JPH0344655U - - Google Patents
Info
- Publication number
- JPH0344655U JPH0344655U JP10464989U JP10464989U JPH0344655U JP H0344655 U JPH0344655 U JP H0344655U JP 10464989 U JP10464989 U JP 10464989U JP 10464989 U JP10464989 U JP 10464989U JP H0344655 U JPH0344655 U JP H0344655U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- camera
- cylindrical body
- light source
- observation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
図は本考案の実施例を示すものであつて、第１
図は基板の観察装置の斜視図、第２図は要部側面
図、第３図は基板認識マークの平面図、、第４図
及び第５図は他の実施例の側面図、第６図は従来
装置の側面図、第７図ａ，ｂは基板認識マークの
平面図である。
１……カメラ、３……鏡筒、４……リング状光
源部、８，１７，１８……筒体、８ｂ，１７ｂ…
…縮径部。
The figure shows an embodiment of the present invention.
The figure is a perspective view of the board observation device, Figure 2 is a side view of the main part, Figure 3 is a plan view of the board recognition mark, Figures 4 and 5 are side views of other embodiments, Figure 6 7 is a side view of the conventional device, and FIGS. 7a and 7b are plan views of the board recognition mark. DESCRIPTION OF SYMBOLS 1... Camera, 3... Lens barrel, 4... Ring-shaped light source part, 8, 17, 18... Cylindrical body, 8b, 17b...
...Reduced diameter section.
Claims (1)
、基板の上面に形成された外凸球面状被測定物に
光を照射するリング状光源部とを備え、この光源
部に、内部に反射面を有する筒体を装着したこと
を特徴とする基板の観察装置。 (2) 上記筒体が、下方へ向つてテーパ状に縮径
する縮径部を有することを特徴とする上記実用新
案登録請求の範囲第１項に記載の基板の観察装置
。[Claims for Utility Model Registration] (1) Comprising a camera and a ring-shaped light source section that is provided in the optical path of the camera and irradiates light onto an externally convex spherical object to be measured formed on the top surface of a substrate, A substrate observation device characterized in that the light source section is equipped with a cylindrical body having a reflective surface inside. (2) The substrate observation device according to claim 1, wherein the cylindrical body has a diameter-reducing portion that tapers downward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10464989U JPH0344655U (en) | 1989-09-06 | 1989-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10464989U JPH0344655U (en) | 1989-09-06 | 1989-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0344655U true JPH0344655U (en) | 1991-04-25 |
Family
ID=31653438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10464989U Pending JPH0344655U (en) | 1989-09-06 | 1989-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344655U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015197563A (en) * | 2014-04-01 | 2015-11-09 | 富士電機株式会社 | Lighting system for image recognition |
| JP2018004306A (en) * | 2016-06-28 | 2018-01-11 | 株式会社ディスコ | Surface inspection device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5876745A (en) * | 1981-10-30 | 1983-05-09 | Matsushita Electric Ind Co Ltd | Flaw detector |
| JPS62299709A (en) * | 1986-06-20 | 1987-12-26 | Matsushita Electric Works Ltd | Inspecting method for outward appearance of solder |
| JPS63142239A (en) * | 1986-12-05 | 1988-06-14 | Nec Corp | Apparatus for observing surface shape |
-
1989
- 1989-09-06 JP JP10464989U patent/JPH0344655U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5876745A (en) * | 1981-10-30 | 1983-05-09 | Matsushita Electric Ind Co Ltd | Flaw detector |
| JPS62299709A (en) * | 1986-06-20 | 1987-12-26 | Matsushita Electric Works Ltd | Inspecting method for outward appearance of solder |
| JPS63142239A (en) * | 1986-12-05 | 1988-06-14 | Nec Corp | Apparatus for observing surface shape |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015197563A (en) * | 2014-04-01 | 2015-11-09 | 富士電機株式会社 | Lighting system for image recognition |
| JP2018004306A (en) * | 2016-06-28 | 2018-01-11 | 株式会社ディスコ | Surface inspection device |