JPH0341846U - - Google Patents

Info

Publication number
JPH0341846U
JPH0341846U JP10291389U JP10291389U JPH0341846U JP H0341846 U JPH0341846 U JP H0341846U JP 10291389 U JP10291389 U JP 10291389U JP 10291389 U JP10291389 U JP 10291389U JP H0341846 U JPH0341846 U JP H0341846U
Authority
JP
Japan
Prior art keywords
film forming
chamber
gas introduction
carrier gas
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10291389U
Other languages
English (en)
Japanese (ja)
Other versions
JP2508717Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10291389U priority Critical patent/JP2508717Y2/ja
Publication of JPH0341846U publication Critical patent/JPH0341846U/ja
Application granted granted Critical
Publication of JP2508717Y2 publication Critical patent/JP2508717Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP10291389U 1989-08-31 1989-08-31 成膜装置のガス導入用ミキシングチャンバ Expired - Lifetime JP2508717Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10291389U JP2508717Y2 (ja) 1989-08-31 1989-08-31 成膜装置のガス導入用ミキシングチャンバ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10291389U JP2508717Y2 (ja) 1989-08-31 1989-08-31 成膜装置のガス導入用ミキシングチャンバ

Publications (2)

Publication Number Publication Date
JPH0341846U true JPH0341846U (enrdf_load_stackoverflow) 1991-04-22
JP2508717Y2 JP2508717Y2 (ja) 1996-08-28

Family

ID=31651782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10291389U Expired - Lifetime JP2508717Y2 (ja) 1989-08-31 1989-08-31 成膜装置のガス導入用ミキシングチャンバ

Country Status (1)

Country Link
JP (1) JP2508717Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014128755A (ja) * 2012-12-28 2014-07-10 Horiba Ltd 流体混合素子
WO2017061498A1 (ja) * 2015-10-06 2017-04-13 株式会社アルバック 混合器、真空処理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014128755A (ja) * 2012-12-28 2014-07-10 Horiba Ltd 流体混合素子
US9795936B2 (en) 2012-12-28 2017-10-24 Horiba Stec, Co., Ltd. Fluid mixing element
WO2017061498A1 (ja) * 2015-10-06 2017-04-13 株式会社アルバック 混合器、真空処理装置
JPWO2017061498A1 (ja) * 2015-10-06 2017-10-19 株式会社アルバック 混合器、真空処理装置
KR20180050367A (ko) * 2015-10-06 2018-05-14 가부시키가이샤 알박 혼합기, 진공 처리 장치

Also Published As

Publication number Publication date
JP2508717Y2 (ja) 1996-08-28

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