JPH034700U - - Google Patents
Info
- Publication number
- JPH034700U JPH034700U JP6543089U JP6543089U JPH034700U JP H034700 U JPH034700 U JP H034700U JP 6543089 U JP6543089 U JP 6543089U JP 6543089 U JP6543089 U JP 6543089U JP H034700 U JPH034700 U JP H034700U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- container
- conductive protrusions
- spark
- movable mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003574 free electron Substances 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図は、この考案による放電トリガー装置の
一実施例を示す断面図である。
１は導電性の接触棒、２は接触棒の支え軸、３
は高電圧を真空中へ導入する手段、４は高電圧発
生手段、５はプラズマ生成容器の間隙、６はプラ
ズマ生成室壁、７はプラズマ生成室、８はマグネ
ツト、９は石英の窓、１０はプラズマ化ガス導入
口、１１はマイクロ波導波管、１２はマイクロ波
発振器、１３は排気管、１４は真空ポンプ、１５
は絶縁物、１６は絶縁物。
FIG. 1 is a sectional view showing an embodiment of the discharge trigger device according to this invention. 1 is a conductive contact rod, 2 is a supporting shaft of the contact rod, 3
4 is a means for introducing high voltage into a vacuum, 4 is a high voltage generating means, 5 is a gap in the plasma generation container, 6 is a wall of a plasma generation chamber, 7 is a plasma generation chamber, 8 is a magnet, 9 is a quartz window, 10 1 is a plasma gas inlet, 11 is a microwave waveguide, 12 is a microwave oscillator, 13 is an exhaust pipe, 14 is a vacuum pump, 15
is an insulator, and 16 is an insulator.
Claims (1)
持するための容器、このプラズマ容器に電圧を印
加する手段、アース電位に短絡された導電性の突
起物の可動機構を備え、あるいは逆にプラズマ容
器をアース電位に接続する手段、高電圧を印加し
た導電性の突起物の可動機構を備え、上記プラズ
マ容器の内部と外部に通じる間隙や穴の近傍に、
上記導電性の突起物を接近させ、断続的に接触さ
せることにより火花放電を発生させ、この火花放
電により生じる自由電子をプラズマ発生のきつか
けを作る火種として使用することを特長とする、
放電トリガー装置。 A container for holding plasma (diluted ionized gas) in a limited area, a means for applying a voltage to this plasma container, a movable mechanism of conductive protrusions short-circuited to earth potential, or conversely a plasma container. and a movable mechanism for conductive protrusions to which a high voltage is applied;
A spark discharge is generated by bringing the conductive protrusions close to each other and intermittently contacting them, and the free electrons generated by the spark discharge are used as a spark to trigger plasma generation.
Discharge trigger device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6543089U JPH034700U (en) | 1989-06-06 | 1989-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6543089U JPH034700U (en) | 1989-06-06 | 1989-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH034700U true JPH034700U (en) | 1991-01-17 |
Family
ID=31597252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6543089U Pending JPH034700U (en) | 1989-06-06 | 1989-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH034700U (en) |
-
1989
- 1989-06-06 JP JP6543089U patent/JPH034700U/ja active Pending
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