JPH0341844U - - Google Patents

Info

Publication number
JPH0341844U
JPH0341844U JP10373189U JP10373189U JPH0341844U JP H0341844 U JPH0341844 U JP H0341844U JP 10373189 U JP10373189 U JP 10373189U JP 10373189 U JP10373189 U JP 10373189U JP H0341844 U JPH0341844 U JP H0341844U
Authority
JP
Japan
Prior art keywords
sputtering
adhering member
film adhering
tray
conveying tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10373189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10373189U priority Critical patent/JPH0341844U/ja
Publication of JPH0341844U publication Critical patent/JPH0341844U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10373189U 1989-09-04 1989-09-04 Pending JPH0341844U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10373189U JPH0341844U (enrdf_load_html_response) 1989-09-04 1989-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10373189U JPH0341844U (enrdf_load_html_response) 1989-09-04 1989-09-04

Publications (1)

Publication Number Publication Date
JPH0341844U true JPH0341844U (enrdf_load_html_response) 1991-04-22

Family

ID=31652554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10373189U Pending JPH0341844U (enrdf_load_html_response) 1989-09-04 1989-09-04

Country Status (1)

Country Link
JP (1) JPH0341844U (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208067A (ja) * 1983-05-13 1984-11-26 Hitachi Ltd 連続スパッタ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208067A (ja) * 1983-05-13 1984-11-26 Hitachi Ltd 連続スパッタ装置

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