JPH0344993Y2 - - Google Patents
Info
- Publication number
- JPH0344993Y2 JPH0344993Y2 JP15146788U JP15146788U JPH0344993Y2 JP H0344993 Y2 JPH0344993 Y2 JP H0344993Y2 JP 15146788 U JP15146788 U JP 15146788U JP 15146788 U JP15146788 U JP 15146788U JP H0344993 Y2 JPH0344993 Y2 JP H0344993Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pipe
- gas introduction
- exhaust gas
- combustion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 94
- 238000002485 combustion reaction Methods 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 22
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000003345 natural gas Substances 0.000 claims description 5
- 239000001294 propane Substances 0.000 claims description 5
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 229910018503 SF6 Inorganic materials 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000009841 combustion method Methods 0.000 description 2
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 229910000078 germane Inorganic materials 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 2
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 description 2
- 229910000058 selane Inorganic materials 0.000 description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 2
- 229960000909 sulfur hexafluoride Drugs 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Landscapes
- Incineration Of Waste (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
反応炉から排出される特殊材料ガスの分解燃焼
率を高率にし、特に低濃度域で排気量が多い時の
特殊材料ガスの分解燃焼率を高率にすることがで
きる特殊材料ガスの燃焼装置に関する考案であ
る。[Detailed explanation of the invention] [Industrial application field] To increase the decomposition and combustion rate of special material gas discharged from a reactor, especially when the amount of exhaust gas is large in a low concentration range. This invention relates to a combustion device for special material gas that can achieve a high rate of combustion.
半導体製造工場等の反応炉から排出される特殊
材料ガスの排ガスは毒性が強く、しかもシランガ
スは空気に触れると発火する性質がある。この種
排ガスの処方法として、本出願人は反応炉から排
出される特殊材料ガスを燃焼室内の空気と反応さ
せて燃焼させた後、スクラバー、バグフイルター
等で後処理を行う特殊材料ガスの処理方法におい
て、特殊材料ガスの排ガス導入管のノズル先端周
囲に可燃性ガスを供給燃焼させ火炎バリヤを形成
し、これにより火炎内に導入された特殊材料ガス
を火炎雰囲気のバリヤの先方で強制的に燃焼させ
ることを特徴とする特殊材料ガスの燃焼方法を発
明したがこの方法では低濃度域で排気量が多い時
にはガスの分解燃焼率が低くそのままでは排出す
ることができないものである。又、特殊材料ガス
の排ガスとしてはシラン（SiH4）、の他に、ジシ
ラン（Si2H6）、ホスフイン（PH3）、アルシン
（AsH3）、ゲルマン（GeH4）、アンモニア
（NH3）、セレン化水素（SeH2）、硫化水素
（H2S）、三フツ化窒素（NF3）、或は六フツ化硫
黄（SF6）等が燃焼処埋可能であるが、この中に
は0.05ppmの許容濃度の物もあり前記の燃焼方法
ではそのまま排出できない場合がある。
The exhaust gases of special material gases discharged from reactors in semiconductor manufacturing factories and the like are highly toxic, and silane gas has the property of igniting when it comes into contact with air. As a prescription method for this type of exhaust gas, the applicant has developed a special material gas treatment method in which the special material gas discharged from the reactor is reacted with the air in the combustion chamber and combusted, and then post-processed using a scrubber, bag filter, etc. In this method, flammable gas is supplied around the nozzle tip of the exhaust gas introduction pipe for special material gas and is combusted to form a flame barrier, thereby forcing the special material gas introduced into the flame beyond the barrier in the flame atmosphere. Although we have invented a method for burning special material gas, which is characterized by combustion, when the exhaust volume is large in a low concentration range, the rate of decomposition and combustion of the gas is low and the gas cannot be discharged as is. In addition to silane (SiH 4 ), the special material gases include disilane (Si 2 H 6 ), phosphine (PH 3 ), arsine (AsH 3 ), germane (GeH 4 ), and ammonia (NH 3 ). , hydrogen selenide (SeH 2 ), hydrogen sulfide (H 2 S), nitrogen trifluoride (NF 3 ), or sulfur hexafluoride (SF 6 ), among others. Some substances have a permissible concentration of 0.05 ppm, so they may not be able to be discharged as they are using the combustion method described above.
現在行われている燃焼方法では排ガスの中に含
まれいるシラン（SiH4）、の他に、ジシラン
（Si2H6）、ホスフイン（PH3）、アルシン
（AsH3）、ゲルマン（GeH4）、アンモニア
（NH3）、セレン化水素（SeH2）、硫化水素
（H2S）、三フツ化窒素（NF3）、或は六フツ化硫
黄（SF6）等が低濃度域で排気量が多い時に完全
に燃焼処埋出来ないと言う問題点を解決しようと
する考案である。
The current combustion method uses silane (SiH 4 ) contained in exhaust gas, as well as disilane (Si 2 H 6 ), phosphine (PH 3 ), arsine (AsH 3 ), and germane (GeH 4 ). , ammonia (NH 3 ), hydrogen selenide (SeH 2 ), hydrogen sulfide (H 2 S), nitrogen trifluoride (NF 3 ), or sulfur hexafluoride (SF 6 ), etc. are emitted in low concentration ranges. This idea was designed to solve the problem of not being able to completely dispose of the waste by burning it when there is a large amount of waste.
この考案は排気口を有する上部材と下部材で上
下を閉鎖した縦型の円筒体の中間を多孔板で上下
に仕切り、上部を燃焼室、下部を空気室に構成
し、更に外側より内側に向け隙間を介して設けら
れている可燃性ガス導入外管、排ガス導入外内管
と可燃性ガス導入内管とよりなる四重管の燃焼筒
を空気室の下部材近くから上方に向け多孔板を貫
通させて構成し、可燃性ガス導入外管と排ガス導
入外管、及び排ガス導入内管と可燃性ガス導入内
管の間隙にプロパンガス、天然ガス、水素などの
可燃性ガスを送り空気室に空気を送り自動点火器
により可燃性ガスに点火させた後、排ガス導入外
内管の間隙に特殊材料ガスを送り内側の可燃性ガ
スの炎により排ガスの温度上昇を図り外側の可燃
性ガスの炎により特殊材料ガスを火炎先端部で完
全燃焼処理させるようにして問題点を解決したも
のである。
This idea consists of a vertical cylindrical body whose top and bottom are closed by an upper member with an exhaust port and a lower member, with a perforated plate dividing the middle into upper and lower parts, with the upper part serving as a combustion chamber and the lower part serving as an air chamber. The quadruple-pipe combustion cylinder, which is made up of an outer flammable gas inlet pipe, an outer and inner exhaust gas inlet pipe, and an inner flammable gas inlet pipe, are installed through a gap in the air chamber, and the perforated plate is directed upward from near the bottom member of the air chamber. A combustible gas such as propane gas, natural gas, hydrogen, etc. is sent to the gap between the outer flammable gas introduction pipe, the outer exhaust gas introduction pipe, and the inner exhaust gas introduction pipe and the inner flammable gas introduction pipe to create an air chamber. After sending air to the inner pipe and igniting the flammable gas using an automatic igniter, a special material gas is sent into the gap between the outer and inner exhaust gas introduction pipes to raise the temperature of the exhaust gas with the flame of the flammable gas on the inner side. This problem was solved by completely burning the special material gas at the tip of the flame.
排気口を有する上部材と下部材で上下を閉鎖し
た縦型の円筒体の中間を多孔板で上下に仕切り、
上部を燃焼室、下部を空気室に構成し、更に外側
より内側に向け隙間を介して設けられている可燃
性ガス導入外管、排ガス導入外内管と可燃性ガス
導入内管とよりなる四重管の燃焼筒を空気室の下
部材近くから上方に向け多孔板を貫通させて構成
し、可燃性ガス導入外管と排ガス導入外管、及び
排ガス導入内管と可燃性ガス導入内管の間隙にプ
ロパンガス、天然ガス、水素などの可燃性ガスを
送り空気室に空気を送り自動点火器により可燃性
ガスに点火させた後、排ガス導入外内管の間隙に
特殊材料ガスを送り内側の可燃性ガスの炎により
排ガスの温度上昇を図り外側の可燃性ガスの炎に
より特殊材料ガスを火炎先端部で完全燃焼処理さ
せるものである。
The vertical cylindrical body is closed at the top and bottom by an upper member with an exhaust port and a lower member, and the middle is partitioned into upper and lower parts by a perforated plate.
The upper part is a combustion chamber, the lower part is an air chamber, and further consists of an outer combustible gas introduction pipe, an outer and inner exhaust gas introduction pipe, and an inner flammable gas introduction pipe, which are provided from the outside to the inside through a gap. A heavy combustion tube is constructed by passing the perforated plate upward from near the lower member of the air chamber, and connects the combustible gas introduction outer pipe, the exhaust gas introduction outer pipe, and the exhaust gas introduction inner pipe and the combustible gas introduction inner pipe. A flammable gas such as propane gas, natural gas, hydrogen, etc. is sent into the gap, air is sent into the air chamber, and the flammable gas is ignited by an automatic igniter. After that, a special material gas is sent into the gap between the exhaust gas introduction outer and inner pipes, and the inner The temperature of the exhaust gas is raised by the flame of flammable gas, and the special material gas is completely burned at the tip of the flame by the flame of flammable gas on the outside.
排気口１を有する上部材２と下部材３で上下を
閉鎖した縦型の円筒体４の中間を多孔板５で上下
に仕切り、上部を燃焼室６、下部を空気室７とし
て燃焼筒Ａを構成する。空気室７には電磁弁８を
有する空気送気管９が接続されている。燃焼室６
の下方に形成された空気室７は多孔板５の孔１０
を介して燃焼室６に連通し、燃焼室６への空気供
給部を構成している。外側より可燃性ガス導入外
管１１ａ、排ガス導入外管１１ｂ、排ガス導入内
管１１ｃ及び可燃性ガス導入内管１１ｄとの四重
管より成る燃焼筒１１を形成し、該燃焼筒１１を
空気室７の底部近くから円筒体４の軸方向に向け
多孔板５を貫通させて挿入され、多孔板５を貫通
してその先端ノズル部は燃焼室６内に突出して挑
むように配設されている。燃焼筒１１の下端は可
燃性ガス導入内管１１ｄの内径３０（内孔）以外
を底板１９で閉塞し、底板１９と下部材３との間
に空間を形成し空気流通部２９とする。燃焼筒１
１の底板１９と下部材３との間には縦支持部材を
設け（図示せず）、縦支持部材で燃焼筒１１を下
部材３に支持させるものである。この場合は空気
は空気流通部２９を介して可燃性ガス導入内管１
１ｄの内部を連通して上部に空気を送る。或は可
燃性ガス導入内管１１ｄに図の仮想線のように外
部から空気供給パイプ３１を連結して外部より空
気を送るようにしても良く、いずれにしても可燃
性ガス導入内管１１ｄの内部に空気を送るように
すればよいものである。排ガス導入外管１１ｂ及
び排ガス導入内管１１ｃの排ガス噴射空間３２の
底板１９にはシランガス等を含有する特殊材料ガ
スを排出する反応炉１４からの排ガスを受容する
排ガス供給部１３を介して排ガス導入管１２が接
続してある。
A vertical cylindrical body 4 whose top and bottom are closed by an upper member 2 having an exhaust port 1 and a lower member 3 is partitioned into upper and lower parts by a perforated plate 5, and a combustion cylinder A is formed with a combustion chamber 6 in the upper part and an air chamber 7 in the lower part. Configure. An air supply pipe 9 having a solenoid valve 8 is connected to the air chamber 7 . Combustion chamber 6
The air chamber 7 formed below the hole 10 of the perforated plate 5
It communicates with the combustion chamber 6 via, and constitutes an air supply section to the combustion chamber 6. A combustion tube 11 is formed from a quadruple tube including an outer flammable gas introduction tube 11a, an exhaust gas introduction outer tube 11b, an exhaust gas introduction inner tube 11c, and a combustible gas introduction inner tube 11d from the outside, and the combustion tube 11 is used as an air chamber. It is inserted from near the bottom of the cylinder 4 in the axial direction of the cylindrical body 4 through the perforated plate 5, and the tip nozzle part thereof is arranged so as to penetrate through the perforated plate 5 and protrude into the combustion chamber 6. . The lower end of the combustion tube 11 is closed with a bottom plate 19 other than the inner diameter 30 (inner hole) of the combustible gas introduction inner pipe 11d, and a space is formed between the bottom plate 19 and the lower member 3 to form an air circulation section 29. Combustion tube 1
A vertical support member (not shown) is provided between the bottom plate 19 of No. 1 and the lower member 3, and the combustion tube 11 is supported by the lower member 3 by the vertical support member. In this case, air flows through the flammable gas introduction inner pipe 1 through the air circulation part 29.
The inside of 1d is communicated to send air to the upper part. Alternatively, the air supply pipe 31 may be connected to the flammable gas introduction inner pipe 11d from the outside as shown by the virtual line in the figure to send air from the outside.In any case, the flammable gas introduction inner pipe 11d All you have to do is send air inside. Exhaust gas is introduced into the bottom plate 19 of the exhaust gas injection space 32 of the exhaust gas introduction outer pipe 11b and the exhaust gas introduction inner pipe 11c through an exhaust gas supply section 13 that receives exhaust gas from a reactor 14 that discharges special material gas containing silane gas, etc. A tube 12 is connected.
該排ガス導入管１２にはイナートガス混入パイ
プ１５が接続されており、排ガス導入管１２の排
ガス中にイナートガスを混入して排ガスを希釈す
るようになつている。又、イナートガス混入パイ
プ１５には流量制御器１６を設け、排ガス導入管
１２の先端ノズルから噴射される排ガスの濃度、
流速を調整するようにしたものである。又、燃焼
室６と空気室７の境界が多孔板５のみで構成され
ている場合は空気室７から燃焼室６への空気の流
れが特定の場所にかたよつたり、あるいは空気室
６の火炎が空気室７に入つてバツクフアイヤを起
こす恐れがある。このため望ましくは空気室７の
多孔板５の下面に空気を通す不燃性の多孔質の充
填材層１７を適当な厚さで形成する。充填材層１
７の下面に金網あるいは格子状の支持材１８を嵌
装して、充填材が落下しないようにする。そして
外側の可燃性ガス噴射空間２０の底部及び内側の
可燃性ガス噴射空間２１の底部にはプロパンガ
ス、天然ガス、水素などの可燃性ガス供給源２１
に接続されているパイプ２２が流量制御器２３を
介して接続されており、内外の可燃性ガス噴射空
間２０，２１の先端ノズルら噴射されるプロパン
ガス、天然ガス、水素などの可燃性ガスの流量、
流速を調整できるようになつている。空気室６に
は内部、特に燃焼筒１１のノズル上方に発生する
火炎の状態を観察できるようにのぞき窓２６が設
けられている。 An inert gas mixing pipe 15 is connected to the exhaust gas introduction pipe 12, and inert gas is mixed into the exhaust gas of the exhaust gas introduction pipe 12 to dilute the exhaust gas. In addition, a flow rate controller 16 is provided in the inert gas mixing pipe 15 to control the concentration of the exhaust gas injected from the tip nozzle of the exhaust gas introduction pipe 12.
The flow rate is adjusted. In addition, if the boundary between the combustion chamber 6 and the air chamber 7 is formed only by the perforated plate 5, the flow of air from the air chamber 7 to the combustion chamber 6 may be biased to a specific location, or the air There is a risk that the flame will enter the air chamber 7 and cause a backup fire. For this purpose, it is desirable to form a nonflammable porous filler layer 17 with an appropriate thickness on the lower surface of the perforated plate 5 of the air chamber 7 to allow air to pass therethrough. Filler layer 1
A wire mesh or lattice-like supporting material 18 is fitted on the lower surface of the filling material 7 to prevent the filling material from falling. A combustible gas supply source 21 such as propane gas, natural gas, or hydrogen is provided at the bottom of the outer combustible gas injection space 20 and the bottom of the inner combustible gas injection space 21.
A pipe 22 is connected to the pipe 22 via a flow rate controller 23 to control the flow rate of combustible gases such as propane gas, natural gas, and hydrogen injected from the tip nozzles of the inner and outer flammable gas injection spaces 20 and 21. flow rate,
The flow rate can be adjusted. A viewing window 26 is provided in the air chamber 6 so that the state of the flame generated inside, particularly above the nozzle of the combustion tube 11, can be observed.
又、燃焼室６に圧力計２５が設けられている。
実施例では燃焼筒１１を一本使用した例を示した
が同様のものを複数本用いることもできる。四重
管の燃焼筒１１の上端噴射部２７の近傍には自動
点火器２８が設けられているものである。２９は
中央の可燃性ガス導入内管１１ｄの内部に空気を
送り込む空気流通部である。 Further, a pressure gauge 25 is provided in the combustion chamber 6.
In the embodiment, an example is shown in which one combustion tube 11 is used, but a plurality of similar combustion tubes can also be used. An automatic igniter 28 is provided near the upper end injection section 27 of the quadruple-tube combustion tube 11. Reference numeral 29 denotes an air circulation section that sends air into the central combustible gas introduction inner pipe 11d.
可燃性ガスの火炎の中に特殊材料ガスを噴射燃
焼させることにより低濃度域で排気量が多い特殊
材料ガスの分解燃焼率を100％にすることが出来
たものである。
By injecting and burning a special material gas into a combustible gas flame, it was possible to achieve a 100% decomposition and combustion rate for the special material gas, which has a large amount of emissions in the low concentration range.
図は燃焼装置の断面図を示すものである。 The figure shows a sectional view of the combustion device.
Claims (1)
た縦型の円筒体の中間を多孔板で上下に仕切り、
上部を燃焼室、下部を空気室に構成し、更に外側
より内側に向け隙間を介して設けられている可燃
性ガス導入外管、排ガス導入外内管と可燃性ガス
導入内管とよりなる四重管の燃焼筒を空気室の下
部材近くから上方に向け多孔板を貫通させて構成
し、可燃性ガス導入外管と排ガス導入外管、及び
排ガス導入内管と可燃性ガス導入内管の間隙にプ
ロパンガス、天然ガス、水素などの可燃性ガスを
送り空気室に空気を送り自動点火器により可燃性
ガスに点火させた後、排ガス導入外内管の間隙に
特殊材料ガスを送り内側の可燃性ガスの炎により
排ガスの温度上昇を図り外側の可燃性ガスの炎に
より特殊材料ガスを火炎先端部で完全燃焼処理さ
せるようにして成ることを特徴とした特殊材料ガ
スの燃焼装置。 The vertical cylindrical body is closed at the top and bottom by an upper member with an exhaust port and a lower member, and the middle is partitioned into upper and lower parts by a perforated plate.
The upper part is a combustion chamber, the lower part is an air chamber, and further consists of an outer combustible gas introduction pipe, an outer and inner exhaust gas introduction pipe, and an inner flammable gas introduction pipe, which are provided from the outside to the inside through a gap. A heavy combustion tube is constructed by passing the perforated plate upward from near the lower member of the air chamber, and connects the combustible gas introduction outer pipe, the exhaust gas introduction outer pipe, and the exhaust gas introduction inner pipe and the combustible gas introduction inner pipe. A flammable gas such as propane gas, natural gas, hydrogen, etc. is sent into the gap, air is sent into the air chamber, and the flammable gas is ignited by an automatic igniter. After that, a special material gas is sent into the gap between the exhaust gas introduction outer and inner pipes, and the inner A combustion device for special material gas, characterized in that the temperature of the exhaust gas is raised by a flame of combustible gas, and the special material gas is completely combusted at the tip of the flame by the flame of combustible gas on the outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15146788U JPH0344993Y2 (en) | 1988-11-21 | 1988-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15146788U JPH0344993Y2 (en) | 1988-11-21 | 1988-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0277433U JPH0277433U (en) | 1990-06-14 |
| JPH0344993Y2 true JPH0344993Y2 (en) | 1991-09-24 |
Family
ID=31425538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15146788U Expired JPH0344993Y2 (en) | 1988-11-21 | 1988-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344993Y2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0417378D0 (en) * | 2004-08-04 | 2004-09-08 | Boc Group Plc | Gas abatement |
| GB0509163D0 (en) * | 2005-05-05 | 2005-06-15 | Boc Group Plc | Gas combustion apparatus |
| GB0613044D0 (en) * | 2006-06-30 | 2006-08-09 | Boc Group Plc | Gas combustion apparatus |
| JP5232407B2 (en) * | 2007-05-25 | 2013-07-10 | 日本パイオニクス株式会社 | Exhaust gas purification equipment |
-
1988
- 1988-11-21 JP JP15146788U patent/JPH0344993Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0277433U (en) | 1990-06-14 |
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