JPH0345955U - - Google Patents
Info
- Publication number
- JPH0345955U JPH0345955U JP10597289U JP10597289U JPH0345955U JP H0345955 U JPH0345955 U JP H0345955U JP 10597289 U JP10597289 U JP 10597289U JP 10597289 U JP10597289 U JP 10597289U JP H0345955 U JPH0345955 U JP H0345955U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- crucible
- crucibles
- heating
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10597289U JPH0345955U (de) | 1989-09-08 | 1989-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10597289U JPH0345955U (de) | 1989-09-08 | 1989-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0345955U true JPH0345955U (de) | 1991-04-26 |
Family
ID=31654722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10597289U Pending JPH0345955U (de) | 1989-09-08 | 1989-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345955U (de) |
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1989
- 1989-09-08 JP JP10597289U patent/JPH0345955U/ja active Pending