JPH0342002A - Method for washing and dehydrating article - Google Patents
Method for washing and dehydrating articleInfo
- Publication number
- JPH0342002A JPH0342002A JP17593089A JP17593089A JPH0342002A JP H0342002 A JPH0342002 A JP H0342002A JP 17593089 A JP17593089 A JP 17593089A JP 17593089 A JP17593089 A JP 17593089A JP H0342002 A JPH0342002 A JP H0342002A
- Authority
- JP
- Japan
- Prior art keywords
- article
- fully fluorinated
- treated
- water
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 23
- 238000005406 washing Methods 0.000 title claims description 9
- 239000002904 solvent Substances 0.000 claims abstract description 9
- 150000001298 alcohols Chemical class 0.000 claims abstract description 8
- 239000004094 surface-active agent Substances 0.000 claims abstract description 8
- 239000003208 petroleum Substances 0.000 claims abstract description 5
- 239000003599 detergent Substances 0.000 claims abstract 3
- 150000001875 compounds Chemical class 0.000 claims description 40
- 239000012459 cleaning agent Substances 0.000 claims description 33
- 238000011282 treatment Methods 0.000 claims description 24
- 239000003960 organic solvent Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 7
- 239000000356 contaminant Substances 0.000 abstract description 20
- 239000003021 water soluble solvent Substances 0.000 abstract description 4
- 230000018044 dehydration Effects 0.000 abstract 1
- 238000006297 dehydration reaction Methods 0.000 abstract 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 41
- 235000019441 ethanol Nutrition 0.000 description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 25
- 238000004140 cleaning Methods 0.000 description 20
- 239000007788 liquid Substances 0.000 description 18
- 230000004907 flux Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000001035 drying Methods 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000010730 cutting oil Substances 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 231100000419 toxicity Toxicity 0.000 description 2
- 230000001988 toxicity Effects 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- 229910021583 Cobalt(III) fluoride Inorganic materials 0.000 description 1
- 241000156978 Erebia Species 0.000 description 1
- -1 H9)3N Chemical class 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- YCYBZKSMUPTWEE-UHFFFAOYSA-L cobalt(ii) fluoride Chemical compound F[Co]F YCYBZKSMUPTWEE-UHFFFAOYSA-L 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000009469 supplementation Effects 0.000 description 1
- 229950011008 tetrachloroethylene Drugs 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Detergent Compositions (AREA)
- Extraction Or Liquid Replacement (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、電子部品、ガラス、レンズ、めっき製品、光
ディスクあるいは金属及び非金属製品などのような物品
の表面に存在する水分、油脂、フラックスその他の無機
、有機の各種の汚染物（以下、汚染物と総称する。）を
簡易な装置・操作によって、容易に、完全に除去するこ
とができる物品の洗浄・水切り方法に関するものである
。Detailed Description of the Invention (Field of Industrial Application) The present invention is directed to the prevention of moisture, oil, and flux present on the surfaces of articles such as electronic parts, glasses, lenses, plated products, optical disks, and metal and non-metal products. The present invention relates to a method for washing and draining articles that can easily and completely remove various other inorganic and organic contaminants (hereinafter collectively referred to as contaminants) using simple equipment and operations.
（従来の技術〉
液晶、半導体ウェハーなどの電子部品、光ディスク、め
っき製品、ガラス、レンズあるいは金属及び非金属製品
などの表面に付着している汚染物の除去処理をする場合
、多種類の汚染物に対して、それぞれの除去に適切な洗
浄剤を使用して洗浄し、水洗浄の場合は、その後に物品
表面に付着している水分を何らかの手段で除去する乾燥
処理をすることが一般的である。(Prior art) When removing contaminants from the surfaces of electronic components such as liquid crystals, semiconductor wafers, optical disks, plated products, glass, lenses, and metal and non-metal products, many types of contaminants are removed. However, in the case of water cleaning, it is common to use an appropriate cleaning agent for each removal process, and then perform a drying process to remove the moisture adhering to the surface of the item by some means. be.
すなわち、（１）イソプロピルアルコール、エチルアル
コール、メチルアルコールなどのようなアルコール類、
（２） １，１．１−１−リクロルエタン、メチレンク
ロライド、トリクロルエチレン、パークロルエチレンな
どのような塩素系有機溶剤、（３）トリクロルトリフル
オルエタン（フロンＲ−１１３）のようなフッ素系有機
溶剤、（４）トルエン、キシレン、ベンゼンなどのよう
な石油系溶剤、あるいは（５）パンライズ（商品名、電
盤化学工業社〉、キャプテンクリーン（商品名、アデカ
・アーガス化学社）のような界面活性剤を含む水溶性溶
剤などのような洗浄剤を、これらを単独に、あるいは、
Ｒ−１１３とアルコール類とを混合して使用するなど適
宜混合して使用し、加熱したこれら洗浄剤の入った槽中
へ洗浄しようとする物品を浸漬し、たとえば超音波又は
揺動などの物理的振動を付与して汚染物を洗浄中に溶か
しこんで除去するものである。しかして、水洗浄の場合
は物品表面に付く純水を除去するための乾燥手段として
は、加熱あるいは減圧によって水分を蒸発させる方法や
、圧縮力、遠心力などを利用する物理的方法などが古く
から行なわれているが、液体の比重差と気化速度の差を
利用した方法も行なわれており、この方法としては、前
記のような（イ）塩素系有機溶剤や（ロ）アルコール類
を用いる方法、あるいは、（ハ）フロンＲ−１１３に界
面活性剤を添加した洗浄剤や（ニ）フロンＲ−１１３に
エチルアルコールのようなアルコール類を添加した共沸
系による方法などが知られている。That is, (1) alcohols such as isopropyl alcohol, ethyl alcohol, methyl alcohol, etc.;
(2) Chlorinated organic solvents such as 1,1.1-1-lichloroethane, methylene chloride, trichlorethylene, perchlorethylene, etc., (3) Fluorinated organic solvents such as trichlorotrifluoroethane (Freon R-113) solvents, (4) petroleum solvents such as toluene, xylene, benzene, etc., or (5) interfaces such as Panrise (trade name, Denban Kagaku Kogyo Co., Ltd.), Captain Clean (trade name, Adeka Argus Chemical Co., Ltd.) Cleaning agents such as water-soluble solvents containing activators, either alone or
R-113 and alcohol are used in an appropriate mixture, and the article to be cleaned is immersed in a bath containing the heated cleaning agent, and then a physical device such as ultrasonic wave or shaking is applied. This applies vibration to dissolve and remove contaminants during cleaning. However, in the case of washing with water, drying methods to remove pure water from the surface of items include methods that evaporate water by heating or reduced pressure, and physical methods that utilize compressive force, centrifugal force, etc. However, there is also a method that takes advantage of the difference in specific gravity of liquids and the difference in vaporization rate, and this method uses (a) chlorinated organic solvents and (b) alcohols as described above. Also known are methods such as (c) a cleaning agent in which a surfactant is added to Freon R-113, and (d) an azeotropic method in which an alcohol such as ethyl alcohol is added to Freon R-113. .
（発明が解決しようとする課題）
しかしながら、洗浄剤として、（１）のアルコール類は
、引火性があり、危険であるといった問題があり、（２
）の塩素系有機溶剤は、毒性の問題があり、使用上の制
限、排出、貯蔵などにきわめてきびしい条件が付されて
いるという問題があり、（３）のフッ素系有機溶剤は、
きわめて有効な洗浄剤であるが、近時、オゾン層破壊と
いう重大な問題が指摘され、近い中に世界的にその使用
が禁止されるという問題があり、（４）の石油系溶剤も
毒性や引火性といった問題があり、（５）の界面活性剤
を含む水溶性溶剤は、界面活性剤がきわめて除去しにく
いといった問題がある。(Problem to be solved by the invention) However, as a cleaning agent, the alcohols in (1) have the problem of being flammable and dangerous;
The chlorinated organic solvents listed in (3) have the problem of toxicity and are subject to extremely strict conditions regarding restrictions on use, discharge, storage, etc.;
Although it is an extremely effective cleaning agent, the serious problem of ozone layer depletion has recently been pointed out, and there is a problem that its use will be banned worldwide in the near future. There is a problem of flammability, and the water-soluble solvent containing a surfactant (5) has a problem that the surfactant is extremely difficult to remove.
これら従来から使用されている各種溶剤を洗浄剤とする
場合には、洗浄に時間がかかるばかりでなく、脱脂、脱
フラツクスなどが不十分であり、これら洗浄剤は、汚染
物を溶解するために、洗浄液の全量を時々交換しなけれ
ばならないという問題がある。又、汚染物を洗浄後の純
水による処理を必要とし、この付着純水を除く乾燥工程
においても、（イ）の塩素系有機溶剤を使用する方法で
は、ペーパー洗浄による乾燥工程を用いると、外気雰囲
気との温度差により、外気雰囲気中の含水物の吸着が認
められるという問題や前記のような毒性その他の問題が
あり、（ロ）のアルコール類を用いる方法では、アルコ
ール類の液温が外気雰囲気との差がなくても吸熱反応を
有するため外気雰囲気中の含水物の吸着が認められ、又
、アルコール類は、水を巻きこむ作用を有するために、
乾燥時に、アルコールが先に蒸発して水の残さが認めら
れ、さらに、前述のような引火性などの危険性があると
いう問題があり、（ハ）の方法は、添加した界面活性剤
が除去しきれずに物品の表面に吸着されるために精密洗
浄乾燥にはあまり使用されず、界面活性剤の残留が問題
にならない分野でしか使用し得ないという問題があり、
（ニ）の方法は、物品をこの洗浄剤中に浸漬するとエチ
ルアルコールが作用し、付着水は汚染物とともに物品か
ら剥離されて液の表面上に浮上し、良好な水切りを行な
い得るが、清浄に乾燥された物品は、目視はできないが
表面にフロン及びエチルアルコールが吸着しており、目
的によっては、この除去のために数十度の熱風で処理す
る必要が生じたり、湿分が吸着したりするので、作業環
境を厳密に維持したり、装置が複雑となったり、特殊な
管理と知識が必要であるという問題があり、とくに汚染
物の除去に著効のあるフッ素有機溶剤の使用が禁止され
るに伴なって、これに代る効果的な洗浄・水切り手段が
要望されている。When these conventionally used solvents are used as cleaning agents, not only does cleaning take time, but degreasing and defluxing are insufficient. However, there is a problem in that the entire amount of cleaning liquid must be replaced from time to time. In addition, it is necessary to treat contaminated matter with purified water after washing, and even in the drying process to remove this adhered pure water, in the method (a) using a chlorinated organic solvent, if a drying process using paper washing is used, There are problems such as adsorption of water-containing substances in the outside air atmosphere due to the temperature difference with the outside air atmosphere, as well as toxicity and other problems as mentioned above. Because it has an endothermic reaction even when there is no difference from the outside air atmosphere, it is recognized that water-containing substances in the outside air atmosphere are adsorbed, and since alcohols have the effect of entraining water,
During drying, the alcohol evaporates first, leaving behind water, and there is also the problem of flammability and other dangers as mentioned above. The problem is that it is not often used for precision cleaning and drying because it is adsorbed onto the surface of the article, and can only be used in fields where residual surfactant is not a problem.
In method (d), when the item is immersed in this cleaning agent, ethyl alcohol acts on the item, and the adhering water is peeled off from the item along with the contaminants and floats to the surface of the liquid, allowing for good water removal. Although it is not visible to the naked eye, products that have been dried have fluorocarbons and ethyl alcohol adsorbed on their surfaces, and depending on the purpose, it may be necessary to treat them with hot air at several tens of degrees Celsius to remove them. There are problems in that the working environment must be strictly maintained, the equipment is complicated, and special management and knowledge are required. With this ban, there is a demand for alternative and effective cleaning and draining means.
本発明は、従来の洗浄剤を使用しながら、前記問題を解
決し、簡単な装置で、容易に、効率よく、物品の表面に
存在する汚染物を除去し得る手段を得ることを目的とす
るものである。The present invention aims to solve the above problems while using conventional cleaning agents, and to provide a means for easily and efficiently removing contaminants present on the surface of articles with a simple device. It is something.
（課題を解決するための手段）
本発明者は、前記問題を解決し、前記目的を達成するた
めに研究を重ねた結果、従来の洗浄液で処理した後に、
完全にフッ素化された完全フッ素化化合物によって処理
することによって目的を達し得ることを見出して本発明
をなしたものである。(Means for Solving the Problems) As a result of repeated research in order to solve the above problems and achieve the above objects, the present inventors found that after processing with a conventional cleaning solution,
The present invention was made based on the discovery that the object can be achieved by treatment with a fully fluorinated compound.
すなわち、本発明は、アルコール類、塩素系有機溶剤、
石油系溶剤、界面活性剤を含む水溶性溶剤からなる群か
ら選ばれた少なくとも１種類の洗浄剤を使用して処理し
た後、構造式、
ＣＦ３
ＣＦ３− ［（０−ＣＦ−ＣＦ２ ）Ｎ−（０−ＣＦ２
）Ｍ ］−０−ＣＦ３で示される完全フッ素化化合物か
らなる群から選ばれた少なくとも１種類の完全フッ素化
化合物を使用して処理する物品の洗浄・水切り方法であ
る。That is, the present invention provides alcohols, chlorinated organic solvents,
After treatment with at least one cleaning agent selected from the group consisting of petroleum solvents and water-soluble solvents including surfactants, the structural formula: CF3 CF3-[(0-CF-CF2)N-( 0-CF2
)M ]-0-CF3 This is a method for washing and draining articles, which is treated using at least one fully fluorinated compound selected from the group consisting of fully fluorinated compounds represented by CF3.
本発明において使用するアルコール類としては、たとえ
ば、イソプロピルアルコール、エチルアルコール、メチ
ルアルコールなどが挙げられ、塩素系有機溶剤としては
、たとえば、１，１．１−トリクロルエタン、メチルク
ロライド、トリクロルエチレン、パークロルエチレンな
どが挙げられ、石油系溶剤としては、たとえば、トルエ
ン、キシレン、ベンゼンなどが挙げられ、界面活性剤を
含む水溶性化合物としては、たとえば、パンライズ（商
品名）、キャプテンクリーン（商品名）などが挙げられ
、これらは、従来から物品の洗浄・水切り用として使用
していたものでよい。Examples of alcohols used in the present invention include isopropyl alcohol, ethyl alcohol, and methyl alcohol. Examples of chlorinated organic solvents include 1,1,1-trichloroethane, methyl chloride, trichloroethylene, and Examples of petroleum-based solvents include toluene, xylene, and benzene. Examples of water-soluble compounds containing surfactants include Panrise (trade name) and Captain Clean (trade name). These may be those conventionally used for washing and draining articles.
次に、完全フッ素化化合物としては、たとえば、（Ｃ４
Ｈ９）３Ｎ、 ＣｙＨｔｓＣＯＯＣＨ３などのような炭
化水素化合物を無水フッ化水素酸に溶解し、電解槽にお
いて一定条件下で反応させ、ついで精製する電解フツ素
化法によって製造される（Ｃ４Ｆ９ ）３Ｎ、金物、パ
ーフロロポリエーテルの完全フッ素化さＣＦ３
れた ＣＦ３−［（０−ＣＦ−ＣＦ２）Ｎ−（０−ＣＦ
２）Ｍ ］−０−ＣＦ３のような化合物、コバルトフッ
素化物を触媒として反応かして、これらの完全フッ素化
化合物は、フロリナート〈商品名、住友スリーエム社〉
、ガルデン（商品名、日本モンテジソン社）、フルチッ
ク（商品名、ＩＳＣ社）、アフルード（商品名、旭硝子
社）、エフトップ（商品名、新秋田化或社〉、ベルフロ
ート（商品名、徳山曹達社）、エフリード〈商品名、関
東電化社〉のような商品名で市販されているものであっ
て、いずれも水素や塩素を含まない完全にフッ素化され
た不活性な液体であって、電気絶縁性、低表面張力で粘
性が低く滲透性にすぐれ、比重が大きく、熱伝導性がよ
く、温度にかかわりなく各種溶剤に溶解せず、水、油も
溶かさず、金属、プラスチック、ゴムなどを浸さず、不
燃性、無毒性であるといった特性がある化合物である。Next, as a fully fluorinated compound, for example, (C4
(C4F9)3N, metal material produced by an electrolytic fluorination method in which a hydrocarbon compound such as H9)3N, CyHtsCOOCH3, etc. is dissolved in anhydrous hydrofluoric acid, reacted under certain conditions in an electrolytic cell, and then purified. , fully fluorinated CF3 of perfluoropolyether CF3-[(0-CF-CF2)N-(0-CF
2) Compounds such as M]-0-CF3 are reacted with a cobalt fluoride as a catalyst, and these fully fluorinated compounds are produced by Fluorinert (trade name, Sumitomo 3M).
, Galden (product name, Nippon Montageson Co., Ltd.), Frutic (product name, ISC), Affluid (product name, Asahi Glass Co., Ltd.), FTOP (product name, Shin-Akita Chemical Co., Ltd.), Bellfloat (product name, Tokuyama Soda) It is commercially available under product names such as Efreed (trade name, Kanto Denka Co., Ltd.), and both are completely fluorinated inert liquids that do not contain hydrogen or chlorine. Insulating properties, low surface tension, low viscosity, excellent permeability, high specific gravity, good thermal conductivity, does not dissolve in various solvents regardless of temperature, does not dissolve in water or oil, and can be used with metals, plastics, rubber, etc. It is a compound that has the characteristics of not soaking, non-flammable, and non-toxic.
これらの洗浄剤を使用する本発明方法としては、たとえ
ば、（Ａ）槽中の完全フッ素化化合物の液面上に、前記
従来の洗浄剤層を作り、まず、従来の洗浄剤層中に被処
理物品を浸漬して処理し、ついで、完全フッ素化化合物
中に浸漬して物理的振動を付与して処理し、汚染物を溶
解した従来の洗浄剤層をオーバーフローさせた後に被処
理物を完全フッ素化化合物中から引上げる方法、（Ｂ）
完全フッ素化化合物をいれた槽の液面上において、被処
理物品に、前記従来の洗浄剤を噴霧状に吹付は処理を行
ない、ついで、完全フッ素化化合物中に浸漬して物理的
振動を付与して処理を行ない、噴霧処理し汚染物を溶解
した従来の洗浄剤層をオーバーフローさせて除去した後
、処理した被処理物品を引上げて処理する方法、（Ｃ）
第１槽中に前記従来の洗浄剤をいれ、第２槽中に完全フ
ッ素化化合物をいれておき、まず、被処理物品を第■槽
中に浸漬して処理を行ない、ついで、被処理物を引上げ
て第２槽中に浸漬して物理的振動を付与して処理する方
法などが好ましい方法として挙げられる。In the method of the present invention using these cleaning agents, for example, (A) the conventional cleaning agent layer is formed on the liquid surface of the fully fluorinated compound in the tank, and first, the conventional cleaning agent layer is covered with The article to be treated is treated by immersion and then treated by immersion in a fully fluorinated compound and subjected to physical vibration to completely remove the treated article after overflowing the conventional cleaning agent layer that has dissolved contaminants. Method for pulling from a fluorinated compound, (B)
The article to be treated is treated by spraying the conventional cleaning agent above the liquid level of a tank containing a fully fluorinated compound, and then immersed in the fully fluorinated compound to apply physical vibration. (C) a method in which the conventional cleaning agent layer in which contaminants have been dissolved by spraying is overflowed and removed, and then the treated article is pulled up and treated; (C)
The conventional cleaning agent is placed in the first tank, and a fully fluorinated compound is placed in the second tank, and the article to be treated is first immersed in the tank (2) for treatment. Preferred methods include a method in which the material is pulled up, immersed in a second tank, and subjected to physical vibration.
本発明における前段の従来の洗浄剤による処理は、従来
行なわれているような条件で行なえばよく、後段の完全
フッ素化化合物による処理は、処理温度としては、使用
する完全フッ素化化合物の沸点以下の温度に適宜選定し
得、処理時間は、処理温度、物品の形状、大きさなどに
よって異なるが、２０〜６０秒間程度でよく、完全フッ
素化化合物処理における物理的振動は、超音波あるいは
揺動などによることができるが、必ずしも必要ではない
本発明は、このような従来の洗浄剤による水切り、ある
いは、洗浄を行なった後に、さらに、完全フッ素化化合
物による水切り、あるいは、洗浄を行なうむのであるか
ら、従来の洗浄剤による処理は、従来説明されているよ
うな機構によって行なわれるが、この処理だけでは、洗
浄・水切りが完全には行ない得ない。又、次の完全フッ
素化化金物による処理においては、水銀外の汚染物を除
去する洗浄剤として使用する場合には、確言はし難いが
、汚染物が物品の表面から分離され、物品中の細孔部や
細かい細工がされた部分へもよく滲透し、その中に存在
する汚染物を追い出す作用を促進するものと考えられ、
水切りにおいても、物品への付着水は、比重差が大きい
ので浮力をうけ、物品は完全フッ素化化合物で覆われ、
残った水分は、さらに付着力が弱まり、浮上して完全に
追い出されるものと考えられる。追い出された水分をも
含む意味での汚染物は、完全フッ素化化合物中に溶解せ
ずに浮上してくるものであって、たとえばオーバーフロ
ーさせることによって系外へ除去する物品の処理方法で
あって、分離した液中に存在する完全フッ素化物は、回
収して容易に再使用することができ、ごく少量発生する
減少分を補給すれば足りるものであり、物品に付着して
いる完全フッ素化化合物は、蒸発によって完全に除かれ
、物品に汚染物、洗浄剤、完全フッ素化化合物などのシ
ミを残すことがない、この処理における完全フッ素化化
合物は、２種以上を混合しても使用し得るが、１種類だ
けで十分な効果を挙げ得るものである。In the first stage of the present invention, the treatment with a conventional cleaning agent may be carried out under conventional conditions, and the second stage treatment with a fully fluorinated compound is performed at a temperature below the boiling point of the fully fluorinated compound used. The treatment time may vary depending on the treatment temperature, the shape and size of the article, etc., but may be about 20 to 60 seconds.The physical vibration in the fully fluorinated compound treatment may be However, in the present invention, which is not necessarily required, after draining or cleaning with such a conventional cleaning agent, draining or cleaning with a fully fluorinated compound is further performed. Therefore, treatment with conventional cleaning agents is performed by a mechanism as previously described, but cleaning and draining cannot be performed completely with this treatment alone. In addition, in the next treatment with fully fluorinated metal products, when used as a cleaning agent to remove contaminants other than mercury, it is difficult to say with certainty, but the contaminants will be separated from the surface of the article, and the contaminants in the article will be removed. It is thought that it penetrates well into pores and areas with fine workmanship, promoting the action of expelling contaminants that exist within them.
Even when draining, the water adhering to the item is subject to buoyancy due to the large difference in specific gravity, and the item is covered with a fully fluorinated compound.
It is thought that the remaining moisture further weakens its adhesion, floats to the surface, and is completely expelled. Contaminants, including expelled water, are those that float to the surface without being dissolved in the fully fluorinated compound, and are removed from the system by overflowing, for example. The fully fluorinated compounds present in the separated liquid can be easily recovered and reused, and it is sufficient to replenish the reduced amount that occurs in very small amounts. is completely removed by evaporation and leaves no stains on the article, such as contaminants, cleaning agents, fully fluorinated compounds, etc. The fully fluorinated compounds in this process can be used in combinations of two or more. However, only one type can produce sufficient effects.
（実施例） 次に、本発明の実施例を述べる。(Example) Next, examples of the present invention will be described.
実施例 １
完全フッ素化化合物として、
Ｃ「３
ＣＦ３− ［（０−ＣＦ−ＣＦ２）Ｎ−（０−ＣＦ２）
Ｍ ］−０−ＣＦ３を槽中に入れ、その液面上に、１，
１．１−トリクロルエタンを３備の厚さになるようにい
れた洗浄槽（比重差によりて両液は完全に２層に分離し
ている。）を用い、切削油が付着している工作機械用の
大きさが２５０ｘ１５０Ｘ５閣の金属部品を、まず、１
，１．１−トリクロルエタン層に浸漬して３０秒間処理
して切削油を溶解洗浄し、ついで、金属部品をそのまま
下層の完全フッ素化化合物液中におしこんで浸漬し、３
０秒間洗浄処理した。この処理によって、前段の処理に
よって除去し得なかった切削油は、金属部品から分離し
、溶解することなく液中を浮上し、１．１．１−トリク
ロルエタン中に入り溶解される。Example 1 As a fully fluorinated compound, C'3CF3-[(0-CF-CF2)N-(0-CF2)
M]-0-CF3 is placed in a tank, and 1,
1. Use a cleaning tank filled with 1-trichloroethane to a thickness of 3 mm (both liquids are completely separated into two layers due to the difference in specific gravity) for machining work that has cutting oil attached. First, the metal parts for the machine with the size of 250x150x5 are 1
, 1. Immerse in the 1-trichloroethane layer and treat for 30 seconds to dissolve and clean the cutting oil, and then immerse the metal parts directly in the fully fluorinated compound liquid in the lower layer, 3
Washing was performed for 0 seconds. By this process, the cutting oil that could not be removed by the previous process is separated from the metal parts, floats in the liquid without being dissolved, enters the 1.1.1-trichloroethane, and is dissolved.
これらの洗浄処理の間、常温で超音波による振動を付与
した。その後、切削油を溶解した１、１．１−トリクロ
ルエタンをオーバーフローさせて除去し、金属部品を引
上げた。During these cleaning treatments, ultrasonic vibrations were applied at room temperature. Thereafter, 1,1,1-trichloroethane in which the cutting oil had been dissolved was removed by overflowing, and the metal parts were pulled up.
この結果、金属部品には、切削油の付着はもちろん、両
洗浄剤の付着シミも全く認められなかった。As a result, not only was there no cutting oil adhering to the metal parts, but no stains from either of the cleaning agents were observed at all.
実施例 ２
実施例１と同じ完全フッ素化化合物を槽中にいれておき
、その液面上にエチルアルコールをｌａｍの厚さにいれ
、水が付着している樹脂製コンパクトディスク及びガラ
ス製ディスクを被処理物品として、まず、エチルアルコ
ール層中に浸漬して通常のように水切り処理を３０秒間
行ない、ついで、エチルアルコール及び除去しきれなか
った水分を付着したままの各被処理物品を下層の完全フ
ッ素化化合物液中におしこんで浸漬し、３０秒間水切り
処理を常温で超音波による振動を付与しながら行ない、
残留していた水分及び付着してきたエチルアルコールは
ともに被処理物品から分離されて完全フッ素化化合物液
中に溶解することなく浮上してエチルアルコール層中に
入り除去された。その後、水分を溶解したエチルアルコ
ール層は、オーバーフローさせて分離し、被処理物品を
引上げた。Example 2 The same fully fluorinated compound as in Example 1 was placed in a tank, ethyl alcohol was poured on the liquid surface to a thickness of 1 lam, and a resin compact disk and a glass disk with water attached were placed. The articles to be treated are first immersed in the ethyl alcohol layer and drained for 30 seconds as usual.Then, each article to be treated, with the ethyl alcohol and the water that could not be removed, is completely soaked in the lower layer. It is immersed in a fluorinated compound solution, and drained for 30 seconds at room temperature while applying ultrasonic vibration.
Both the remaining water and the attached ethyl alcohol were separated from the article to be treated and floated to the surface without being dissolved in the fully fluorinated compound liquid, entering the ethyl alcohol layer and being removed. Thereafter, the ethyl alcohol layer in which water had been dissolved overflowed and was separated, and the article to be treated was pulled up.
その結果、樹脂製コンパクトディスク、ガラス製ディス
クの両者は、ともに、水分はもちろん、エチルアルコー
ルや完全フッ素化化合物の付着やシミは全く認められな
かった。As a result, in both the resin compact disc and the glass disc, not only moisture but also no adhesion or stains of ethyl alcohol or fully fluorinated compounds were observed.
実施例 ３
を槽中にいれ、その液面上に、フラックスが付着してい
るプリント基板を吊し、その表面に１．１．１トリクロ
ルエタンを噴霧吹付けてフラックス洗浄処理を２０秒間
行ない、フラックスを被処理物品の表面から分離し、溶
解して洗浄剤とともに完全フッ素化化合物液面上に落下
させて層を形成させ、被処理物品は、未分離のフラック
ス及び洗浄剤をつけたまま完全フッ素化化合物液中に吊
下浸漬し、超音波による振動を付与しながら３０秒間洗
浄処理を行ない、未分離のフラックス及び洗浄剤は被処
理物品から分離し、液中を浮上して、完全フッ素化化合
物液面上にたまっているフラックスを溶解している洗浄
剤中に混入する。このフラックスを溶解した洗浄剤層を
オーバーフローさせて除去した後、被処理物品を引上げ
た。Example 3 was placed in a tank, a printed circuit board with flux attached was suspended above the liquid surface, and 1.1.1 trichloroethane was sprayed onto the surface to perform a flux cleaning treatment for 20 seconds. The flux is separated from the surface of the article to be treated, dissolved and allowed to fall onto the fully fluorinated compound liquid surface along with the cleaning agent to form a layer, and the article to be treated is completely removed with the unseparated flux and cleaning agent attached. The article is suspended and immersed in a fluorinated compound solution and cleaned for 30 seconds while being subjected to ultrasonic vibrations. The flux accumulated on the chemical compound liquid surface is mixed into the dissolved cleaning agent. After the cleaning agent layer in which the flux was dissolved was removed by overflowing, the article to be treated was pulled up.
この結果プリント基板面上には、フラックスはもちろん
、再洗浄剤の付着やシミは全く認められなかった。As a result, no flux or re-cleaning agent adhesion or stains were observed on the printed circuit board surface.
実施例 ４
第１槽にエチルアルコールを、第２糟には、完全フッ素
化化合物として常温の（ＣｓＦｌｌ）３をそれぞれいれ
ておき、被処理物品として水分が付着している銀めっき
した電子部品を使用し、まず、第１槽のエチルアルコー
ル中に３０秒間浸漬して水切り処理を行ない、エチルア
ルコールを乾燥することなく、そのまま第２槽の完全フ
ッ素化化合物中に移し３０秒間浸漬して水切り処理を行
なった。これらの処理により、まず、エチルアルコール
によって被処理物品に付着している水分の大部分は分離
浮上したが、残留している水分が認められ、完全フッ素
化化合物処理によって、未除去の水分及び付着していた
エチルアルコールは、ともに被処理物品表面から分離し
て浮上してくる。この水を溶解したエチルアルコールは
、オーバーフローナトによって容易に除去し得るもので
あり、処理後の被処理物品は完全フッ素化化合物液中か
ら引上げて処理を終った。Example 4 Ethyl alcohol was placed in the first tank, and (CsFll)3 at room temperature was placed as a fully fluorinated compound in the second tank, and a silver-plated electronic component with water attached was used as an article to be treated. The sample was first immersed in ethyl alcohol in the first tank for 30 seconds and drained, then transferred directly into the fully fluorinated compound in the second tank without drying the ethyl alcohol, immersed for 30 seconds and drained. I did this. Through these treatments, most of the water adhering to the object to be treated was first separated and floated to the surface by ethyl alcohol, but some remaining water was found, and by treatment with a fully fluorinated compound, unremoved water and adhesion were removed. Both of the ethyl alcohol that was being used separates from the surface of the article to be treated and floats to the surface. This water-dissolved ethyl alcohol can be easily removed using an overflow tank, and the treated article is pulled out of the fully fluorinated compound liquid to complete the treatment.
この結果、電子部品の表面には、水分はもちろん、エチ
ルアルコールや完全フッ素化化合物は全く認められず、
変色もなく、完全に水切りが行なわれていた。As a result, not only moisture but also no ethyl alcohol or fully fluorinated compounds are found on the surface of electronic components.
There was no discoloration and the water had been completely drained.
比較例 １
洗浄液として、トリクロルエチレンを使用して８０℃に
加熱保持しておき、銀めっきを施した電子部品を常法に
従って１分間浸漬し、超音波すすぎなどのすすぎ処理を
３回行なう処理を行なった。Comparative Example 1 Trichlorethylene was used as a cleaning solution, heated and maintained at 80°C, and silver-plated electronic components were immersed for 1 minute in accordance with a conventional method, followed by rinsing treatment such as ultrasonic rinsing three times. I did it.
その結果、水分は除かれていたが、総処理時間は５分間
であり、電子部品面上の銀がトリクロルエチレンに含ま
れる塩素による変色が発生していた。As a result, although moisture was removed, the total processing time was 5 minutes, and the silver on the surface of the electronic component was discolored by chlorine contained in trichlorethylene.
比較例 ２
洗浄液として、フロンＲ−１１３を使用し、この洗浄液
用の装置を使用して、洗浄槽において超音波を３０秒間
付与した後、２段階のすすぎ槽において、すすぎ洗いを
合計３０秒間行ない、第３すすぎ槽で発生する蒸気中で
の滞留時間を２０秒間として、実装プリント基板の脱フ
ラツクスのための洗浄処理を行なった。Comparative Example 2 Freon R-113 was used as the cleaning liquid, and after applying ultrasonic waves for 30 seconds in the cleaning tank using a device for this cleaning liquid, rinsing was performed for a total of 30 seconds in the two-stage rinsing tank. The cleaning process for defluxing the mounted printed circuit board was carried out by setting the residence time in the steam generated in the third rinsing tank to 20 seconds.
この結果、フラックスは除かれていたが、処理時間が長
く、処理槽も多くを要し、複雑な装置を使用しなければ
ならず、洗浄剤であるフロンＲ−１１３中に汚染物が溶
は込むために、洗浄液は、損失分の補給を要するととも
に、洗浄処理を３か斜行なうたびに全量を更新しなけれ
ばならなかった。As a result, the flux was removed, but the treatment time was long, the number of treatment tanks was large, complicated equipment had to be used, and the contaminants were not dissolved in the cleaning agent Freon R-113. In order to increase the amount of cleaning fluid lost, it is necessary to replenish the amount lost, and the total amount must be renewed every three or three times the cleaning process is performed diagonally.
〈発明の効果）
本発明は、従来の洗浄剤による処理を行なった後に、さ
らに、完全フッ素化化合物による処理を行なうものであ
るから、比較的簡単な装置で、短時間に、完全に、従来
の洗浄剤による処理では除ききれなかった微細孔中の汚
染物も除去し得、被処理物上に、汚染物や洗浄剤のシミ
などを残すことなく、又、製品を変色や変質することも
なく、洗浄・水切り処理を行ない得るものであり、洗浄
処理においては、従来方法では必ず行なわれている純水
による洗浄を行なう必要もなく、完全フッ素化化合物は
全量更新の必要はなく、損失分の補給だけで足りるなど
顕著な効果が認められる。<Effects of the Invention> The present invention performs treatment with a fully fluorinated compound after treatment with a conventional cleaning agent. It is possible to remove contaminants in the micropores that could not be removed by treatment with cleaning agents, without leaving contaminants or cleaning agent stains on the object to be treated, and without causing discoloration or deterioration of the product. There is no need to replace the fully fluorinated compound with pure water, which is necessary in conventional methods, and there is no need to replace the entire amount of the fully fluorinated compound. Remarkable effects have been observed, such as the fact that supplementation alone is sufficient.
Claims (1)
活性剤を含む水溶性洗剤からなる群から選ばれた少なく
とも１種類の洗浄剤を使用して処理した後、構造式▲数
式、化学式、表等があります▼、▲数式、化学式、表等
があります▼、 （Ｃ＿５Ｆ＿１＿１）＿３Ｎ、（Ｃ＿４Ｆ＿９）＿３Ｎ
、▲数式、化学式、表等があります▼、▲数式、化学式
、表等があります▼、▲数式、化学式、表等があります
▼で示される完全フッ素化化合物からなる群から選ばれ
た少なくとも１種類の完全フッ素化化合物を使用して処
理することを特徴とする物品の洗浄・水きり方法。[Claims] 1) After treatment with at least one type of cleaning agent selected from the group consisting of alcohols, chlorinated organic solvents, petroleum-based solvents, and water-soluble detergents containing surfactants, the structure Formulas ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼, ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼, (C_5F_1_1)_3N, (C_4F_9)_3N
, ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ , ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ , ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼ A method for washing and draining articles, characterized in that the treatment is performed using a fully fluorinated compound.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17593089A JPH0342002A (en) | 1989-07-07 | 1989-07-07 | Method for washing and dehydrating article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17593089A JPH0342002A (en) | 1989-07-07 | 1989-07-07 | Method for washing and dehydrating article |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0342002A true JPH0342002A (en) | 1991-02-22 |
Family
ID=16004740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17593089A Pending JPH0342002A (en) | 1989-07-07 | 1989-07-07 | Method for washing and dehydrating article |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342002A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992003205A1 (en) * | 1990-08-22 | 1992-03-05 | Kabushiki Kaisha Toshiba | Method and device for cleaning |
| JPH04173899A (en) * | 1990-11-05 | 1992-06-22 | Japan Field Kk | Method for rinsing and washing material to be washed |
| JPH067611A (en) * | 1992-06-29 | 1994-01-18 | Japan Field Kk | Separation of water from material to be washed |
| US5443747A (en) * | 1989-10-26 | 1995-08-22 | Kabushiki Kaisha Toshiba | Cleaning compositions |
| US5503681A (en) * | 1990-03-16 | 1996-04-02 | Kabushiki Kaisha Toshiba | Method of cleaning an object |
| US5593507A (en) * | 1990-08-22 | 1997-01-14 | Kabushiki Kaisha Toshiba | Cleaning method and cleaning apparatus |
-
1989
- 1989-07-07 JP JP17593089A patent/JPH0342002A/en active Pending
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5716456A (en) * | 1989-10-26 | 1998-02-10 | Kabushiki Kaisha Toshiba | Method for cleaning an object with an agent including water and a polyorganosiloxane |
| US6136766A (en) * | 1989-10-26 | 2000-10-24 | Toshiba Silicone Co., Ltd. | Cleaning compositions |
| US5985810A (en) * | 1989-10-26 | 1999-11-16 | Toshiba Silicone Co., Ltd. | Cleaning compositions |
| US5443747A (en) * | 1989-10-26 | 1995-08-22 | Kabushiki Kaisha Toshiba | Cleaning compositions |
| US5977040A (en) * | 1989-10-26 | 1999-11-02 | Toshiba Silicone Co., Ltd. | Cleaning compositions |
| US5741367A (en) * | 1989-10-26 | 1998-04-21 | Kabushiki Kaisha Toshiba | Method for drying parts using a polyorganosiloxane |
| US5741365A (en) * | 1989-10-26 | 1998-04-21 | Kabushiki Kaisha Toshiba | Continuous method for cleaning industrial parts using a polyorganosiloxane |
| US5728228A (en) * | 1989-10-26 | 1998-03-17 | Kabushiki Kaisha Toshiba | Method for removing residual liquid from parts using a polyorganosiloxane |
| US5538024A (en) * | 1990-03-16 | 1996-07-23 | Kabushiki Kaisha Toshiba | Cleaning method and cleaning apparatus |
| US5769962A (en) * | 1990-03-16 | 1998-06-23 | Kabushiki Kaisha Toshiba | Cleaning method |
| US5772781A (en) * | 1990-03-16 | 1998-06-30 | Kabushiki Kaisha Toshiba | Method for cleaning an object using an agent that includes a polyorganosiloxane or isoparaffin |
| US5833761A (en) * | 1990-03-16 | 1998-11-10 | Toshiba Silicone Co., Ltd. | Method of cleaning an object including a cleaning step and a vapor drying step |
| US5888312A (en) * | 1990-03-16 | 1999-03-30 | Toshiba Silicone Co., Ltd. | Cleaning method |
| US5503681A (en) * | 1990-03-16 | 1996-04-02 | Kabushiki Kaisha Toshiba | Method of cleaning an object |
| US5690750A (en) * | 1990-08-20 | 1997-11-25 | Kabushiki Kaisha Toshiba | Cleaning method and cleaning apparatus |
| US5593507A (en) * | 1990-08-22 | 1997-01-14 | Kabushiki Kaisha Toshiba | Cleaning method and cleaning apparatus |
| WO1992003205A1 (en) * | 1990-08-22 | 1992-03-05 | Kabushiki Kaisha Toshiba | Method and device for cleaning |
| US5823210A (en) * | 1990-08-22 | 1998-10-20 | Toshiba Silicone Co., Ltd. | Cleaning method and cleaning apparatus |
| JPH04173899A (en) * | 1990-11-05 | 1992-06-22 | Japan Field Kk | Method for rinsing and washing material to be washed |
| JPH067611A (en) * | 1992-06-29 | 1994-01-18 | Japan Field Kk | Separation of water from material to be washed |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8410039B2 (en) | Azeotropic and azeotrope-like compositions of methyl perfluoroheptene ethers and trans-1,2-dichloroethylene and uses thereof | |
| CN106574215B (en) | Composition of methyl perfluoro heptene ether, 1,1,1,2,2,3,4,5,5,5- Decafluoropentanes and trans-1,2-dichloroethylene and application thereof | |
| US5125978A (en) | Water displacement composition and a method of use | |
| JP2614980B2 (en) | Composition and method for removing rosin soldering fluxes with terpenes and hydrocarbons | |
| US3789006A (en) | Solvent compositions | |
| US5089152A (en) | Water displacement composition | |
| KR20020041833A (en) | Cleaning processes using hydrofluorocarbon and/or hydrochlorofluorocarbon compounds | |
| JP2010248443A (en) | Azeotrope-like composition containing 1,1,1,3,3-pentafluorobutane | |
| JPH06510821A (en) | Multi-component solvent cleaning system | |
| KR19980025367A (en) | Azeotropic mixtures of octamethyltrisiloxane with aliphatic or cycloaliphatic alcohols | |
| JP2812369B2 (en) | Novel azeotropic solvent mixture and method for cleaning electronic components using the same | |
| JP2006516296A (en) | Composition comprising a fluorinated hydrocarbon and an oxygenated solvent | |
| TWI279261B (en) | Compositions and methods for cleaning contaminated articles | |
| WO1995005448A1 (en) | Cleaning solvent composition and method of cleaning or drying article | |
| JPH02184302A (en) | Method for removing water from article | |
| JPH0342002A (en) | Method for washing and dehydrating article | |
| US5902412A (en) | Method of cleaning/coating a substrate | |
| KR20060100365A (en) | Compositions based on fluorinated hydrocarbons and secondary butanol for defluxing electronic boards | |
| JPH05148498A (en) | Solvent composition containing decafluoropentane | |
| JP2002256295A (en) | Cleaning method | |
| JP3266936B2 (en) | Composition for removing water and method for removing water from articles | |
| JP4104715B2 (en) | Solvent composition for removing adhering water | |
| JPH02240198A (en) | Process for washing article | |
| JPH06234998A (en) | Method of cleaning object surface | |
| RU2113921C1 (en) | Cleaning liquid composition, variant thereof, and method of removing contaminations from substrate using cleaning composition |