JPH0340964A - Piezoelectric material - Google Patents
Piezoelectric materialInfo
- Publication number
- JPH0340964A JPH0340964A JP1175347A JP17534789A JPH0340964A JP H0340964 A JPH0340964 A JP H0340964A JP 1175347 A JP1175347 A JP 1175347A JP 17534789 A JP17534789 A JP 17534789A JP H0340964 A JPH0340964 A JP H0340964A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric material
- constant
- electromechanical coupling
- represented
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 27
- 230000008878 coupling Effects 0.000 abstract description 11
- 238000010168 coupling process Methods 0.000 abstract description 11
- 238000005859 coupling reaction Methods 0.000 abstract description 11
- 239000000203 mixture Substances 0.000 abstract description 7
- 238000006073 displacement reaction Methods 0.000 abstract description 4
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 abstract description 2
- 229910052749 magnesium Inorganic materials 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 238000005245 sintering Methods 0.000 abstract description 2
- 229910052726 zirconium Inorganic materials 0.000 abstract description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- 229910004481 Ta2O3 Inorganic materials 0.000 abstract 1
- 238000001354 calcination Methods 0.000 abstract 1
- HTUMBQDCCIXGCV-UHFFFAOYSA-N lead oxide Chemical compound [O-2].[Pb+2] HTUMBQDCCIXGCV-UHFFFAOYSA-N 0.000 abstract 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N lead(II) oxide Inorganic materials [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 abstract 1
- 238000000465 moulding Methods 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 238000010298 pulverizing process Methods 0.000 abstract 1
- 239000007858 starting material Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、径方向電気機械結合係数、比誘電率、およ
び圧電定数が大きく、圧電歪を利用した圧電アクチュエ
ータ、圧電ブザー等の材料として好適な圧電材料に関す
るものである。Detailed Description of the Invention (Field of Industrial Application) This invention has a large radial electromechanical coupling coefficient, relative dielectric constant, and piezoelectric constant, and is suitable as a material for piezoelectric actuators, piezoelectric buzzers, etc. that utilize piezoelectric strain. The present invention relates to piezoelectric materials.
（従来の技術）
圧電材料としては、従来ジルコン酸チタン酸鉛Ｐｂ（Ｚ
ｒ、Ｔｉ）０３磁器組戒物がよく知られている。この化
合物は、圧電性が大きいこと、高温まで使用可能である
こと、更には第３威分を置換あるいは添加することによ
り変性に冨んだ磁器が得られること等の利点を有する。(Prior art) As a piezoelectric material, lead zirconate titanate Pb (Z
r, Ti) 03 porcelain set is well known. This compound has advantages such as having high piezoelectricity, being usable up to high temperatures, and furthermore, by substituting or adding a tertiary component, a porcelain rich in modification can be obtained.
特にＺｒ、ＴＩの一部をＭｇとＮｂに置換したＰｂＴｉ
０ＰｂＴｉ０３−ＰｂＺｒ０ｚ−ＰｂＣｈ／ｚ）Ｏｓの
三成分系圧を磁器は、ｐｂｏの蒸発が少なく焼威しやす
いこと、主成分に各種の添加物を加えることにより種々
の圧電特性を持たせることが可能であることなどから、
圧電ブザー、周波数フィルター、圧電着火素子などの材
料として利用されてきた。また、Ｐｂ（Ｎｌ＋ｚｓ↑ａ
ｓｚｓ）Ｏｓ−ＰｂＴｉＯｓ−ＰｂＺｒ０３の三成分系
材料は、圧電性、安定性が高く、超音波振動子、フィル
ター等の材料として好適である。In particular, PbTi in which part of Zr and TI is replaced with Mg and Nb
Porcelain has a three-component pressure system of 0PbTi03-PbZr0z-PbCh/z)Os, which has low evaporation of pbo and is easily burnt out, and can have various piezoelectric properties by adding various additives to the main component. Because of the fact that
It has been used as a material for piezoelectric buzzers, frequency filters, piezoelectric ignition elements, etc. Also, Pb(Nl+zs↑a
The ternary material Os-PbTiOs-PbZr03 has high piezoelectricity and stability, and is suitable as a material for ultrasonic vibrators, filters, and the like.
近年、精密機械、光学機器等の分野で精密な変位素子の
必要性が高まり、これに圧電歪を利用した変位駆動用素
子を用いることが試みられている。In recent years, the need for precise displacement elements has increased in the fields of precision machinery, optical instruments, etc., and attempts have been made to use displacement driving elements that utilize piezoelectric distortion.
このような分野に使用される圧電材料としては径方向電
気機械結合係数、比誘電率および圧電定数が大きいこと
が要求される。Piezoelectric materials used in such fields are required to have a large radial electromechanical coupling coefficient, relative permittivity, and piezoelectric constant.
従来知られている材料の中、例えば、特公昭４２−９７
１６号公報に開示されているＰｂ（Ｍｇ＋７Ｊｂｔｚｉ
）Ｏｘ−ＰｂＴｌＯｓ ＰｂＺｒ０＞は径方向電気機
械結合係数が５０〜７０％と大きな値をもつにもかかわ
らず、比誘電率は高々２５００程度である。また、特公
昭４６−２８４６７号公報に示されているＰｂ（ＮＩ＋
ｚｓＴａｚｚｓ）Ｏｘ ＰｂＴｉ０３ＰｂＺｒＯｓは
、比誘電率は最高で約３６００に達するが、逆に径方向
電気機械結合係数は４０〜６５％位であり、圧電定数は
たかだか２５０ （Ｘ １０− ’〜／Ｖ）程度である
。Among the conventionally known materials, for example, Japanese Patent Publication No. 42-97
Pb(Mg+7Jbtzi) disclosed in Publication No. 16
)Ox-PbTlOs PbZr0> has a large radial electromechanical coupling coefficient of 50 to 70%, but a relative permittivity of about 2500 at most. In addition, Pb(NI+
zsTazzs) Ox PbTi03PbZrOs has a maximum dielectric constant of about 3600, but on the other hand, the radial electromechanical coupling coefficient is about 40 to 65%, and the piezoelectric constant is about 250 (X 10-'~/V) at most. It is.
（発明が解決しようとするｔｌｉｌｌ）近年の圧電材料
の高性能化の要求に対して、前記のような、これまでに
知られている圧電材料は十分な特性を有していない、即
ち、従来の圧電材料は比誘電率、径方向電気機械結合係
数のいずれかが小さく、圧電定数は十分大きいとは言え
ない。(Till the invention seeks to solve) In response to the recent demand for higher performance of piezoelectric materials, the piezoelectric materials known so far as described above do not have sufficient characteristics. The piezoelectric material has a small relative dielectric constant or a radial electromechanical coupling coefficient, and the piezoelectric constant cannot be said to be sufficiently large.
そのため、これらの材料を圧電アクチュエータとして使
用したとき変位量が小さく、また駆動電圧が大きくなる
という欠点がある。Therefore, when these materials are used as a piezoelectric actuator, there are disadvantages in that the amount of displacement is small and the driving voltage is large.
本発明の目的は、比誘電率、径方向電気機械結合係数お
よび圧電定数がともに大きく、大きな圧電歪を得ること
のできる圧電材料を提供することにある。An object of the present invention is to provide a piezoelectric material that has a large relative dielectric constant, a radial electromechanical coupling coefficient, and a piezoelectric constant, and can obtain a large piezoelectric strain.
（！ＩＩ題を解決するための手段）
本発明者は、従来から良好な特性が認められているｐｂ
（バｇａ／ズＮｂｚｚ３）Ｏｓ ＰｂＴｉＯ２ＰｂＺ
ｒ０ｚとＰｂ（Ｎｉ。(Means for Solving Problem !II) The present inventor has discovered that pb, which has been recognized to have good properties,
(Baga/ZNbzz3) Os PbTiO2PbZ
r0z and Pb(Ni.
ｙｘＴａｘ／３）Ｏｓ ＰｂＴｉＯｓ ＰｂＺｒＯ
３の複合材、すなわちＰｂ（Ｍｇ＋７Ｊｂｔｚｉ）Ｏｓ
Ｐｂ（Ｎｉ＋ｚ＋Ｔａｘｚｓ）Ｏｘ ＰｂＴｉ０
３ｐｂＺｒｏｓの四成分系に着眼してその性質を検討し
た。yxTax/3) Os PbTiOs PbZrO
3 composite material, namely Pb(Mg+7Jbtzi)Os
Pb(Ni+z+Taxzs)Ox PbTi0
We focused on the four-component system of 3pbZros and investigated its properties.
その結果、上記四成分の比率を適正に選ぶことによって
、前記の目的が遠戚できることを６ｉＬＷした。As a result, 6iLW showed that by appropriately selecting the ratio of the four components mentioned above, the above object could be achieved in a distant manner.
上記の知見に基づく本発明の要旨は、次の圧電材料にあ
る。The gist of the present invention based on the above knowledge lies in the following piezoelectric material.
ａ Ｐｂ（Ｍｇ＋７Ｊｂｔｚｉ）Ｏｘ ｂ Ｐｂ（Ｎ
ｌ＋ｚｓＴａｘ／ｚ）Ｏｓ−ｃ ＰｂＴｉ０３ｄ Ｐｂ
ＺｒＯ３で表され、上記のａ、ｂＳ ｃおよびｄが下記
（１）〜（４）の式を満足する圧電材ギ４゜１０≦ａ＋
ｂ≦５５・・・・・■３０≦ｃ≦５０ ・・・・・
■
２．５≦ｄ≦６０ ・・・・・■
０．０１≦ｂ ／ ａ≦２．０ ・・・−■ただし、
ａＳ ｂ、ｃ％ｄはモノ１％で、ａ＋ｂ＋ｃ 十ｄ−１
００である。a Pb(Mg+7Jbtzi)Ox b Pb(N
l+zsTax/z)Os-c PbTi03d Pb
Piezoelectric material 4°10≦a+, which is represented by ZrO3, and where a, bSc, and d satisfy the following formulas (1) to (4).
b≦55・・・・・・■30≦c≦50・・・・・・
■ 2.5≦d≦60 ・・・・・・■ 0.01≦b / a≦2.0 ・・・−■ However,
aS b, c%d is 1% of goods, a+b+c 10d-1
It is 00.
本発明の圧電材料を構成する４戒分系の比率、即ち、前
記のモル％、ａ、ｂ、ｃ、およびｄを■から■までの式
を満足するように選定したのは、この範囲外では径方向
電気機械結合係数、比誘電率のいずれかが低下し、圧電
定数が小さくなるからである。The ratio of the four precepts constituting the piezoelectric material of the present invention, i.e., the above-mentioned mol%, a, b, c, and d, was selected so as to satisfy the formulas from ■ to ■ outside this range. This is because either the radial electromechanical coupling coefficient or the dielectric constant decreases, and the piezoelectric constant decreases.
本発明の圧電材料は、上記の組成を有するものであるが
、その製造方法は、従来のこの種の磁器組成物と同様で
ある。即ち、各元素の酸化物、炭酸化物または水酸化物
等を前記の組成となるように配合し底形した後、焼結す
ることによって製造することができる。The piezoelectric material of the present invention has the above composition, and the manufacturing method thereof is the same as that for conventional ceramic compositions of this type. That is, it can be manufactured by mixing oxides, carbonates, hydroxides, etc. of each element so as to have the above-mentioned composition, forming a bottom shape, and then sintering.
（実施例）
四成分系組成物を
ａ Ｐｂ（Ｍｇ＋７Ｊｂｔｚｉ）Ｏｓ−ｂ Ｐｂ（Ｎｉ
＋ｚｓＴａｔｚｓ）Ｏｓ−ｃ ＰｂＴｌ０ｉ −ｄ Ｐ
ｂＺｒ０ｓ（但し、ａ、ｂ、ｃ、ｄはモノ１％で、ａ＋
ｂ＋ｃ＋ ｄ −１００）
とし、ＰｂＯ，Ｚｒ０ｘ４ｉ０ｔ＋ＭｇＯ，ＮｂｔＯｓ
、ＮＩＯ，Ｔａ＊０＊、の各原料を第１表および第２表
に示す組成と成るように配合し、ボールミルを用いて十
分に混合した。(Example) A four-component composition was prepared using a Pb(Mg+7Jbtzi)Os-b Pb(Ni
+zsTatzs)Os-c PbTl0i -d P
bZr0s (however, a, b, c, d are mono 1%, a+
b + c + d -100) and PbO, Zr0x4i0t + MgO, NbtOs
, NIO, and Ta*0* were blended to have the compositions shown in Tables 1 and 2, and thoroughly mixed using a ball mill.
得られた混合粉を９００〜１１００°Ｃで約２時間仮焼
し、この仮焼物を再びボールミルで十分に粉砕した後、
有機バインダーを混合して造粒した。この造粒粉を約１
トッ／Ｃ−の圧力で直径２０Ｍ、 ｙ！、さ２閣に底形
し、これを１２００〜１３００’Ｃの温度で約２時間仮
焼した。The obtained mixed powder was calcined at 900 to 1100°C for about 2 hours, and this calcined product was thoroughly ground again in a ball mill.
An organic binder was mixed and granulated. Approximately 1 ounce of this granulated powder
Diameter 20M at pressure of To/C-, y! A bottom shape was formed into a shape, and this was calcined at a temperature of 1200 to 1300'C for about 2 hours.
得られた円板状の焼結体両面に銀電極を焼付け、４０〜
１００ ’Ｃのシリコンオイル中で２〜３ｋｖ／鵬の直
流電圧を印加して分極処理を行った。Silver electrodes were baked on both sides of the obtained disc-shaped sintered body, and 40~
Polarization treatment was performed in silicone oil at 100'C by applying a DC voltage of 2 to 3 kv/h.
第１表および第２表は、上記によって得られた組成とそ
の電気特性を示すものである。なお表中のε六ハ。は比
誘電率、Ｋｒは径方向電気機械結合係数、ｄ、は横方向
圧電定数である。Tables 1 and 2 show the compositions obtained above and their electrical properties. In addition, ε6c in the table. is the dielectric constant, Kr is the radial electromechanical coupling coefficient, and d is the lateral piezoelectric constant.
第１表の試料Ｎ（Ｌｌ〜１４は、ａ Ｐｂ（Ｍｇ＋／ｘ
Ｎｂｚｚｚ）Ｏｘｂ Ｐｂ（Ｎｉ＋ｚｘＴａｚ／１）Ｏ
ｚ ＣＰｂＴｌＯ２ｄ ＰｂＺｒＯｓの各成分のモル
％、ｂとａの比（ｂ／ａ）を前記■式を満足する０、５
０に一定として、ａ、ｂ、ｃ、ｄの（直を種々変化させ
たものである。ａ十すの（直、或いはＣの値が前記の式
を満足しないもの（１考欄に比較例と記したもの）は、
ｄ、が小さくなるか、εＬ／ε。およびＫｒの値が低い
。Sample N (Ll~14 in Table 1 is a Pb(Mg+/x
Nbzz)OxbPb(Ni+zxTaz/1)O
z CPbTlO2d Mol% of each component of PbZrOs, ratio of b and a (b/a) to 0, 5 that satisfies the above formula (■)
Assuming that it is constant at 0, the values of a, b, c, and d are variously changed. ) is
d becomes smaller or εL/ε. and low Kr value.
第２表は、ｃ、ｄおよびａ十すを本発明の条件を満たす
一定値にして、ｂとａの比（ｂ／ａ）を変化させた例で
ある。ｂ／ａが小さすぎるもの（Ｎａ１５）はεへ／ε
。とｄ３１が低く、ｂ ／ ａが大きすぎるもの（Ｎα
２６）はｄ、とＫｒが極端に落ちる。Table 2 shows an example in which c, d, and a are set to constant values that satisfy the conditions of the present invention, and the ratio of b and a (b/a) is varied. If b/a is too small (Na15), go to ε/ε
. and those with low d31 and too large b/a (Nα
26) has an extremely low d and Kr.
第１表および第２表の結果から、前記の■から■の式を
全て満足する場合に、高い電気機械結合係数、誘電率を
示し、圧電定数の大きな材料が得られことがわかる。From the results in Tables 1 and 2, it can be seen that when all of the above formulas (1) to (2) are satisfied, a material exhibiting a high electromechanical coupling coefficient, a high dielectric constant, and a large piezoelectric constant can be obtained.
（以下、余白）
（発明の効果）
本発明の圧電材料は、実施例にも示したとおり、径方向
電気機械結合係数、比誘電率、圧電定数のすべてにおい
て優れた特性を有し、先に述べた各種の用途向は材料と
して極めて有用なものである。(Hereinafter, blank spaces) (Effects of the Invention) As shown in the examples, the piezoelectric material of the present invention has excellent characteristics in all of the radial electromechanical coupling coefficient, dielectric constant, and piezoelectric constant. The various uses mentioned make it extremely useful as a material.
Claims (1)
ｂＰｂ（Ｎｉ＿１＿／＿３Ｔａ＿２＿／＿３）Ｏ＿３−
ｃＰｂＴｉＯ＿３−ｄＰｂＺｒＯ＿３で表され、上記の
ａ、ｂ、ｃおよびｄが下記（１）〜（４）の式を満足す
る圧電材料。 １０≦ａ＋ｂ≦５５・・・・・（１） ３０≦ｃ≦５０・・・・・（２） ２．５≦ｄ≦６０・・・・・（３） ０．０１≦ｂ／ａ≦２．０・・・・（４） ただし、ａ、ｂ、ｃ、ｄはモル％で、ａ＋ｂ＋ｃ＋ｄ＝
１００である。[Claims] aPb(Mg_1_/_3Nb_2_/_3)O_3-
bPb(Ni_1_/_3Ta_2_/_3)O_3-
A piezoelectric material represented by cPbTiO_3-dPbZrO_3, in which a, b, c, and d above satisfy the following formulas (1) to (4). 10≦a+b≦55 (1) 30≦c≦50 (2) 2.5≦d≦60 (3) 0.01≦b/a≦2 .0...(4) However, a, b, c, d are mol%, a+b+c+d=
It is 100.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1175347A JPH0340964A (en) | 1989-07-06 | 1989-07-06 | Piezoelectric material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1175347A JPH0340964A (en) | 1989-07-06 | 1989-07-06 | Piezoelectric material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0340964A true JPH0340964A (en) | 1991-02-21 |
Family
ID=15994480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1175347A Pending JPH0340964A (en) | 1989-07-06 | 1989-07-06 | Piezoelectric material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0340964A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5668071A (en) * | 1995-02-22 | 1997-09-16 | Ngk Insulators, Ltd. | Piezoelectric porcelain |
-
1989
- 1989-07-06 JP JP1175347A patent/JPH0340964A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5668071A (en) * | 1995-02-22 | 1997-09-16 | Ngk Insulators, Ltd. | Piezoelectric porcelain |
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