JPH0345645U - - Google Patents
Info
- Publication number
- JPH0345645U JPH0345645U JP10684089U JP10684089U JPH0345645U JP H0345645 U JPH0345645 U JP H0345645U JP 10684089 U JP10684089 U JP 10684089U JP 10684089 U JP10684089 U JP 10684089U JP H0345645 U JPH0345645 U JP H0345645U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- shock
- storing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10684089U JPH0345645U (un) | 1989-09-12 | 1989-09-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10684089U JPH0345645U (un) | 1989-09-12 | 1989-09-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0345645U true JPH0345645U (un) | 1991-04-26 |
Family
ID=31655560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10684089U Pending JPH0345645U (un) | 1989-09-12 | 1989-09-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0345645U (un) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999040623A1 (fr) * | 1998-02-04 | 1999-08-12 | Nikon Corporation | Systeme d'exposition et appareil de positionnement de cassette a substrat |
-
1989
- 1989-09-12 JP JP10684089U patent/JPH0345645U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999040623A1 (fr) * | 1998-02-04 | 1999-08-12 | Nikon Corporation | Systeme d'exposition et appareil de positionnement de cassette a substrat |