JPH0342621Y2 - - Google Patents
Info
- Publication number
- JPH0342621Y2 JPH0342621Y2 JP1984135660U JP13566084U JPH0342621Y2 JP H0342621 Y2 JPH0342621 Y2 JP H0342621Y2 JP 1984135660 U JP1984135660 U JP 1984135660U JP 13566084 U JP13566084 U JP 13566084U JP H0342621 Y2 JPH0342621 Y2 JP H0342621Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- pole piece
- electric field
- analysis
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 22
- 230000005684 electric field Effects 0.000 claims description 20
- 125000006850 spacer group Chemical group 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は、イオン源と電場と磁場と検出系より
なる質量分析装置において、電場と検出系との間
に位置する質量分析装置の磁場装置に関する。[Detailed description of the invention] [Industrial application field] The present invention is a mass spectrometer consisting of an ion source, an electric field, a magnetic field, and a detection system, in which the magnetic field device of the mass spectrometer is located between the electric field and the detection system. Regarding.
第３図は従来の二重収束質量分析装置の概略構
成を示す図であり、１はイオン源、２は主スリツ
ト、３は電場、４は磁場、５はコレクタ・スリツ
トをそれぞれ示している。第３図図示の質量分析
装置では、まず試料がイオン源１でイオン化され
る。そしてそのイオン化されたビームが加速され
て電場３を通してエネルギー補正され、次いで、
磁場４を通して質量数毎に分離されてコレクタ・
スリツト５に捕捉される。
FIG. 3 is a diagram showing a schematic configuration of a conventional dual focus mass spectrometer, in which 1 indicates an ion source, 2 a main slit, 3 an electric field, 4 a magnetic field, and 5 a collector slit. In the mass spectrometer shown in FIG. 3, a sample is first ionized by the ion source 1. The ionized beam is then accelerated and energy corrected through an electric field 3, and then
It is separated by mass number through the magnetic field 4 and sent to the collector.
It is captured in the slit 5.
従来、上記の二重収束系を実現させるために
は、第４図および第５図に示すようにビームの通
路を形成していた。第４図は従来装置の磁場調整
を説明する図、第５図は第４図におけるＢ−
B′線による断面を示す図である。図において、
１０は電場ケース、１１及び１２はベローズ、１
３と２４はヨーク、１４はポールピース兼分析通
路、１５は検出系ハウジング、２１は上極ポール
ピース、２２は下極ポールピース、２３はスペー
サ、２５は調整台、２６はハンドル、２７は固定
部、２８は据付ボルト、２９はベース、３０は調
整部材をそれぞれ示している。磁路は、上極ポー
ルピース２１、下極ポールピース２２及びスペー
サ２３によつて形成され、ポールピース兼分析通
路１４に磁場を生じさせるようにしている。一
方、固定部２７は据付ボルト２８によつてベース
２９に固定され、調整台２５には、図示されてい
ないがＸ方向へも移動できるように例えばラツク
歯車機構が設けられる。そしてこの固定部２７を
貫通する調整部材３０及びラツク歯車機構からな
るＸ，Ｙ方向調整機構を用いて磁場の位置調整を
行うように構成されている。このように構成する
と、イオン・ビームがコレクタ位置に的確に二重
収束するように、つまりイオン・ビームが空間的
広がり、エネルギーの双方において所定の位置に
収束するように磁場の位置を調整することがで
き、高感度、高分解能測定を行うことができる。 Conventionally, in order to realize the above double focusing system, a beam path was formed as shown in FIGS. 4 and 5. Figure 4 is a diagram explaining the magnetic field adjustment of the conventional device, and Figure 5 is B- in Figure 4.
FIG. 3 is a diagram showing a cross section taken along line B'. In the figure,
10 is an electric field case, 11 and 12 are bellows, 1
3 and 24 are yokes, 14 is a pole piece/analysis passage, 15 is a detection system housing, 21 is an upper pole piece, 22 is a lower pole piece, 23 is a spacer, 25 is an adjustment table, 26 is a handle, and 27 is a fixed 28 is a mounting bolt, 29 is a base, and 30 is an adjustment member. The magnetic path is formed by the upper pole piece 21, the lower pole piece 22, and the spacer 23, and is configured to generate a magnetic field in the pole piece/analysis channel 14. On the other hand, the fixing part 27 is fixed to the base 29 by a mounting bolt 28, and the adjustment table 25 is provided with, for example, a rack gear mechanism, although not shown, so that it can also move in the X direction. The position of the magnetic field is adjusted using an adjustment member 30 passing through the fixed portion 27 and an X- and Y-direction adjustment mechanism consisting of a rack gear mechanism. With this configuration, the position of the magnetic field can be adjusted so that the ion beam is accurately double-focused at the collector position, that is, the ion beam is focused at a predetermined position in terms of both spatial spread and energy. It is possible to perform high-sensitivity, high-resolution measurements.
ポールピース兼分析通路１４は真空状態にされ
ることから、従来の磁場装置では、上極ポールピ
ース２１、スペーサ２３、下極ポールピース２２
からなる磁場のそれぞれの部材間を溶接またはＯ
リング・シールにより密封している。そして、こ
のポールピース兼分析通路１４の位置を調整する
ために、磁場ヨーク２４と上極ポールピース２１
と下極ポールピース２２とを一体化してＸ，Ｙ方
向に調整する機構を設けていた。 Since the pole piece/analysis passageway 14 is kept in a vacuum state, in the conventional magnetic field apparatus, the upper pole piece 21, the spacer 23, and the lower pole piece 22
Welding or O
Sealed with a ring seal. In order to adjust the position of this pole piece/analysis passage 14, the magnetic field yoke 24 and the upper pole piece 21 are
The lower pole piece 22 is integrated with a mechanism for adjustment in the X and Y directions.
しかしながら、従来の磁場装置では、ポールピ
ースおよびスペーサによりイオン・ビームの通過
する真空通路を兼ねた構造となつているため磁場
と隣り合う電場ケース１０および検出系ハウジン
グ１５とのそれぞれの間はベローズなどの可撓性
の接続管１１，１２で接続されるように構成され
ていた。このため磁場通路１４をＸ，Ｙ方向に動
かし過ぎてベローズなどの可撓性の接続管１１，
１２が変形したり破損する問題が生じていた。
However, in the conventional magnetic field device, since the pole piece and the spacer have a structure that also serves as a vacuum passage through which the ion beam passes, there is a bellows, etc. between the magnetic field and the adjacent electric field case 10 and detection system housing 15. They were configured to be connected by flexible connecting pipes 11 and 12. Therefore, if the magnetic field path 14 is moved too much in the X and Y directions, the flexible connecting pipe 11 such as a bellows
12 was deformed or damaged.
また、調整に要する力としては、磁場装置を動
かすだけでなく、前記のベローズを圧縮したりす
る力も加わり、かなりの力が必要であつた。更
に、調整の方向はＸ，Ｙの二次元となり、調整自
体も面倒であり、時間を要するという問題があつ
た。 Further, the force required for adjustment is not only to move the magnetic field device but also to compress the bellows, and a considerable amount of force is required. Furthermore, the adjustment direction is two-dimensional, X and Y, and the adjustment itself is troublesome and time-consuming.
本考案は、上記の問題を解決するために、磁場
と接続されるベローズなどの接続管の変形、破損
を防止し、磁場の位置調整を容易にすると供に的
確に行い得る質量分析装置の磁場装置を提供する
ことを目的とする。 In order to solve the above problems, the present invention prevents the deformation and damage of connecting tubes such as bellows that are connected to the magnetic field, and makes it possible to easily and accurately adjust the magnetic field position of the mass spectrometer. The purpose is to provide equipment.
そのために本考案は、イオン源と電場と磁場と
検出系により構成する質量分析装置において、上
下のポールピースと左右のスペーサにより磁場空
隙を形成し、ポールピースの外側にヨークを設け
ると共に磁場空隙を移動する磁場移動手段を設
け、分析管を一方は電場ケーシングに固定して磁
場空隙に貫挿し他方は可撓性の接続管を介して検
出ハウジングに接続することによつて、分析管を
電場ケーシングに固定したまま磁場空隙及び検出
ハウジングが移動できるように構成したことを特
徴とするものである。
To this end, in the present invention, in a mass spectrometer consisting of an ion source, an electric field, a magnetic field, and a detection system, a magnetic field gap is formed by upper and lower pole pieces and left and right spacers, and a yoke is provided on the outside of the pole piece. The analysis tube is fixed to the electric field casing by providing a moving magnetic field moving means, and fixing the analysis tube to the electric field casing on one side and penetrating the magnetic field gap, and connecting the other side to the detection housing via a flexible connecting tube. The present invention is characterized in that the magnetic field gap and the detection housing are configured to be movable while being fixed to the magnetic field gap and the detection housing.
本考案の質量分析装置の磁場装置では、分析管
を電場ケーシングに固定して上下のポールピース
及び左右のスペーサで形成する磁場空隙に貫挿
し、分析管の先端部を可撓性の接続管で検出ハウ
ジングい接続するので、分析管を固定したまま磁
場移動手段により磁場空隙を移動させることがで
き、さらに、可撓性の接続管で検出ハウジングに
接続しているので、磁場空隙の移動とは別に検出
ハウジングも移動することができる。したがつ
て、両者の移動を組み合わせ、Ｙ方向を磁場空隙
で移動し、Ｘ方向を検出ハウジングで移動するこ
とによつて磁場の調整を行うことができるので、
磁場移動手段による調整を単純化することができ
る。
In the magnetic field device of the mass spectrometer of the present invention, the analysis tube is fixed to the electric field casing and inserted into the magnetic field gap formed by the upper and lower pole pieces and the left and right spacers, and the tip of the analysis tube is connected with a flexible connecting tube. Since the detection housing is connected to the detection housing, the magnetic field gap can be moved by the magnetic field moving means while the analysis tube is fixed.Furthermore, since it is connected to the detection housing with a flexible connecting tube, the magnetic field gap can be moved. Separately, the detection housing can also be moved. Therefore, the magnetic field can be adjusted by combining both movements, moving in the Y direction with the magnetic field gap and moving in the X direction with the detection housing.
Adjustment by the magnetic field moving means can be simplified.
以下、実施例を図面を参照しつつ説明する。 Examples will be described below with reference to the drawings.
第１図は本考案に係る質量分析装置の磁場装置
の要部を説明する図、第２図は第１図におけるＡ
−A′線断面を示す図である。第１図および第２
図において、従来の磁場装置と相違する点は電場
ケーシング１０に分析管４０を固定し、その分析
管４０の先端と検出系ハウジング１５との間には
ベローズなどの可撓性の接続管１２を設けるよう
にすると共に、上極ポールピース２１、スペーサ
２３、下極ポールピース２２で囲まれる空隙部３
２を設けて、ここに分析管４０を貫挿している点
である。なお、分析管４０は、空隙部３２の中央
を通り調整機構３０によるＹ方向の調整時にも支
障がないように配置される。その他の個所につい
ては従来の磁場装置と同様であり、説明が重複す
るので省略する。 FIG. 1 is a diagram explaining the main parts of the magnetic field device of the mass spectrometer according to the present invention, and FIG. 2 is a diagram showing the A in FIG. 1.
It is a diagram showing a cross section taken along the line -A'. Figures 1 and 2
In the figure, the difference from the conventional magnetic field device is that an analysis tube 40 is fixed to an electric field casing 10, and a flexible connecting tube 12 such as a bellows is connected between the tip of the analysis tube 40 and the detection system housing 15. In addition, a cavity 3 surrounded by the upper pole piece 21, the spacer 23, and the lower pole piece 22 is provided.
2 is provided, and the analysis tube 40 is inserted therethrough. Note that the analysis tube 40 is arranged so as to pass through the center of the cavity 32 so that there is no problem during adjustment in the Y direction by the adjustment mechanism 30. The other parts are the same as those of the conventional magnetic field device, and the explanation will be omitted since it will be redundant.
本考案の磁場装置における分析通路は、上述の
如く今迄のようにポールピースと一体でなく分離
し、電場ケーシング１０に固定されて作られてい
るため、上極ポールピース２１、スペーサ２３、
下極ポールピース２２、ヨーク２４から成る本体
部２０と調整台２５とをハンドル２６を廻すこと
によりＹ方向に移動しても本体部２０と一体に移
動はしない。即ち、第２図から明らかなように、
移動台２５上に載るヨーク２４には上極ポールピ
ース２１と下極ポールピース２２を設け、それら
の間にスペーサ２３を挿入する。その上極ポール
ピース２１と下極ポールピース２２の隙間はスペ
ーサ２３により一定に保たれる。そして分析管４
０は、上極ポールピース２１と下極ポールピース
２２との空隙部３２の中に入るが、この空隙部３
２の空間より小さいため本体部２０との移動とは
切り離されることになる。また、分析管４０は電
場ケーシング１０に固定されることになり、従来
のように電場ケーシングと分析通路間にベローズ
のような可撓性の接続管を介在させる必要はな
い。 As mentioned above, the analysis passage in the magnetic field device of the present invention is not integrated with the pole piece as in the past, but is made separate and fixed to the electric field casing 10, so the upper pole piece 21, the spacer 23,
Even if the main body 20 consisting of the lower pole piece 22 and the yoke 24 and the adjustment table 25 are moved in the Y direction by turning the handle 26, they do not move together with the main body 20. That is, as is clear from Figure 2,
A yoke 24 placed on a moving table 25 is provided with an upper pole piece 21 and a lower pole piece 22, and a spacer 23 is inserted between them. The gap between the upper pole piece 21 and the lower pole piece 22 is kept constant by a spacer 23. and analysis tube 4
0 enters the gap 32 between the upper pole piece 21 and the lower pole piece 22, but this gap 3
Since it is smaller than the space of 2, it is separated from movement with the main body part 20. Further, the analysis tube 40 is fixed to the electric field casing 10, and there is no need to interpose a flexible connecting tube such as a bellows between the electric field casing and the analysis passage as in the conventional case.
なお、磁場の調整はＹ方向のみで足りるが、分
析管４０の先端と検出系ハウジング１５との間に
はベローズなどの可撓性の接続管１２を設けてい
るので、検出系部はＸ方向に移動させて調整する
ように構成することができる。このように構成す
ることにより、従来の調整機構のようにＸ，Ｙ方
向の移動を行つていたのに比して、調整機構が単
純で操作性の向上を図ることができる。 Although it is sufficient to adjust the magnetic field only in the Y direction, since a flexible connecting tube 12 such as a bellows is provided between the tip of the analysis tube 40 and the detection system housing 15, the detection system can be adjusted in the X direction. It can be configured to move and adjust. With this configuration, the adjustment mechanism is simpler and the operability can be improved compared to the conventional adjustment mechanism that moves in the X and Y directions.
また、分析管４０と検出系ハウジング１５との
間に設けられる接続管１２は、当該質量分析装置
の各部のクリーニングのために必要なものでもあ
る。しかし、この接続管１２は磁場装置の調整に
よつては何等影響を受けることはない。 Furthermore, the connecting tube 12 provided between the analysis tube 40 and the detection system housing 15 is also necessary for cleaning each part of the mass spectrometer. However, this connecting tube 12 is not affected in any way by the adjustment of the magnetic field device.
なお、本考案を実施例によつて説明したが、本
考案はこの実施例に限定されるものではなく、本
考案の主旨に従い、種々の変形が可能であること
は云うまでもない。 Although the present invention has been described by way of examples, it goes without saying that the present invention is not limited to these examples, and that various modifications can be made in accordance with the gist of the present invention.
以上の説明から明らかなように、本考案によれ
ば、磁場の調整を行うに際して、電場ケーシング
に固定された分析管に係わることなく、磁場装置
をＹ方向に調整可能にしたので、(1)ベローズなど
の可撓性の接続管の変形や破損を防止することが
できる、(2)調整はＹ方向に調整するだけでよいの
で調整機構が単純化され、安価にすることができ
ると共に操作性が向上する、(3)磁場を調整するの
に要する力が少なくてすむ、(4)分析通路をポール
ピースで兼ねる構造でないため、また接続管が少
なくなるため、分析通路の真空度を高めることが
できる、(5)接続管にはＸ，Ｙ方向の複雑な動き、
ポールピースのＸ，Ｙ方向の動きが伝わらなくな
つたので分析管の寿命が長くなる、などの効果を
有する。さらには、可撓性の接続管を分析管の先
端部と検出ハウジングに配置するので、クリーニ
ング作業もしやすくなる。
As is clear from the above explanation, according to the present invention, when adjusting the magnetic field, the magnetic field device can be adjusted in the Y direction without involving the analysis tube fixed to the electric field casing, so (1) It can prevent deformation or damage to flexible connecting pipes such as bellows. (2) Adjustment only needs to be made in the Y direction, so the adjustment mechanism is simplified, making it cheaper and easier to operate. (3) less force is required to adjust the magnetic field; (4) the analysis passage does not have a structure in which the pole piece also serves as the structure, and the number of connecting tubes is reduced, increasing the degree of vacuum in the analysis passage. (5) The connecting pipe has complex movements in the X and Y directions.
Since the movement of the pole piece in the X and Y directions is no longer transmitted, it has the effect of extending the life of the analysis tube. Furthermore, since a flexible connecting tube is arranged between the distal end of the analysis tube and the detection housing, cleaning work becomes easier.
第１図は本考案に係る質量分析装置の磁場装置
の要部を説明する図、第２図は第１図におけるＡ
−A′線断面を示す図、第３図は従来の二重収束
質量分析装置の概略構成を示す図、第４図は従来
装置の磁場調整を説明する図、第５図は第４図に
おけるＢ−B′線による断面を示す図である。
１…イオン源、２…主スリツト、３…電場、４
…磁場、５…コレクタ・スリツト、１０…電場ケ
ース、１１と１２…ベローズ、１３と２４…ヨー
ク、１４…ポールピース兼分析通路、１５…検出
系ハウジング、２１…上極ポールピース、２２…
下極ポールピース、２３…スペーサ、２５…調整
台、２６…ハンドル、２７…固定部、２８…据付
ボルト、２９…ベース、３０…調整部材、４０…
分析管。
FIG. 1 is a diagram illustrating the main parts of the magnetic field device of the mass spectrometer according to the present invention, and FIG. 2 is a diagram showing A in FIG.
-A' line cross-section, Figure 3 is a diagram showing the schematic configuration of a conventional double focusing mass spectrometer, Figure 4 is a diagram explaining magnetic field adjustment of the conventional equipment, and Figure 5 is the same as in Figure 4. It is a diagram showing a cross section taken along the line BB'. 1... Ion source, 2... Main slit, 3... Electric field, 4
... Magnetic field, 5... Collector slit, 10... Electric field case, 11 and 12... Bellows, 13 and 24... Yoke, 14... Pole piece and analysis passage, 15... Detection system housing, 21... Upper pole piece, 22...
Lower pole piece, 23... Spacer, 25... Adjustment stand, 26... Handle, 27... Fixing part, 28... Installation bolt, 29... Base, 30... Adjustment member, 40...
analysis tube.
Claims (1)
質量分析装置において、上下のポールピースと左
右のスペーサにより磁場空隙を形成し、ポールピ
ースの外側にヨークを設けると共に磁場空隙を移
動する磁場移動手段を設け、分析管を一方は電場
ケーシングに固定して磁場空隙に貫挿し他方は可
撓性の接続管を介して検出ハウジングに接続する
ことによつて、分析管を電場ケーシングに固定し
たまま磁場空隙及び検出ハウジングが移動できる
ように構成したことを特徴とする質量分析装置の
磁場装置。 In a mass spectrometer consisting of an ion source, an electric field, a magnetic field, and a detection system, a magnetic field gap is formed by upper and lower pole pieces and left and right spacers, a yoke is provided outside the pole piece, and a magnetic field moving means is provided to move the magnetic field gap. By fixing the analysis tube to the electric field casing on one side and inserting it into the magnetic field gap, and connecting the other side to the detection housing via a flexible connecting tube, the analysis tube can be inserted into the magnetic field gap while the analysis tube is fixed on the electric field casing. and a magnetic field device for a mass spectrometer, characterized in that the detection housing is configured to be movable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984135660U JPH0342621Y2 (en) | 1984-09-06 | 1984-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984135660U JPH0342621Y2 (en) | 1984-09-06 | 1984-09-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6151659U JPS6151659U (en) | 1986-04-07 |
| JPH0342621Y2 true JPH0342621Y2 (en) | 1991-09-06 |
Family
ID=30694142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984135660U Expired JPH0342621Y2 (en) | 1984-09-06 | 1984-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342621Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2408235A1 (en) * | 2000-05-08 | 2001-11-15 | Mass Sensors, Inc. | Microscale mass spectrometric chemical-gas sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5517926A (en) * | 1978-07-26 | 1980-02-07 | Hitachi Ltd | Mass spectrometer |
-
1984
- 1984-09-06 JP JP1984135660U patent/JPH0342621Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5517926A (en) * | 1978-07-26 | 1980-02-07 | Hitachi Ltd | Mass spectrometer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6151659U (en) | 1986-04-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6308383B2 (en) | High voltage insulator for charged particle optics | |
| JP2011029185A (en) | Particle beam device having diaphragm unit and method for adjusting beam current of particle beam device | |
| US4460827A (en) | Scanning electron microscope or similar equipment with tiltable microscope column | |
| US4771178A (en) | Goniometer stage | |
| JPH0342621Y2 (en) | ||
| EP0253349A2 (en) | Device for precise relative adjustment of a mask and a semiconductor wafer in a lithography apparatus and method for its use | |
| EP3180791A1 (en) | Method for scanning a sample by means of x-ray optics and an apparatus for scanning a sample | |
| FI20011119A (en) | Method and apparatus for delimiting a beam cone | |
| US4044254A (en) | Scanning corpuscular-beam transmission type microscope including a beam energy analyzer | |
| EP0461393B1 (en) | Scanning tunnel microscope | |
| WO2000031769A3 (en) | Detector configuration for efficient secondary electron collection in microcolumns | |
| US6061085A (en) | Camera system for a transmission electron microscope | |
| EP2956762B1 (en) | Device for spatially orienting an x-ray optical unit and apparatus having such a device | |
| US3514595A (en) | Particle beam microscope in combination with an adjustable viewing apparatus and magnifier | |
| JP3020460B2 (en) | Vacuum optical system structure | |
| JPH0432633Y2 (en) | ||
| JPH06269439A (en) | X-ray ct apparatus and x-ray generator | |
| JPS6032308B2 (en) | mass spectrometer | |
| JPH0638330B2 (en) | Electronic beam irradiation device | |
| JPS6193544A (en) | Mass spectrometer | |
| JPH03192699A (en) | Supporting apparatus of vacuum duct | |
| JPH0346455Y2 (en) | ||
| KR950005553Y1 (en) | Vertical coil assembly machine fo rdeflection yoke | |
| CN117423592A (en) | Movable diaphragm | |
| JPH023264B2 (en) |