JPH0343728U - - Google Patents
Info
- Publication number
- JPH0343728U JPH0343728U JP10548889U JP10548889U JPH0343728U JP H0343728 U JPH0343728 U JP H0343728U JP 10548889 U JP10548889 U JP 10548889U JP 10548889 U JP10548889 U JP 10548889U JP H0343728 U JPH0343728 U JP H0343728U
- Authority
- JP
- Japan
- Prior art keywords
- spinner
- wafer
- cover
- rotates
- corresponds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10548889U JPH0343728U (en, 2012) | 1989-09-08 | 1989-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10548889U JPH0343728U (en, 2012) | 1989-09-08 | 1989-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0343728U true JPH0343728U (en, 2012) | 1991-04-24 |
Family
ID=31654249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10548889U Pending JPH0343728U (en, 2012) | 1989-09-08 | 1989-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343728U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018026477A (ja) * | 2016-08-10 | 2018-02-15 | 東京エレクトロン株式会社 | 液処理装置及び液処理方法 |
-
1989
- 1989-09-08 JP JP10548889U patent/JPH0343728U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018026477A (ja) * | 2016-08-10 | 2018-02-15 | 東京エレクトロン株式会社 | 液処理装置及び液処理方法 |