JPH0342708B2 - - Google Patents
Info
- Publication number
- JPH0342708B2 JPH0342708B2 JP63101985A JP10198588A JPH0342708B2 JP H0342708 B2 JPH0342708 B2 JP H0342708B2 JP 63101985 A JP63101985 A JP 63101985A JP 10198588 A JP10198588 A JP 10198588A JP H0342708 B2 JPH0342708 B2 JP H0342708B2
- Authority
- JP
- Japan
- Prior art keywords
- state laser
- solid
- slab
- rod
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005284 excitation Effects 0.000 claims description 13
- 239000007787 solid Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 2
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 1
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/0602—Crystal lasers or glass lasers
- H01S3/0606—Crystal lasers or glass lasers with polygonal cross-section, e.g. slab, prism
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08072—Thermal lensing or thermally induced birefringence; Compensation thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08095—Zig-zag travelling beam through the active medium
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、レーザ加工などに用いられる固体レ
ーザを発振させる発振材料素子として、スラブ状
の固体素子を用いた固体レーザ装置に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a solid-state laser device that uses a slab-shaped solid-state element as an oscillation material element that oscillates a solid-state laser used in laser processing and the like.
従来、大出力用の固体レーザ素子として、イツ
トリウム・アルミニユーム・ガーネツト(以上
YAGと略す。)、ガラスなどを材料とする断面円
形の両端面を研磨した反射面を持つ棒状のロツド
型と呼ばれるものが用いられている。
Conventionally, yttrium aluminum garnet (or higher) has been used as a solid-state laser element for high output.
It is abbreviated as YAG. ), a so-called rod type is used, which is made of a material such as glass and has a circular cross section with reflective surfaces polished on both ends.
この種の固体レーザ素子を、励起光がロツドに
集光されるように設計された集光器に収納し、ラ
ンプとロツドの発熱を冷却しながらレーザ発振さ
せる。しかしロツド型においては、励起光による
温度分布がロツド内部に熱的、光学的な変形を生
じさせて、光の質を悪くしたり、クラツクを発生
させたりする。そのため、一般にロツド型の場
合、ロツド1本で得られる最大レーザ出力は
400W程度とされている。 This type of solid-state laser element is housed in a condenser designed to condense excitation light onto the rod, and the laser oscillates while cooling the heat generated by the lamp and rod. However, in the rod type, the temperature distribution caused by the excitation light causes thermal and optical deformation inside the rod, resulting in poor light quality and cracks. Therefore, in the case of a rod type, the maximum laser output that can be obtained with one rod is generally
It is said to be around 400W.
そのため、現在、熱レンズ効果の小さいスラブ
型の固体レーザ素子が大出力用固体装置に用いら
れ始めている。 Therefore, slab-type solid-state laser elements with a small thermal lens effect are now being used in high-output solid-state devices.
ロツド型固体レーザ素子を用いた固体レーザ装
置によると、ロツド型の励起ランプ光を円筒楕型
集光器で固体レーザに集光させる方式であるた
め、励起光はすべてロツド側面に垂直入射し、ロ
ツド側面での反射損失が非常に少ない。
According to a solid-state laser device using a rod-type solid-state laser element, the rod-type excitation lamp light is focused onto the solid-state laser using a cylindrical elliptical condenser, so all the excitation light is perpendicularly incident on the side of the rod. Reflection loss on the rod side is extremely low.
一方、固体レーザ素子がスラブ型の場合には、
ほとんどの励起光が鏡面研磨された面に対して角
度をもつて入射するため、反射光が増えて反射損
失が大きくなるという問題がある。ランプ軸に垂
直な方向の光に関しては、集光器の収率を最適に
設計することで、その問題をある程度改善され
る。しかしランプ軸方向についてはその問題を改
善できない。そのためにスラブ型固体レーザの場
合、ロツド型固体レーザ装置に比べてレーザ発振
効率が低いという欠点があつた。 On the other hand, if the solid-state laser device is a slab type,
Since most of the excitation light enters the mirror-polished surface at an angle, there is a problem in that the amount of reflected light increases and reflection loss increases. For light in the direction perpendicular to the lamp axis, the problem can be alleviated to some extent by optimally designing the concentrator yield. However, the problem cannot be improved in the direction of the lamp axis. For this reason, slab-type solid-state lasers have the disadvantage of lower laser oscillation efficiency than rod-type solid-state laser devices.
それ故に本発明の課題は、レーザ発振効率が向
上したスラブ型の固体レーザ装置を提供すること
にある。 Therefore, an object of the present invention is to provide a slab-type solid-state laser device with improved laser oscillation efficiency.
本発明によれば、複数の磨りガラス状のV形溝
を有するスラブ型固体レーザ素子と、上記V形溝
に配した励起用ランプと、上記V型溝を覆つた反
射板とを含むことを特徴とするスラブ型の固体レ
ーザ装置が得られる。
According to the present invention, the present invention includes a slab-type solid-state laser element having a plurality of frosted glass-like V-shaped grooves, an excitation lamp disposed in the V-shaped grooves, and a reflection plate covering the V-shaped grooves. A slab-type solid-state laser device with characteristics can be obtained.
本発明の固体レーザ装置によると、励起用ラン
プから発した励起光は磨りガラス状のV形溝面か
ら固体レーザ素子に散乱入射し、鏡面に入射する
場合に比べて一様に固体レーザ素子内部に入射す
る。散乱反射した励起光は、V形溝を覆つている
反射板で反射された再度磨りガラス状のV形溝面
に入射する。
According to the solid-state laser device of the present invention, the excitation light emitted from the excitation lamp is scattered and incident on the solid-state laser element from the ground glass-like V-groove surface, and is uniformly distributed inside the solid-state laser element compared to when it is incident on a mirror surface. incident on . The scattered and reflected excitation light is reflected by the reflection plate covering the V-shaped groove and enters the frosted glass-like V-shaped groove surface again.
本発明の固体レーザ装置について実施例を挙
げ、図面を参照して説明する。まず、本発明によ
るレーザに適用されるスラブ型固体レーザについ
て第1図の縦断正面図を参照して説明する。スラ
ブ型固体レーザ素子1は、V溝4を有する。V溝
が無い場合にこの部分でジグザグパスするレーザ
光は、出射端面6で全反射を起すため、レーザ発
振にまつたく寄与しない。したがつてV溝によつ
てレーザ発振効率が低下することはない。
Embodiments of the solid-state laser device of the present invention will be described with reference to the drawings. First, a slab-type solid-state laser applied to the laser according to the present invention will be described with reference to the longitudinal sectional front view of FIG. The slab-type solid-state laser device 1 has a V-groove 4 . If there is no V-groove, the laser light that passes in a zigzag manner in this portion undergoes total reflection at the output end face 6, and therefore does not contribute significantly to laser oscillation. Therefore, the V-groove does not reduce the laser oscillation efficiency.
V溝4にはランプ2が配されている。さらにV
溝4は反射板3にて覆われている。V溝の面は磨
りガラス状になつているため、スラブ型固体レー
ザ素子1がランプ2によつて一様に励起される。
反射板3は、ランプ2から出る励起光を反射さ
せ、スラブ型固体レーザ素子1に入射させる。誘
鎮放出によるレーザ光9は、くり返し面5をジグ
ザグパスし、反射ミラー8と出射ミラー7間でく
り返し増幅して、レーザ発振を行なう。その際、
レーザ光がジグザグパスすることによつて熱レン
ズ効果が無くなるため、質の良いレーザ光が得ら
れる。 A lamp 2 is arranged in the V-groove 4. Further V
The groove 4 is covered with a reflective plate 3. Since the surface of the V-groove is frosted glass-like, the slab-type solid-state laser element 1 is uniformly excited by the lamp 2.
The reflecting plate 3 reflects the excitation light emitted from the lamp 2 and makes it incident on the slab-type solid-state laser device 1 . Laser light 9 caused by induced emission passes through the repeating surface 5 in a zigzag pattern, is repeatedly amplified between the reflection mirror 8 and the output mirror 7, and performs laser oscillation. that time,
Since the laser beam passes in a zigzag manner, the thermal lens effect is eliminated, so a high quality laser beam can be obtained.
また励起ランプ2及びスラブ型固体レーザ素子
1は冷却媒質(図示せず)によつて冷却され熱的
歪みが生じないようにしてある。このスラブ型固
体レーザ素子1はV溝4を有しているため、素子
内部をより効果的に冷却でき、したがつてクラツ
ツクの発生を押えることができる。さらに集光器
の必要が無く、ランプの本数に製約が無いという
利点もある。 Further, the excitation lamp 2 and the slab-type solid-state laser element 1 are cooled by a cooling medium (not shown) to prevent thermal distortion from occurring. Since this slab-type solid-state laser device 1 has the V-groove 4, the inside of the device can be cooled more effectively, and the occurrence of cracks can therefore be suppressed. Another advantage is that there is no need for a concentrator and there is no restriction on the number of lamps.
以上述べたように、本発明によれば、レーザ発
振効率が向上し、1個のレーザ素子でkW級のレ
ーザ光が得られるような固体レーザ装置を提供す
ることができる。
As described above, according to the present invention, it is possible to provide a solid-state laser device in which the laser oscillation efficiency is improved and a kW class laser beam can be obtained with one laser element.
第1図は本発明の一実施例によるスラブ型固体
レーザ装置の構成図である。
1はスラブ型固体レーザ素子、2は励起ラン
プ、3は反射板、4はV溝、5はくり返し反射
面、6は出射面、7は出射ミラー、8は反射ミラ
ー、9はレーザ光である。
FIG. 1 is a block diagram of a slab-type solid-state laser device according to an embodiment of the present invention. 1 is a slab-type solid-state laser element, 2 is an excitation lamp, 3 is a reflection plate, 4 is a V-groove, 5 is a repeating reflection surface, 6 is an emission surface, 7 is an emission mirror, 8 is a reflection mirror, and 9 is a laser beam. .
Claims (1)
型固体レーザ素子と、上記V形溝に配した励起用
ランプと、上記V型溝を覆つた反射板とを含むこ
とを特徴とするスラブ型の固体レーザ装置。1. A slab type solid-state laser element having a plurality of frosted glass-like V-shaped grooves, an excitation lamp disposed in the V-shaped grooves, and a reflecting plate covering the V-shaped grooves. solid state laser equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63101985A JPH01273376A (en) | 1988-04-25 | 1988-04-25 | Solid-state laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63101985A JPH01273376A (en) | 1988-04-25 | 1988-04-25 | Solid-state laser device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01273376A JPH01273376A (en) | 1989-11-01 |
JPH0342708B2 true JPH0342708B2 (en) | 1991-06-28 |
Family
ID=14315139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63101985A Granted JPH01273376A (en) | 1988-04-25 | 1988-04-25 | Solid-state laser device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01273376A (en) |
-
1988
- 1988-04-25 JP JP63101985A patent/JPH01273376A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH01273376A (en) | 1989-11-01 |
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