JPH0341844U - - Google Patents
Info
- Publication number
- JPH0341844U JPH0341844U JP10373189U JP10373189U JPH0341844U JP H0341844 U JPH0341844 U JP H0341844U JP 10373189 U JP10373189 U JP 10373189U JP 10373189 U JP10373189 U JP 10373189U JP H0341844 U JPH0341844 U JP H0341844U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- adhering member
- film adhering
- tray
- conveying tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 238000005477 sputtering target Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10373189U JPH0341844U (cs) | 1989-09-04 | 1989-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10373189U JPH0341844U (cs) | 1989-09-04 | 1989-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0341844U true JPH0341844U (cs) | 1991-04-22 |
Family
ID=31652554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10373189U Pending JPH0341844U (cs) | 1989-09-04 | 1989-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0341844U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59208067A (ja) * | 1983-05-13 | 1984-11-26 | Hitachi Ltd | 連続スパッタ装置 |
-
1989
- 1989-09-04 JP JP10373189U patent/JPH0341844U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59208067A (ja) * | 1983-05-13 | 1984-11-26 | Hitachi Ltd | 連続スパッタ装置 |
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