JPH0343652U - - Google Patents
Info
- Publication number
- JPH0343652U JPH0343652U JP10366289U JP10366289U JPH0343652U JP H0343652 U JPH0343652 U JP H0343652U JP 10366289 U JP10366289 U JP 10366289U JP 10366289 U JP10366289 U JP 10366289U JP H0343652 U JPH0343652 U JP H0343652U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- layers
- transparent film
- attached
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10366289U JPH0343652U (fr) | 1989-09-04 | 1989-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10366289U JPH0343652U (fr) | 1989-09-04 | 1989-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0343652U true JPH0343652U (fr) | 1991-04-24 |
Family
ID=31652485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10366289U Pending JPH0343652U (fr) | 1989-09-04 | 1989-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343652U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016072149A1 (fr) * | 2014-11-04 | 2016-05-12 | 日本軽金属株式会社 | Cadre de support de pellicule et procédé de production |
| KR20220056609A (ko) * | 2020-10-28 | 2022-05-06 | 주식회사 에프에스티 | 극자외선 리소그라피용 펠리클 프레임 및 그 제조방법 |
-
1989
- 1989-09-04 JP JP10366289U patent/JPH0343652U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016072149A1 (fr) * | 2014-11-04 | 2016-05-12 | 日本軽金属株式会社 | Cadre de support de pellicule et procédé de production |
| KR20170080582A (ko) * | 2014-11-04 | 2017-07-10 | 니폰게이긴조쿠가부시키가이샤 | 펠리클용 지지 프레임 및 제조 방법 |
| US10642151B2 (en) | 2014-11-04 | 2020-05-05 | Nippon Light Metal Company, Ltd. | Pellicle support frame and production method |
| KR20220056609A (ko) * | 2020-10-28 | 2022-05-06 | 주식회사 에프에스티 | 극자외선 리소그라피용 펠리클 프레임 및 그 제조방법 |