JPH0343689B2 - - Google Patents

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Publication number
JPH0343689B2
JPH0343689B2 JP12756684A JP12756684A JPH0343689B2 JP H0343689 B2 JPH0343689 B2 JP H0343689B2 JP 12756684 A JP12756684 A JP 12756684A JP 12756684 A JP12756684 A JP 12756684A JP H0343689 B2 JPH0343689 B2 JP H0343689B2
Authority
JP
Japan
Prior art keywords
magnetic
film
thin film
vapor
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12756684A
Other languages
Japanese (ja)
Other versions
JPS618731A (en
Inventor
Kyuzo Nakamura
Yoshifumi Oota
Takeshi Momono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP12756684A priority Critical patent/JPS618731A/en
Publication of JPS618731A publication Critical patent/JPS618731A/en
Publication of JPH0343689B2 publication Critical patent/JPH0343689B2/ja
Granted legal-status Critical Current

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  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

本発明は、耐摩耗性磁気記録体の製造法に関す
る。従来、磁気記録体の磁性薄膜に耐摩耗性を付
与するため、その磁性薄膜上に、潤滑剤として、
フルオロアルキルカルボン酸、その金属塩、エス
テル、アミド等のフツ素系潤滑剤を溶剤に溶解
し、塗布、浸漬などの手段で、その塗膜を形成し
ていたが、その塗膜は比較的剥がれ易いなどの欠
点を有した。その欠点を改善するため、先に出願
人は、特開昭59−213031号において、フルオロア
ルキルカルボン酸のアルカリ金属塩又はアルカリ
土金属塩を蒸発させこれを磁性薄膜上に形成せし
めた耐摩耗性磁気記録体を提案した。 然し乍ら、かゝるフルオロアルキルカルボン酸
の金属塩を蒸発せしめるには一般に150℃〜350℃
程度の比較的高温に加熱することを要し、熱分解
を発生し、その蒸着膜には潤滑剤として寄与しな
い分解生成物が混入していることがしばしばみら
れることが、その後の検討の結果分つて来た。 本発明は、フルオロアルキルカルボン酸の金属
塩の蒸着膜を、上記の如き分解生成物が混じらな
いより良質の該蒸着膜を磁性薄膜上に形成できる
ようにし耐摩耗性の一層向上した磁気記録体を製
造する方法を提供するもので、アルカリ金属又は
アルカリ土金属の酸化物又は水酸化物とフルオロ
アルキルカルボン酸とを各別に蒸発させ、これら
の蒸気を非磁性基材上に予め形成した磁性薄膜上
において接触反応させ、該磁性薄膜上にその反応
生成物、フルオロアルキルカルボン酸の金属塩の
蒸着薄膜を形成せしめるようにしたことを特徴と
する。 上記の本発明の製造法において、該磁性薄膜上
とは勿論、予め、例えばSiO2,CaO、有機系ポ
リマー等を用いた保護膜を形成してこの膜を介す
る場合をも含む。又上記の接触反応は、必要に応
じ、これらの蒸気が蒸着する過程又は後におい
て、加熱により反応を促進するようにしてもよ
い。而して、磁性薄膜上に、アルカリ金属又はア
ルカリ土金属の蒸着膜とフルオロアルキルカルボ
ン酸の蒸着膜との膜を析出積層させこの状態で相
互に反応させフルオロアルキルカルボン酸の金属
塩を生成せしめるには、前者の膜は2〜20Åの範
囲、後者の膜は50〜500Åの範囲で全体で50〜500
Åの程度と薄いことがその反応生成に好結果が得
られる。 次に本発明の製造法の実施例を添付図面に基き
説明する。 図面は本発明を実施する装置の1例を示し、1
は、真空装置に排気口2を介し接続する真空処理
室。3,4はいづれの方向にも回転可能なローラ
ーを示し、例えばその1方のローラー3をテープ
状の磁気記録体5を巻き付けた巻き解しローラー
3とし、その他方のローラー4を巻き取りローラ
ー4として使用する。該磁気記録体5は、12μm
厚のポリエステルフイルムから成る非磁性基材に
1500Å厚のCo−20Ni−O磁性膜を形成して成り、
常法により作成したもので、これをローラー3に
ロール状に用意し、ローラー3,4の中間に設け
た金属製円胴状キヤン6の周面を介してその他方
のローラー4に巻き付けて張設用意する。該キヤ
ン6は、必要に応じ内部に熱媒を供給され150℃
までの適宜の温度に加熱されるようにつくられて
いる。該キヤン6の最下端には垂直に仕切板7を
設け、その1側にはアルカリ金属又はアルカリ土
金属の水酸化物又は酸化物aを入れたるつぼなど
から成る第1蒸発源8を設け、これを抵抗加熱式
或は電子ビーム加熱式(図示しない)により加熱
し蒸発せしめるようにする。その水酸化物の場合
は、一般に抵抗加熱式を用い、酸化物の場合は電
子ビーム加熱式を用いて蒸発せしめる。又該仕切
板7の他側には、フルオロアルキルカルボン酸b
を入れたるつぼなどから成る第2蒸発源9を設け
る。図示例では、Ta線ヒーターからのふく射熱
により加熱して蒸発させるようにした。10は、
回動キヤン6の下端両側に配置した防着板を示
す。該仕切板7は、固定式か上下動自在の可動式
のいづれでもよい。かくして該仕切板7が図示の
ようにその上端がキヤン6上を移行する磁気テー
プ5面に略近接して設けられたときは、その両側
の第1及び第2蒸発源8,9の蒸気は互に混じる
ことなく、その磁気テープ5の移行方向に従つ
て、その磁性膜上に、先づそのいづれか1方の蒸
着膜を形成し、次でその蒸着膜上に他方の蒸着膜
が形成されその積層膜相互の反応が行なわれるこ
ととなり、その仕切板7を下方に移行させその仕
切を解除するときは、その両側の蒸発源8,9か
らの蒸気は、そのテープ5に蒸着する過程で両者
の反応が行なわれることになる。この場合、両者
の反応を促進するにはキヤン6の加熱により、そ
の熱がテープ5を介して両積層に伝わり反応が促
進される。又、別の加熱手段として、該巻き取り
ローラー3又は4から、蒸着処理した磁気テープ
をはづし、別の真空室内又は大気中でオーブンな
どの加熱器により加熱し反応を促進できる。 上記の装置を使用し、次のように実施する。即
ち、ローラー3より磁気テープ5を巻き解し、回
動キヤン6の周面を介して一定速度で移行させロ
ーラー4に巻き付けるようにし、その移行途上に
おいて、その仕切板7の左側において、その下向
きの磁性膜面に蒸発源8からの蒸気aを蒸着せし
めその第1蒸着層を形成せしめ、次でこれが仕切
板7の右側に移行したとき、蒸発源9からそのフ
ルオロアルキルカルボン酸の種類に応じ約60〜
150℃に加熱してその蒸気bをその第1蒸着層の
上面に蒸着せしめてその第2蒸着層を重合形成す
る。然るときは、この両積層間に反応がおこり、
その反応生成物であるフルオロアルキルカルボン
酸の金属塩の薄膜が磁性膜を被覆結着したものと
なりローラー4に巻き取り、製造を完了する。
尚、この間、特に反応の比較的おそいアルカリ土
金属の酸化物の蒸着層の場合は、キヤン6を加熱
しその磁気テープ5の磁性膜の温度を適宜の温度
に昇温しておくことが好ましい。加熱の場合、反
応生成物の熱分解が生じない。好ましくは150℃
を越えない温度に保持することが好ましい。又、
その両種蒸気a,bの蒸着層が前記と反対でも同
様の良好な結果が得られる。この場合は、勿論、
磁気テープの送行方向を前記とは逆にする。尚、
図示しないが、かゝる2種の蒸着層の積層手段
は、各別の真空蒸発処理室を設け、順次蒸着させ
たり、同一の室内で先づ1種の蒸着を行ない次で
その蒸着テープを反対方向に移行させて次の他種
の蒸着を行なうようにする等任意である。 上記の装置と方法を使用して下記表に示す如
き、各種の試料No.1〜No.9を得た。比較のため、
フルオロアルキルカルボン酸の金属塩を直接蒸発
原料とした場合の参考例として試料No.10,No.11を
作成した。この場合は、第2蒸発源9のみを使用
した。 これらの試料の耐摩耗性につき、ビデオテープ
として使用した場合の、実用上重要なスチル再生
寿命を測定した。その結果を下記表に示す。
The present invention relates to a method for manufacturing a wear-resistant magnetic recording medium. Conventionally, in order to impart wear resistance to the magnetic thin film of a magnetic recording medium, a lubricant was added on the magnetic thin film.
Fluorine-based lubricants such as fluoroalkylcarboxylic acids, their metal salts, esters, and amides have been dissolved in solvents, and coatings have been formed by coating, dipping, etc.; however, the coatings are relatively easy to peel off. It had disadvantages such as being easy to use. In order to improve this drawback, the applicant previously proposed in Japanese Patent Application Laid-Open No. 59-213031 a wear-resistant film in which an alkali metal salt or alkaline earth metal salt of fluoroalkylcarboxylic acid was evaporated and formed on a magnetic thin film. proposed a magnetic recording medium. However, in order to evaporate such metal salts of fluoroalkyl carboxylic acids, the temperature is generally 150°C to 350°C.
As a result of subsequent studies, it was found that thermal decomposition occurs, and the deposited film often contains decomposition products that do not contribute as lubricants. I've come to understand. The present invention enables the formation of a vapor-deposited film of a metal salt of fluoroalkylcarboxylic acid on a magnetic thin film, which is free from decomposition products such as those described above, and has further improved wear resistance. This provides a method for producing a magnetic thin film in which an alkali metal or alkaline earth metal oxide or hydroxide and a fluoroalkyl carboxylic acid are separately evaporated, and these vapors are pre-formed on a non-magnetic substrate. A contact reaction is carried out on the magnetic thin film, and a vapor-deposited thin film of the reaction product, a metal salt of fluoroalkylcarboxylic acid, is formed on the magnetic thin film. In the above-mentioned manufacturing method of the present invention, it is of course possible to form a protective film using SiO 2 , CaO, an organic polymer, etc. in advance on the magnetic thin film, and to pass the magnetic film through this film. Further, the above-mentioned catalytic reaction may be accelerated by heating, if necessary, during or after the vapor deposition process. Then, a vapor-deposited film of an alkali metal or alkaline earth metal and a vapor-deposited film of a fluoroalkylcarboxylic acid are deposited and laminated on the magnetic thin film, and in this state they react with each other to generate a metal salt of the fluoroalkylcarboxylic acid. The former film has a thickness in the range of 2 to 20 Å, and the latter film has a thickness in the range of 50 to 500 Å, for a total of 50 to 500 Å.
Good results can be obtained in reaction production by the thinness of the film, which is about .ANG. Next, an embodiment of the manufacturing method of the present invention will be described based on the accompanying drawings. The drawings show one example of an apparatus for carrying out the invention, 1
is a vacuum processing chamber connected to a vacuum device via an exhaust port 2; 3 and 4 indicate rollers that can rotate in any direction; for example, one of the rollers 3 is an unwinding roller 3 around which a tape-shaped magnetic recording material 5 is wound, and the other roller 4 is a winding roller. Use as 4. The magnetic recording body 5 has a thickness of 12 μm.
Non-magnetic base material made of thick polyester film
It consists of a 1500 Å thick Co-20Ni-O magnetic film,
This is prepared by a conventional method, and is prepared in a roll shape around a roller 3, and then wrapped around the other roller 4 through the circumferential surface of a metal cylindrical can 6 provided between the rollers 3 and 4, and stretched. Prepare. The can 6 is heated to 150°C by being supplied with a heating medium as necessary.
It is designed to be heated to an appropriate temperature. A partition plate 7 is vertically provided at the bottom end of the can 6, and a first evaporation source 8 consisting of a crucible or the like containing an alkali metal or alkaline earth metal hydroxide or oxide a is provided on one side of the partition plate 7. This is heated and evaporated using a resistance heating method or an electron beam heating method (not shown). In the case of hydroxide, a resistance heating method is generally used, and in the case of an oxide, an electron beam heating method is used to evaporate. Further, on the other side of the partition plate 7, fluoroalkylcarboxylic acid b
A second evaporation source 9 is provided, such as a crucible containing . In the illustrated example, the material is heated and evaporated by radiant heat from a Ta-ray heater. 10 is
The attachment prevention plates arranged on both sides of the lower end of the rotating can 6 are shown. The partition plate 7 may be either a fixed type or a movable type that can move up and down. Thus, when the partition plate 7 is provided with its upper end substantially close to the surface of the magnetic tape 5 moving on the can 6 as shown in the figure, the vapor from the first and second evaporation sources 8 and 9 on both sides of the partition plate 7 is One of the deposited films is first formed on the magnetic film, and then the other deposited film is formed on the magnetic film, without mixing with each other, in the direction of movement of the magnetic tape 5. A mutual reaction occurs between the laminated films, and when the partition plate 7 is moved downward and the partition is released, the vapor from the evaporation sources 8 and 9 on both sides is evaporated onto the tape 5. Both reactions will take place. In this case, to promote the reaction between the two, the can 6 is heated, and the heat is transmitted to both laminated layers via the tape 5, thereby promoting the reaction. As another heating means, the vapor-deposited magnetic tape can be removed from the take-up roller 3 or 4 and heated with a heater such as an oven in a separate vacuum chamber or in the atmosphere to promote the reaction. Using the above apparatus, carry out as follows. That is, the magnetic tape 5 is unwound from the roller 3 and moved at a constant speed through the circumferential surface of the rotary can 6 so as to be wound around the roller 4, and in the middle of the movement, the downward direction is The vapor a from the evaporation source 8 is evaporated onto the magnetic film surface of the evaporation source 8 to form the first evaporation layer, and then when it moves to the right side of the partition plate 7, the vapor a is evaporated from the evaporation source 9 according to the type of the fluoroalkyl carboxylic acid. Approximately 60~
The vapor b is deposited on the upper surface of the first vapor deposited layer by heating to 150° C. to polymerize and form the second vapor deposited layer. When this happens, a reaction occurs between these two layers,
A thin film of the metal salt of fluoroalkylcarboxylic acid, which is the reaction product, coats and binds the magnetic film and is wound around the roller 4 to complete the production.
During this time, it is preferable to heat the can 6 to raise the temperature of the magnetic film of the magnetic tape 5 to an appropriate temperature, especially in the case of a vapor-deposited layer of an oxide of an alkaline earth metal, which reacts relatively slowly. . In the case of heating, no thermal decomposition of the reaction products occurs. Preferably 150℃
It is preferable to maintain the temperature at a temperature not exceeding . or,
Similar good results can be obtained even if the vapor deposition layers of both types of vapors a and b are opposite to those described above. In this case, of course,
The feeding direction of the magnetic tape is reversed from the above. still,
Although not shown, the means for laminating two types of vapor deposition layers can be to provide separate vacuum evaporation processing chambers and perform the vapor deposition sequentially, or to first perform one type of vapor deposition in the same chamber and then apply the vapor deposition tape. It is optional, such as moving in the opposite direction to perform the next vapor deposition of another type. Using the above apparatus and method, various samples No. 1 to No. 9 were obtained as shown in the table below. For comparison,
Samples No. 10 and No. 11 were prepared as reference examples when metal salts of fluoroalkyl carboxylic acids were used as raw materials for direct evaporation. In this case, only the second evaporation source 9 was used. Regarding the abrasion resistance of these samples, the practically important still playback life when used as a videotape was measured. The results are shown in the table below.

【表】 上記表から明らかなように、本発明によるフル
オロアルキルカルボン酸の金属塩をもつ磁気記録
体は、先に提案のフルオロアルキルカルボン酸の
金属塩を蒸発させこれを蒸着して製造する磁気記
録体に比しスチル再生寿命を著しく向上したもの
が得られる。尚本発明によるその反応生成膜の厚
さは300Å以下であることが好ましい。 このように本発明によるときは、アルカリ金属
又はアルカリ土金属の酸化物又は水酸化物とフル
オロアルキルカルボン酸とを蒸発させ、その両者
を反応を介して磁性膜上にその反応生成物である
フルオロアルキルカルボン酸の金属塩を形成する
ようにしたので、直接フルオロアルキルカルボン
酸の金属塩を蒸発させこれを蒸着せしめるように
したものに比し、著しく耐摩耗性を向上させるこ
とができる効果を有する。
[Table] As is clear from the above table, the magnetic recording material having a metal salt of fluoroalkylcarboxylic acid according to the present invention is manufactured by first evaporating the proposed metal salt of fluoroalkylcarboxylic acid and depositing the same. A product with significantly improved still playback life compared to a recording medium can be obtained. The thickness of the reaction product film according to the present invention is preferably 300 Å or less. As described above, according to the present invention, an oxide or hydroxide of an alkali metal or an alkaline earth metal and a fluoroalkylcarboxylic acid are evaporated, and the reaction product fluorine is deposited on the magnetic film through a reaction between the two. Since a metal salt of an alkylcarboxylic acid is formed, it has the effect of significantly improving wear resistance compared to a method in which a metal salt of a fluoroalkylcarboxylic acid is directly evaporated and deposited. .

【図面の簡単な説明】[Brief explanation of drawings]

図面は本発明を実施する装置の1例の断面図を
示す。 1……真空処理室、3,4……ローラー、5…
…磁気記録体、6……キヤン、7……仕切板、8
……第1蒸発源、9……第2蒸発源、a……アル
カリ金属又はアルカリ土金属の酸化物又は水酸化
物、b……フルオロアルキルカルボン酸。
The drawing shows a cross-sectional view of an example of an apparatus for carrying out the invention. 1... Vacuum processing chamber, 3, 4... Roller, 5...
...magnetic recording medium, 6...can, 7...partition plate, 8
...First evaporation source, 9... Second evaporation source, a... Oxide or hydroxide of an alkali metal or alkaline earth metal, b... Fluoroalkylcarboxylic acid.

Claims (1)

【特許請求の範囲】[Claims] 1 アルカリ金属又はアルカリ土金属の酸化物又
は水酸化物とフルオロアルキルカルボン酸とを各
別に蒸発させ、これらの蒸気を非磁性基材上に予
め形成した磁性薄膜上において接触反応させ、該
磁性薄膜上にその反応生成物、フルオロアルキル
カルボン酸の金属塩の薄膜を形成せしめるように
したことを特徴とする耐摩耗性磁気記録体の製造
法。
1. The oxide or hydroxide of an alkali metal or alkaline earth metal and the fluoroalkyl carboxylic acid are evaporated separately, and these vapors are brought into contact reaction on a magnetic thin film previously formed on a non-magnetic substrate, and the magnetic thin film is A method for producing a wear-resistant magnetic recording material, characterized in that a thin film of a metal salt of fluoroalkylcarboxylic acid, which is a reaction product thereof, is formed thereon.
JP12756684A 1984-06-22 1984-06-22 Manufacture of abrasion-resistant magnetic recording medium Granted JPS618731A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12756684A JPS618731A (en) 1984-06-22 1984-06-22 Manufacture of abrasion-resistant magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12756684A JPS618731A (en) 1984-06-22 1984-06-22 Manufacture of abrasion-resistant magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS618731A JPS618731A (en) 1986-01-16
JPH0343689B2 true JPH0343689B2 (en) 1991-07-03

Family

ID=14963206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12756684A Granted JPS618731A (en) 1984-06-22 1984-06-22 Manufacture of abrasion-resistant magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS618731A (en)

Also Published As

Publication number Publication date
JPS618731A (en) 1986-01-16

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