JPH0345964U - - Google Patents
Info
- Publication number
- JPH0345964U JPH0345964U JP10557789U JP10557789U JPH0345964U JP H0345964 U JPH0345964 U JP H0345964U JP 10557789 U JP10557789 U JP 10557789U JP 10557789 U JP10557789 U JP 10557789U JP H0345964 U JPH0345964 U JP H0345964U
- Authority
- JP
- Japan
- Prior art keywords
- plating
- plating liquid
- supply device
- liquid supply
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10557789U JPH06453Y2 (ja) | 1989-09-08 | 1989-09-08 | めっき装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10557789U JPH06453Y2 (ja) | 1989-09-08 | 1989-09-08 | めっき装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0345964U true JPH0345964U (en:Method) | 1991-04-26 |
| JPH06453Y2 JPH06453Y2 (ja) | 1994-01-05 |
Family
ID=31654339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10557789U Expired - Lifetime JPH06453Y2 (ja) | 1989-09-08 | 1989-09-08 | めっき装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06453Y2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016121397A (ja) * | 2014-12-24 | 2016-07-07 | 株式会社デンソー | めっき装置、及び、めっき製品の製造方法 |
| JP2019094526A (ja) * | 2017-11-21 | 2019-06-20 | 富士通株式会社 | 基板処理装置 |
-
1989
- 1989-09-08 JP JP10557789U patent/JPH06453Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016121397A (ja) * | 2014-12-24 | 2016-07-07 | 株式会社デンソー | めっき装置、及び、めっき製品の製造方法 |
| JP2019094526A (ja) * | 2017-11-21 | 2019-06-20 | 富士通株式会社 | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06453Y2 (ja) | 1994-01-05 |