has a cylindrical shape, and both end faces thereof are closed, and a rear end closing member 13
The outer surface is a concave spherical surface. The movable portion 11 is provided with at least three brackets 14, 14 extending in the axial direction on the outer circumferential surface thereof, and intermediate rods 15, 15 are rotatably pivoted at the rear of the brackets 14, 14, respectively. There is. Further, the fixed part 12 has a cylindrical shape with the same diameter as the movable part 11, and its front end side surface is closed with a closing member 16 having a convex spherical part that fits into the concave spherical part, and the convex spherical part, By fitting and opposing the concave spherical surface portion, a spherical seat is formed, and the movable portion 11 can rotate around the spherical seat. The outer diameter of this spherical seat portion is formed to be slightly smaller than the outer diameters of the movable portion 11 and the rotating portion 12, and an annular groove 1 is formed on the outer periphery of the opposing portion.
7 is formed, and the annular groove 17 is covered with a thin flexible short pipe 18 to prevent earth and sand from entering the ball seat surface.

固定部12の後方内部には電源部19とターゲ
ツト20が配設され、ターゲツト20の後方はラ
ンプ21でもつて照明されている。また該回定部
12の外周面に前記した可動部11のブラケツト
14,14と対応する位置に鞘管22,22が軸
心方向に固定され、その内部には該鞘管22の前
後壁23,24によつて摺動可能に支持され、か
つ中間部にストツパー25を備えた棒体26がコ
イルスプリング27により後方に弾力付勢された
状態で貫通されている。該鞘管22から前方に突
出した該棒体26の前端部は前部ロツド15の後
端部に枢着結合され、上記したスプリング27の
弾力は常時ロツド15および棒体26を後方に引
張り、可動部11を前記球座において固定部12
に押圧している。28は上記鞘管22から推進ヘ
ツド9の後端面より更に後方に突出した棒体26
の後端部に固着されたナツト部材である。
A power supply section 19 and a target 20 are arranged inside the rear of the fixed section 12, and the rear of the target 20 is illuminated with a lamp 21. Further, sheath tubes 22, 22 are fixed in the axial direction on the outer circumferential surface of the rotating portion 12 at positions corresponding to the brackets 14, 14 of the movable portion 11, and inside thereof, the front and rear walls 23 of the sheath tube 22 are fixed. , 24, and is provided with a stopper 25 at its intermediate portion. A rod 26 is passed through the rod 26 while being elastically biased rearward by a coil spring 27. The front end of the rod 26 protruding forward from the sheath tube 22 is pivotally connected to the rear end of the front rod 15, and the elasticity of the spring 27 always pulls the rod 15 and the rod 26 rearward. When the movable part 11 is placed in the spherical seat, the fixed part 12
is being pressed. Reference numeral 28 denotes a rod 26 projecting further rearward from the rear end surface of the propulsion head 9 from the sheath tube 22.
This is a nut member fixed to the rear end of the.

一方、後続管10は第5図に示しているように
上記した推進ヘツド9と同径の管体30と該管体
30の外周に前記鞘管22と同位置に軸心方向に
設けられた後続鞘管31とからなり該後続鞘管3
1の両端外周には互に反対方向のネジ32が刻設
され、そのネジ部にそれぞれソケツト33が螺合
できるようになつている。また該後続管10の両
端縁には環状の溝34が設けられ、該溝34にO
リング35が嵌合されている。そして上記後続鞘
管31内には該後続鞘管31と略々同長あり、両
端部に雄ネジ部36、36を備えたロツド37が
嵌挿され、該雄ネジ部36の一方には接合用ナツ
ト38が外側に雌ネジ部を残して固定されてい
る。
On the other hand, as shown in FIG. 5, the trailing tube 10 includes a tube body 30 having the same diameter as the above-mentioned propulsion head 9, and is provided on the outer periphery of the tube body 30 in the same position as the sheath tube 22 in the axial direction. The succeeding sheath pipe 3
Screws 32 in opposite directions are carved on the outer periphery of both ends of 1, and sockets 33 can be screwed into the respective threaded portions. Further, an annular groove 34 is provided on both end edges of the trailing pipe 10, and an annular groove 34 is provided in the groove 34.
A ring 35 is fitted. A rod 37, which has approximately the same length as the succeeding sheath tube 31 and has male threaded portions 36, 36 at both ends, is fitted into the succeeding sheath tube 31, and one of the male threaded portions 36 is connected to the rod 37. A nut 38 is fixed with a female screw portion left on the outside.

続いて、動作要領について説すると、推進ヘツ
ド9の固定部12側に後続管10を対接せしめ
て、まず該固定部12の外周の鞘管22,22と
後続管10の外周の後続鞘管31,31とをソケ
ツト33,33でもつて連結するとともに、該固
定部12の後端面と後続管10の前端面とをOリ
ング35を介して当接させ、上記ソケツト33,
33を締付けることによつて両者12,10を加
圧状態で気密に連結する。次いで後続管10のロ
ツド37の雄ネジ部36を固定部12側の棒体2
6のナツト部材28に螺合せしめて該棒体26に
該ロツド37を連結し、この状態で先導管1を推
進せしめる。そして推進の進行にともなつて先の
後続管10の後端部に次の後続管10を当接さ
せ、スケツト33,33により順次連結してい
く。推進は発進立坑2内の押圧装置6によつて後
続管10の最後端を押圧することによつて行なわ
れる。この推進作業は発進立坑2内に設置した測
定装置でターゲツト20を視準しながら遂行され
るが、推進途中において先導管1の進行センター
が計画ラインよりもずれた場合には、発進立坑2
にて各後続管10,10の外周の鞘管31,31
を通つて連結延長されているロツド37,37の
一方、即ち先導管1のずれた方向と反対側に位置
しているロツド37を適宜の手段によつて牽引す
ると、その牽引力はロツド37、棒体26、ロツ
ド15を介して先導管1の前端可動部11に伝達
され、該可動部11は固定部12との球座接合部
を中心として修正すべき方向に変位され、引続い
て押圧推進されることによつて進行方向が是正さ
れる。
Next, to explain the operation procedure, the following pipe 10 is brought into contact with the fixed part 12 side of the propulsion head 9, and first the sheath pipes 22, 22 on the outer periphery of the fixed part 12 and the succeeding sheath pipe on the outer periphery of the following pipe 10 are connected. 31, 31 are connected by sockets 33, 33, and the rear end surface of the fixing part 12 and the front end surface of the succeeding pipe 10 are brought into contact via the O-ring 35, and the sockets 33,
By tightening 33, both 12 and 10 are airtightly connected under pressure. Next, attach the male threaded part 36 of the rod 37 of the succeeding pipe 10 to the rod 2 on the fixed part 12 side.
The rod 37 is connected to the rod body 26 by screwing into the nut member 28 of No. 6, and the leading pipe 1 is propelled in this state. Then, as the propulsion progresses, the next succeeding pipe 10 is brought into contact with the rear end of the previous succeeding pipe 10, and successively connected by the sockets 33, 33. Propulsion is effected by pressing the rear end of the trailing pipe 10 by means of a pressing device 6 in the starting shaft 2. This propulsion work is carried out while sighting the target 20 with a measuring device installed in the starting shaft 2. However, if the center of movement of the leading pipe 1 deviates from the planned line during propulsion, the starting shaft 2
The sheath tubes 31, 31 on the outer periphery of each subsequent tube 10, 10
When one of the rods 37, 37 connected and extended through the rod 37, that is, the rod 37 located on the opposite side to the direction in which the leading pipe 1 is deviated, is pulled by an appropriate means, the pulling force is The force is transmitted to the front end movable part 11 of the leading pipe 1 through the body 26 and the rod 15, and the movable part 11 is displaced in the direction to be corrected around the spherical joint with the fixed part 12, and is subsequently pressed and propelled. The direction of movement is corrected by this.

上記したロツド37の牽引装置としては、特に
限定を要するものではなく、例えば第6,7図に
略示しているように最後の後続管10の後端面に
外周にフランジ40を備えた短管41を当接さ
せ、該フランジ40にボルト42,42を貫通せ
しめて該ボルト42,42の前端を後続管10の
前記ロツド37,37の接合用ナツト38,38
に螺合させるとともに該ボルト42,42の後端
にナツト43,43を螺合させ、このナツト43
を締付け方向に回転させることによつて上記ロツ
ド37が牽引されるような簡単な構造の装置でも
よい。
The above-mentioned pulling device for the rod 37 is not particularly limited, and for example, as schematically shown in FIGS. The bolts 42, 42 are passed through the flanges 40, and the front ends of the bolts 42, 42 are connected to the connecting nuts 38, 38 of the rods 37, 37 of the succeeding pipe 10.
At the same time, nuts 43, 43 are screwed to the rear ends of the bolts 42, 42, and the nuts 43 are screwed together.
It may be a simple device in which the rod 37 is pulled by rotating the rod in the tightening direction.

このように本考案は中口径管4の推進埋設する
に先立つて推進される推進ヘツド9と後続管10
とからなる先導管1において、該推進ヘツド9を
断面円形の固定部12と可動部11とにより構成
するとともに該固定部12と該可動部11とをそ
の対接面において球座接合し、該推進ヘツド9の
固定部12側に後続管10を密着接続可能となる
とともに該固定部12および後続管10の外周に
上記可動部11の外周に向つて延びる複数本の棒
体26およびロツド37を順次連結延設し、該棒
体26の前端部を上記推進ヘツド9の可動部11
の外周面に軸心方向に突設したブラケツト14の
後端に枢着結合してなるものであるから、推進ヘ
ツド9の推進方向にずれが生じた場合には、発進
立坑2内において上記連結ロツド37の後端部を
適宜の手段により牽引操作することにより推進ヘ
ツド9の先端可動部11を上記球座を基点として
変位することができ、ずれた推進方向を的確かつ
容易に修正することができる。更にこの種の従来
の先導管に比べて構造が簡単となり故障の発生の
減少に役立つばかりでなく、方向是正のための駆
動部が不要となり配線類を要しないため工費が節
減でき、また管体の空間が広くとれ、有効断面積
を大きくすることが可能となつて測量上有利とな
る。
In this way, the present invention includes a propulsion head 9 and a trailing pipe 10 that are propelled prior to propulsion and burial of the medium diameter pipe 4.
In the leading pipe 1, the propulsion head 9 is constituted by a fixed part 12 with a circular cross section and a movable part 11, and the fixed part 12 and the movable part 11 are spherically joined at their opposing surfaces. The trailing tube 10 can be closely connected to the fixed portion 12 side of the propulsion head 9, and a plurality of rods 26 and rods 37 extending toward the outer periphery of the movable portion 11 are provided on the outer peripheries of the fixed portion 12 and the trailing tube 10. The front end of the rod 26 is connected to the movable part 11 of the propulsion head 9.
Since it is pivotally connected to the rear end of a bracket 14 that projects from the outer peripheral surface of the head in the axial direction, if a deviation occurs in the propulsion direction of the propulsion head 9, the above-mentioned connection in the starting shaft 2 will be removed. By pulling the rear end of the rod 37 by an appropriate means, the tip movable part 11 of the propulsion head 9 can be displaced with the spherical seat as a reference point, and the deviated propulsion direction can be accurately and easily corrected. can. Furthermore, the structure is simpler than this type of conventional lead pipe, which not only helps reduce the occurrence of failures, but also eliminates the need for a drive unit for direction correction and eliminates the need for wiring, reducing construction costs. This is advantageous for surveying as it allows for a larger space and increases the effective cross-sectional area.

さらに、方向制御用の棒体26やロツド37は
固定部12と各後続管10の外周に夫々配設され
ているので、可動部11の球座を基点とした変位
角度を大きくとることができると共にその操作が
軽快に行えるものであり、その上、これらの棒体
26やロツド37は固定部12と各後続管10の
外周面に軸心方向に突設した鞘管22,31内に
夫々挿入されるものであるから、棒体26に対す
るロツド37の連結作業並びにロツド37,37
同士の連結作業は該鞘管22,31をガイドとし
て容易に行え、しかも、後続管10,10同士の
接続は鞘管31,31の連結によつて達成される
ので、後続管10,10の接続作業が容易に行え
るものである。
Furthermore, since the rods 26 and 37 for direction control are arranged on the outer periphery of the fixed part 12 and each subsequent pipe 10, the displacement angle of the movable part 11 from the spherical seat can be made large. Moreover, these rods 26 and rods 37 are installed in sheath tubes 22 and 31 which are provided on the outer peripheral surface of the fixed portion 12 and each subsequent tube 10 in the axial direction, respectively. Since it is inserted, the work of connecting the rod 37 to the rod body 26 and the rods 37, 37 are required.
The connection between the sheath tubes 22 and 31 can be easily carried out using the sheath tubes 22 and 31 as a guide, and since the connection between the succeeding tubes 10 and 10 is achieved by connecting the sheath tubes 31 and 31, the succeeding tubes 10 and 10 Connection work can be easily performed.

又、上記のように、可動部11の外周面には軸
心方向にブラケツト14が突設していると共に、
このブラケツト14と同一方向に前記固定部12
と各後続管10の外周面に鞘管22,31を設け
ているので、ヒユーム管を埋設するための掘削機
の回転に伴う先導管のローリングを確実に防止す
ることができ、管体の埋設作業が円滑且つ正確に
行うことができるものである。
Further, as mentioned above, the bracket 14 is provided on the outer circumferential surface of the movable part 11 and protrudes in the axial direction.
The fixing part 12 is placed in the same direction as this bracket 14.
Since the sheath pipes 22 and 31 are provided on the outer peripheral surface of each trailing pipe 10, it is possible to reliably prevent the leading pipe from rolling due to the rotation of the excavator for burying the humid pipe, and to prevent the burying of the pipe body. Work can be done smoothly and accurately.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の実施例を示したものであつて、
第1図は施工中の概略側面図、第2図は推進ヘツ
ドの断面図、第3図は棒体の結合状態を示した平
面図、第4図は第2図のA−A線断面図、第5図
は後続管の1部断面側面図、そして第6図はロツ
ドの操作手段を例示した側面図、第7図はその要
部の拡大側面図である。 1……先導管、4……中口径管、9……推進ヘ
ツド、10……後続管、11……推進ヘツドの可
動部、12……固定部、26……棒体、37……
ロツド。
The drawings show an embodiment of the present invention, and
Fig. 1 is a schematic side view during construction, Fig. 2 is a sectional view of the propulsion head, Fig. 3 is a plan view showing how the rods are connected, and Fig. 4 is a sectional view taken along line A-A in Fig. 2. , FIG. 5 is a partially sectional side view of the succeeding tube, FIG. 6 is a side view illustrating the operating means of the rod, and FIG. 7 is an enlarged side view of the main part thereof. DESCRIPTION OF SYMBOLS 1...Leading pipe, 4...Medium diameter pipe, 9...Propulsion head, 10...Following pipe, 11...Movable part of propulsion head, 12...Fixed part, 26...Rod body, 37...
Rod.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 中口径管4を推進埋設するに先立つて推進され
る推進ヘツド9と後続管10とからなる先導管1
において、該推進ヘツド9を外周面の少なくとも
3方にブラケツト14を軸心方向に突設している
断面円形の可動部11と外周面に上記各ブラケツ
ト14の延長方向に鞘管22を突設している断面
円形の固定部12とにより構成するとともに該固
定部12と可動部11とをその対接面において球
座接合し、該推進ヘツド9の固定部12側に前記
各鞘管22の後端に連結可能な鞘管31を外周面
に軸心方向に突設している後続管10を密着接続
可能となすとともに前記固定部12および後続管
10の各鞘管22,31内に棒体26およびロツ
ド37を夫々挿入、連結し、該棒体26の前端部
を直接または任意の中間ロツド15を介して前記
可動部11のブラケツト14の後端に枢着結合し
たことを特徴とする管体推進埋設先導管。
A leading pipe 1 consisting of a propulsion head 9 and a trailing pipe 10, which are propelled prior to propulsion and burial of a medium diameter pipe 4.
The propulsion head 9 is equipped with a movable part 11 having a circular cross section on which brackets 14 are protruded in the axial direction on at least three sides of the outer circumferential surface, and a sheath tube 22 is provided on the outer circumferential surface with a sheath tube 22 protruding in the direction of extension of each of the brackets 14. The fixed part 12 and the movable part 11 are spherically joined at their opposing surfaces, and each of the sheath tubes 22 is provided on the fixed part 12 side of the propulsion head 9. A sheath tube 31 that can be connected to the rear end is provided protruding in the axial direction from the outer peripheral surface so that the succeeding tube 10 can be tightly connected to the sheath tube 31. The body 26 and the rod 37 are inserted and connected, respectively, and the front end of the rod 26 is pivotally connected to the rear end of the bracket 14 of the movable part 11 directly or via an arbitrary intermediate rod 15. Pipe body propulsion buried lead pipe.
JP5890184U 1984-04-20 1984-04-20 Pipe body propulsion buried lead pipe Granted JPS60172897U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5890184U JPS60172897U (en) 1984-04-20 1984-04-20 Pipe body propulsion buried lead pipe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5890184U JPS60172897U (en) 1984-04-20 1984-04-20 Pipe body propulsion buried lead pipe

Publications (2)

Publication Number Publication Date
JPS60172897U JPS60172897U (en) 1985-11-15
JPH03470Y2 true JPH03470Y2 (en) 1991-01-09

Family

ID=30584833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5890184U Granted JPS60172897U (en) 1984-04-20 1984-04-20 Pipe body propulsion buried lead pipe

Country Status (1)

Country Link
JP (1) JPS60172897U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220113493A (en) 2019-12-13 2022-08-12 가부시키가이샤 에바라 세이사꾸쇼 Substrate cleaning apparatus, polishing apparatus, buff processing apparatus, substrate cleaning method, substrate processing apparatus, and machine learner

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5491911A (en) * 1977-12-29 1979-07-20 Watanabegumi Kk Device for burying smallldiameter pipe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5491911A (en) * 1977-12-29 1979-07-20 Watanabegumi Kk Device for burying smallldiameter pipe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220113493A (en) 2019-12-13 2022-08-12 가부시키가이샤 에바라 세이사꾸쇼 Substrate cleaning apparatus, polishing apparatus, buff processing apparatus, substrate cleaning method, substrate processing apparatus, and machine learner

Also Published As

Publication number Publication date
JPS60172897U (en) 1985-11-15

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