JPH0345636U - - Google Patents
Info
- Publication number
- JPH0345636U JPH0345636U JP10530989U JP10530989U JPH0345636U JP H0345636 U JPH0345636 U JP H0345636U JP 10530989 U JP10530989 U JP 10530989U JP 10530989 U JP10530989 U JP 10530989U JP H0345636 U JPH0345636 U JP H0345636U
- Authority
- JP
- Japan
- Prior art keywords
- support parts
- cleaned
- sets
- supported
- supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10530989U JPH0345636U (zh) | 1989-09-11 | 1989-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10530989U JPH0345636U (zh) | 1989-09-11 | 1989-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0345636U true JPH0345636U (zh) | 1991-04-26 |
Family
ID=31654072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10530989U Pending JPH0345636U (zh) | 1989-09-11 | 1989-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345636U (zh) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000036644A1 (fr) * | 1998-12-11 | 2000-06-22 | Toho Kasei Ltd. | Dispositif de traitement de plaquettes |
| KR100588276B1 (ko) * | 1997-11-19 | 2006-12-01 | 가부시끼가이샤가이죠 | 기판건조장치및방법 |
| JP2011204893A (ja) * | 2010-03-25 | 2011-10-13 | Tokyo Electron Ltd | 基板処理装置、基板処理方法、およびこの基板処理方法を実行するためのコンピュータプログラムが記録された記録媒体 |
| US8567417B2 (en) * | 2009-10-05 | 2013-10-29 | Tokyo Electron Limited | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method |
-
1989
- 1989-09-11 JP JP10530989U patent/JPH0345636U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100588276B1 (ko) * | 1997-11-19 | 2006-12-01 | 가부시끼가이샤가이죠 | 기판건조장치및방법 |
| WO2000036644A1 (fr) * | 1998-12-11 | 2000-06-22 | Toho Kasei Ltd. | Dispositif de traitement de plaquettes |
| US8567417B2 (en) * | 2009-10-05 | 2013-10-29 | Tokyo Electron Limited | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method |
| JP2011204893A (ja) * | 2010-03-25 | 2011-10-13 | Tokyo Electron Ltd | 基板処理装置、基板処理方法、およびこの基板処理方法を実行するためのコンピュータプログラムが記録された記録媒体 |