JPH0341846U - - Google Patents
Info
- Publication number
- JPH0341846U JPH0341846U JP10291389U JP10291389U JPH0341846U JP H0341846 U JPH0341846 U JP H0341846U JP 10291389 U JP10291389 U JP 10291389U JP 10291389 U JP10291389 U JP 10291389U JP H0341846 U JPH0341846 U JP H0341846U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- chamber
- gas introduction
- carrier gas
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 5
- 239000012159 carrier gas Substances 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 1
Description
第１図は本考案の一実施例によるミキシングチ
ヤンバを示す断面構成図、第２図は前記ミキシン
グチヤンバが採用された成膜装置のガス導入系を
示す図、第３図は前記実施例の作用効果を従来装
置と比較して示す図、第４図は従来装置のミキシ
ングチヤンバを示す図である。
１……成膜用チヤンバ、２……ガス導入系、３
……ミキシングチヤンバ、１２……チヤンバボデ
イ、１３……キヤリアガス流路、１３ａ……先端
開口部、１４……Ｏ２ガス導入管、１５……ＴＥ
ＯＳ導入管。
FIG. 1 is a cross-sectional configuration diagram showing a mixing chamber according to an embodiment of the present invention, FIG. 2 is a diagram showing a gas introduction system of a film forming apparatus in which the mixing chamber is adopted, and FIG. 3 is a diagram showing the embodiment of the invention. FIG. 4 is a diagram showing the mixing chamber of the conventional device. 1... Chamber for film formation, 2... Gas introduction system, 3
...Mixing chamber, 12...Chamber body, 13...Carrier gas flow path, 13a...Tip opening, 14... O2 gas introduction pipe, 15...TE
OS introduction tube.
Claims (1)
アガスと混合して成膜用チヤンバに導入するため
の成膜装置のガス導入用ミキシングチヤンバであ
つて、 先端開口部に向かつて先細形状のキヤリアガス
流路を有するチヤンバボデイと、前記チヤンボデ
イのキヤリアガス流路の先端先細部に気化した反
応ガスを導入する反応ガス導入管とを備えた成膜
装置のガス導入用ミキシングチヤンバ。[Scope of Claim for Utility Model Registration] A gas introduction mixing chamber of a film forming apparatus for introducing a reaction gas obtained by vaporizing a liquefied material with a carrier gas into a film forming chamber, which has an opening at its tip. A mixing channel for gas introduction of a film forming apparatus, comprising a chamber body having a carrier gas flow path tapered toward the end thereof, and a reaction gas introduction pipe for introducing vaporized reaction gas into the tapered tip of the carrier gas flow path of the chamber body. Ba.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10291389U JP2508717Y2 (en) | 1989-08-31 | 1989-08-31 | Mixing chamber for gas introduction in film forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10291389U JP2508717Y2 (en) | 1989-08-31 | 1989-08-31 | Mixing chamber for gas introduction in film forming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0341846U true JPH0341846U (en) | 1991-04-22 |
| JP2508717Y2 JP2508717Y2 (en) | 1996-08-28 |
Family
ID=31651782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10291389U Expired - Lifetime JP2508717Y2 (en) | 1989-08-31 | 1989-08-31 | Mixing chamber for gas introduction in film forming equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2508717Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014128755A (en) * | 2012-12-28 | 2014-07-10 | Horiba Ltd | Fluid mixing element |
| WO2017061498A1 (en) * | 2015-10-06 | 2017-04-13 | 株式会社アルバック | Mixer and vacuum processing device |
-
1989
- 1989-08-31 JP JP10291389U patent/JP2508717Y2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014128755A (en) * | 2012-12-28 | 2014-07-10 | Horiba Ltd | Fluid mixing element |
| US9795936B2 (en) | 2012-12-28 | 2017-10-24 | Horiba Stec, Co., Ltd. | Fluid mixing element |
| WO2017061498A1 (en) * | 2015-10-06 | 2017-04-13 | 株式会社アルバック | Mixer and vacuum processing device |
| JPWO2017061498A1 (en) * | 2015-10-06 | 2017-10-19 | 株式会社アルバック | Mixer, vacuum processing equipment |
| KR20180050367A (en) * | 2015-10-06 | 2018-05-14 | 가부시키가이샤 알박 | Mixer, Vacuum Processor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2508717Y2 (en) | 1996-08-28 |
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