JPH0343244U - - Google Patents
Info
- Publication number
- JPH0343244U JPH0343244U JP10447989U JP10447989U JPH0343244U JP H0343244 U JPH0343244 U JP H0343244U JP 10447989 U JP10447989 U JP 10447989U JP 10447989 U JP10447989 U JP 10447989U JP H0343244 U JPH0343244 U JP H0343244U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- insulator
- fixing flange
- head fixing
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10447989U JPH0343244U (pt) | 1989-09-06 | 1989-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10447989U JPH0343244U (pt) | 1989-09-06 | 1989-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0343244U true JPH0343244U (pt) | 1991-04-23 |
Family
ID=31653274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10447989U Pending JPH0343244U (pt) | 1989-09-06 | 1989-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343244U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160068637A (ko) * | 2014-12-05 | 2016-06-15 | 닛신 이온기기 가부시기가이샤 | 이온원, 지지대, 현수 기구, 이온원 반송 시스템 및 이온원 반송 방법 |
-
1989
- 1989-09-06 JP JP10447989U patent/JPH0343244U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160068637A (ko) * | 2014-12-05 | 2016-06-15 | 닛신 이온기기 가부시기가이샤 | 이온원, 지지대, 현수 기구, 이온원 반송 시스템 및 이온원 반송 방법 |