JPH03131569A - Piezoelectric material - Google Patents
Piezoelectric materialInfo
- Publication number
- JPH03131569A JPH03131569A JP1270038A JP27003889A JPH03131569A JP H03131569 A JPH03131569 A JP H03131569A JP 1270038 A JP1270038 A JP 1270038A JP 27003889 A JP27003889 A JP 27003889A JP H03131569 A JPH03131569 A JP H03131569A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- constant
- coupling coefficient
- electromechanical coupling
- dielectric constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title abstract description 28
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 10
- 229910052718 tin Inorganic materials 0.000 claims abstract description 9
- 229910052797 bismuth Inorganic materials 0.000 claims abstract description 7
- 229910052788 barium Inorganic materials 0.000 claims abstract description 5
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 5
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 5
- 230000008878 coupling Effects 0.000 abstract description 16
- 238000010168 coupling process Methods 0.000 abstract description 16
- 238000005859 coupling reaction Methods 0.000 abstract description 16
- 239000000203 mixture Substances 0.000 abstract description 9
- 229910019653 Mg1/3Nb2/3 Inorganic materials 0.000 abstract 1
- 238000006467 substitution reaction Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910020698 PbZrO3 Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、径方向電気機械結合係数、比誘電率、およ
び圧電定数が大きく、圧電歪を利用した圧電アクチュエ
ータ、圧電ブザー等の材料として好適な圧電材料に関す
るものである。Detailed Description of the Invention (Field of Industrial Application) This invention has a large radial electromechanical coupling coefficient, relative dielectric constant, and piezoelectric constant, and is suitable as a material for piezoelectric actuators, piezoelectric buzzers, etc. that utilize piezoelectric strain. The present invention relates to piezoelectric materials.
（従来の技術）
圧電材料としては、従来ジルコン酸チタン酸鉛、Ｐｂ（
Ｚｒ、Ｔｉ）ＯｓＩ器組成物がよく知られている。この
化合物は、圧電性が大きいこと、高温まで使用可能であ
ること、更には第３成分を置換あるいは添加することに
より変性に冨んだ磁器が得られること等の利点を有する
。特にＺｒ、Ｔｉの一部をＭｇとＮｂに置換したＰｂ（
Ｍｇ＋／Ｊｂｚ７ｉ）０３ＰｂＴｉＯｚ ＰｂＺｒＯ
ｘの三成分系圧電磁器は、ＰｂｏＯｆ発が少なく焼成し
やすいこと、主成分に各種の添加物を加えることにより
種々の圧電特性を持たせることが可能であることなどか
ら、圧電ブザー、周波数フィルタ、圧電着火素子などの
材料として利用されてきた。また、Ｐｂ（Ｎｉ＋ｚｓＴ
ａｚｚｚ）Ｏｘ ＰｂＴｉＯ２ＰｂＺｒＯ３の三成分
系材料は、圧電性、安定性が高く、超音波振動子、フィ
ルター等の材料として好適である。(Prior art) As piezoelectric materials, lead zirconate titanate, Pb(
Zr, Ti) OsI compositions are well known. This compound has advantages such as having high piezoelectricity, being usable up to high temperatures, and furthermore, by substituting or adding a third component, porcelain that is highly modified can be obtained. In particular, Pb (where some of Zr and Ti are replaced with Mg and Nb)
Mg+/Jbz7i)03PbTiOz PbZrO
The three-component piezoelectric ceramic of It has been used as a material for piezoelectric ignition elements, etc. In addition, Pb(Ni+zsT
The ternary material of azz)OxPbTiO2PbZrO3 has high piezoelectricity and stability, and is suitable as a material for ultrasonic vibrators, filters, etc.
近年、精密機械、光学機器等の分野で精密な変位素子の
必要性が高まり、これに圧電歪を利用した変位駆動用素
子を用いることが試みられている４このような分野に使
用される圧電材料としては径方向電気機械結合係数、比
誘電率および圧電定数が大きいことが要求される。In recent years, the need for precise displacement elements has increased in fields such as precision machinery and optical instruments, and attempts have been made to use displacement drive elements that utilize piezoelectric distortion. The material is required to have a large radial electromechanical coupling coefficient, relative dielectric constant, and piezoelectric constant.
従来知られている材料の中、例えば、特公昭４２９７１
６号公報に開示されているＰｂ （Ｍｇ ＋ ／ｚＮｂ
ｔ／５）Ｏｓ−ＰｂＴｉＯｓ ＰｂＺｒ０ｔは径方向
電気機械結合係数が５０〜７０％と大きな値をもつにも
かかわらず、比誘電率は高々２５００程度である。比誘
電率を大きくした材料として、特公昭４４〜１７１０３
号公報に開示されている上記組成でのＰｂの一部ををＳ
ｒ、 Ｂａ、 Ｃａで置換した材料があるが、この種の
材料の圧電定数は３００〜３１５ （Ｘ １０− ’
”ｍ／Ｖ ）程度である。また、特公昭４６−２８４６
７号公報に開示されているＩ’ｂ（Ｎｉ＋ｚｊＴａｚｙ
ｓ）０３ＰｂＴｉ０３ ＰｂＺｒＯｓは、比誘電率が
最高で約３６００に達するが、逆に径方向電気機械結合
係数は４０〜Ｇ５％位であり、圧電定数は高々２５０［
Ｘ１０ｍ／Ｖ）程度である。Among the conventionally known materials, for example, Japanese Patent Publication No. 42971
Pb (Mg + /zNb
t/5) Os-PbTiOs Although PbZr0t has a large radial electromechanical coupling coefficient of 50 to 70%, its relative dielectric constant is about 2500 at most. As a material with a high dielectric constant,
Part of the Pb in the above composition disclosed in the publication is S
There are materials substituted with r, Ba, and Ca, but the piezoelectric constant of this type of material is 300 to 315 (X 10-'
”m/V). Also, the
I'b(Ni+zjTazy
s)03PbTi03 PbZrOs has a maximum dielectric constant of about 3600, but on the other hand, the radial electromechanical coupling coefficient is about 40 to G5%, and the piezoelectric constant is at most 250[
x10m/V).
（発明が解決しようとする課題）
近年の圧電材料の高性能化の要求に対して、前記のよう
な、これまでに知られている圧電材料は十分な特性を有
していない、すなわち、比誘電率、電気機械結合係数の
いずれかが小さく、圧電定数も十分大きいとは言えない
、そのため、これらの材料を圧電アクチュエータとして
使用したとき変位量が小さく、また駆動電圧が大きくな
るという欠点がある。(Problem to be Solved by the Invention) In response to the recent demand for higher performance of piezoelectric materials, the piezoelectric materials known so far do not have sufficient characteristics, that is, they do not have sufficient characteristics compared to those described above. Either the dielectric constant or the electromechanical coupling coefficient is small, and the piezoelectric constant is not large enough. Therefore, when these materials are used as piezoelectric actuators, the disadvantage is that the amount of displacement is small and the driving voltage is large. .
本発明の目的は、比誘電率、径方向電気機械結合係数お
よび圧電定数がともに大きく、大きな圧Ｔｉ歪を得るこ
とのできる圧電材料を提供することにある。An object of the present invention is to provide a piezoelectric material that has a large dielectric constant, a radial electromechanical coupling coefficient, and a piezoelectric constant, and can obtain a large piezo-Ti strain.
（課題を解決するだめの手段）
本発明者は、従来から良好な特性が認められているＰｂ
ＣＭｇ＋／５Ｎｂｘｙｘ）Ｏｚ ｒ’ｂＴｉｏｓ
ＰｂＺｒＯ３とＩ’ｂ（ＮｉｙｓＴａｙｓ）０３ＰｂＴ
ｉＯＩ ＰｂＺｒＯ３の複合材、すなわち、Ｐｂ（Ｍ
ｇ＋ｙＪｂｚｚｔ）Ｏｓ−Ｐｂ（Ｎｉｉｚ＊Ｔａｚｚｓ
）Ｏｉ ＰｂＴｉＯ３ＰｂＺｒＯ３の四成分系につい
て詳しく検檜１したところ、上記四成分の比率を適正に
選ぶとともに、Ｐｂの一部をＳｒ、 ＢａおよびＣａの
うちの少なくとも一つで置換し、更にＳｎ、 Ｚｎおよ
びＢｉのうちの少なくとも１種を適正量添加することに
よって、比誘１！率、電気機械結合係数を同時に向上さ
せ、圧電定数の極めて高い材料が得られることを確認し
た。(Another Means to Solve the Problem) The present inventor has developed Pb, which has been recognized to have good properties.
CMg+/5Nbxyx)Oz r'bTios
PbZrO3 and I'b(NiysTays)03PbT
iOI PbZrO3 composite, i.e. Pb(M
g+yJbzzt)Os-Pb(Niiz*Tazzs
) A detailed examination of the four-component system of Oi PbTiO3PbZrO3 revealed that the ratio of the above four components was appropriately selected, a portion of Pb was replaced with at least one of Sr, Ba and Ca, and Sn and Zn were also substituted. By adding an appropriate amount of at least one of Bi and Bi, the dielectric strength can be increased to 1! It was confirmed that a material with an extremely high piezoelectric constant could be obtained by simultaneously improving the electromechanical coupling coefficient and the electromechanical coupling coefficient.
上記の知見に基づく本発明の要旨は、次の圧電材料にあ
る。The gist of the present invention based on the above knowledge lies in the following piezoelectric material.
ａ Ｐｂ＜Ｍｇ＋ｙｓＮｂｔｙｓ）Ｏｘ −ｂ Ｐｂ（
Ｎｉ＋ｚ＊↑ａ！／３）０３−ｃ ＰｂＴｉＯｓ ｄ
ＰｂＺｒ０ｚで表され、上記のａ、ｂ、ｃおよびｄが
下記１〜４の式を満足し、且つＰｂの１〜１０原子％が
Ｓｒ、 ＢａおよびＣａの１種以上で置換されており、
更にＳｎｓ ＺｎおよびＢｉの１種以上がそれぞれ０．
１〜５原子％添加されていることを特徴とする圧電材料
。a Pb<Mg+ysNbtys)Ox -b Pb(
Ni+z*↑a! /3)03-c PbTiOs d
It is represented by PbZr0z, the above a, b, c and d satisfy the following formulas 1 to 4, and 1 to 10 atomic % of Pb is substituted with one or more of Sr, Ba and Ca,
Furthermore, one or more of Sns Zn and Bi each have a content of 0.
A piezoelectric material characterized in that it is added in an amount of 1 to 5 atomic percent.
１０≦ａ＋ｂ≦５５・・・・・■
３０≦ｃ≦５０ ・・・・・■
２．５≦ｄ≦６０ ・・・・・■
０．０１≦ｂ ／ ａ≦２．０ ・・・−■ただし、
ａ、ｂ、ｃ、ｄはモル％で、ａ＋ｂ＋ｃ＋ｄ＝ｌｏＯで
ある。10≦a+b≦55...■ 30≦c≦50 ......■ 2.5≦d≦60 ......■ 0.01≦b / a≦2.0 ...- ■However,
a, b, c, and d are mol%, and a+b+c+d=loO.
（作用）
本発明の圧電材料を構成する各成分の比率、即ち、前記
のモル％、ａ、ｂ、ｃ、およびｄを■から■までの式を
満足するようにｊｘ定したのは、この範囲外では径方向
電気機械結合係数、比誘電率のいずれかが低下し、圧電
定数が小さくなるか、結晶構造が変化して全く圧電性を
示さなくなるからである。(Function) The reason why the ratio of each component constituting the piezoelectric material of the present invention, i.e., the mol%, a, b, c, and d described above, was determined by jx so as to satisfy the formulas from ■ to ■. This is because, outside this range, either the radial electromechanical coupling coefficient or the dielectric constant decreases, and the piezoelectric constant decreases, or the crystal structure changes and no piezoelectricity is exhibited at all.
また、Ｐｂ原子の５ｒＳＢａ、 Ｃａの１種以上による
置換量を１〜ＩＯ原子％とするのは、いずれの元素でも
１原子％未満では比誘電率があまり向上せず、圧電定数
の向上が見られず、逆にＩＯ原子％を超えると径方向電
気機械結合係数が著しく低下し、圧電定数が小さくなる
からである。Furthermore, the reason why the amount of substitution of Pb atoms with one or more of 5rSBa and Ca is set to 1 to IO atomic % is because if any element is less than 1 atomic %, the dielectric constant will not improve much, and the piezoelectric constant will not improve. On the contrary, if it exceeds IO atomic %, the radial electromechanical coupling coefficient decreases significantly and the piezoelectric constant decreases.
更に、５ｎＳＺｎおよび旧の添加量をそれぞれＯ１１〜
５原子％とするのは、いずれの元素でもＯ１Ｉ原子％未
溝の添加では比誘電率、電気機械結合係数があまり向上
せず、圧電定数の向上が見られず、逆に添加量が５原子
％を超えると、径方向電気機械結合係数、比誘電率のい
ずれか若しくは両方が著しく低下し圧電定数が小さくな
るからである。Furthermore, the amounts of 5nSZn and the old addition were changed to O11~
The reason why the addition amount is 5 atomic % is because the addition of O1I atomic % without grooves does not significantly improve the relative dielectric constant and electromechanical coupling coefficient, and no improvement in the piezoelectric constant is observed. %, either or both of the radial electromechanical coupling coefficient and relative permittivity will drop significantly, and the piezoelectric constant will become small.
なお、Ｓｎ、 Ｚｎ、 Ｂｉは単独の添加でもよく、２
種または３種組合せての添加でもよい、３種組合せの場
合は、総添加量の上限は１５原子％となる。Note that Sn, Zn, and Bi may be added alone, and 2
A species or a combination of three types may be added. In the case of a combination of three types, the upper limit of the total amount added is 15 at %.
本発明の圧電材料は、上記の組成を有するものであるが
、その製造方法は、従来のこの種の磁器組成物と同様で
ある。即ち、各元素の酸化物、炭酸化物または水酸化物
等を前記の組成となるように配合し成形した後、焼結す
ることによって製造することができる。The piezoelectric material of the present invention has the above composition, and the manufacturing method thereof is the same as that for conventional ceramic compositions of this type. That is, it can be manufactured by mixing oxides, carbonates, hydroxides, etc. of each element so as to have the above-mentioned composition, molding, and then sintering.
（実施例）
四成分系の基本組成物を
ａＰｂ（Ｍｇ＋７ｓＮｂｚｚｓ）Ｏｓ ｂＰｂ（Ｎｉ
＋ｚｓＴａｚｚｓ）Ｏａｃ ＰｂＴｉ０ｚ −ｄ Ｐｂ
Ｚｒ０ｓ（イ旦し、ａ、、ｂ、ｃ、ｄはモル％で、ａ
＋ｂ ｆｃ 十ｄ 〜１００）
とし、Ｐ ｂＯ＋ Ｚ ｒ Ｏ！ ｌ Ｔ ｉ Ｏｔ
＋ Ｍ ｇ Ｏ＋ Ｎ ｂ ｘ Ｏｓ 、Ｎ ｉ Ｏ＋
Ｔ ａ ｚ Ｏｓに、５ｒＣＯ＊、ＢａＣＯ５，Ｃａ
Ｃ０１の１種以上とＺｎＯ，ＳｎＯ，、ｌ１ｉｚＯ＝の
１種以上を適宜加えて第１表に示す組成となるように秤
量し、ボールミルを用いて十分に混合した。得られた混
合粉を９００〜１１００’Ｃで約２時間仮焼し、この仮
焼物を再びボールミルで十分に粉砕混合した後、有機バ
インダーを混合して造粒した。(Example) The basic composition of the four-component system was aPb(Mg+7sNbzzs)Os bPb(Ni
+zsTazzs)Oac PbTi0z -d Pb
Zr0s (a, b, c, d are mol%, a
+b fc 10d ~100) and P bO+ Z r O! l Ti Ot
+ M g O+ N b x Os , N i O+
T a z Os, 5rCO*, BaCO5, Ca
One or more types of C01 and one or more types of ZnO, SnO, 11izO= were added as appropriate, and the compositions shown in Table 1 were weighed and thoroughly mixed using a ball mill. The obtained mixed powder was calcined at 900 to 1100'C for about 2 hours, and the calcined product was thoroughly ground and mixed again in a ball mill, and then an organic binder was mixed therein and granulated.
この造粒粉を約１ ’、 ／ ｃ−の圧力で直径２０■
、厚さ２ｍに成形し、これを１２００−１３００℃の温
度で約２時間焼成した。This granulated powder is made into a diameter of 20cm at a pressure of about 1'/c-.
, molded to a thickness of 2 m, and baked at a temperature of 1200-1300°C for about 2 hours.
得られた円板状の焼結体両面に銀１ｔＦｉ１を焼付け、
４０〜１００”ｃのシリコンオイル中で２〜３ ｋｖ／
ｗの直流電圧を印加して分極処理を行った。1tFi1 of silver was baked on both sides of the obtained disc-shaped sintered body,
2-3 kv/ in 40-100”c silicone oil
Polarization treatment was performed by applying a DC voltage of .
第１表は、上記によって得られた磁器の組成とその電気
特性を示すものである。なお表中のεＴ３３／ ε。は
比誘電率、Ｋｒは径方向電気機械結合係数、ｄｓ＋は横
方向圧電定数である。Table 1 shows the composition of the porcelain obtained above and its electrical properties. Note that εT33/ε in the table. is the dielectric constant, Kr is the radial electromechanical coupling coefficient, and ds+ is the lateral piezoelectric constant.
第１表の試料Ｎａ １〜２６は、Ｐｂ原子のＳｒによる
置換量を５．０原子％と一定にし、且つ、Ｓｎ、 Ｚｎ
、旧の添加量をそれぞれ２．０原子％と一定にした上で
、ａ、ｂ、ｃ、ｄの値を変化させたものである。 （１
ｍ考欄に比較例と記したものをみれば、ａ−ｂ＝ ｃ、
ｄの値が前記の１〜４の式を満足しない場合はｄ。In samples Na 1 to 26 in Table 1, the amount of Pb atoms replaced by Sr was kept constant at 5.0 at%, and Sn, Zn
, the values of a, b, c, and d were changed while keeping the old addition amounts constant at 2.0 atomic %. (1
If you look at the comparative example in the comments column, a-b=c,
d if the value of d does not satisfy formulas 1 to 4 above.
が小さくなることがわかる。It can be seen that becomes smaller.
試料Ｎａ２７〜４５は、ａ、ｂ、ｃ、ｄの値を本発明で
定めた範囲内の一定値にし、Ｐｂ原子のＳｒによる１
１０ ｉｌを５．０原子％と一定にした上で、Ｓｎ、
Ｚｎ、Ｂｉの添加量を変化させたものである。ただし、
Ｎα２７はこれらを添加していない比較例である。添加
元素がＳｎ、 Ｚｎ、 Ｂｉのいずれであっても、添加
量０．１原子％未満では効果が現れず、一方、添加■が
５原子％を超えるとＫｒまたは／およびε７３．／ε。For samples Na27 to Na45, the values of a, b, c, and d were set to constant values within the range defined by the present invention, and the Pb atoms were 1 due to Sr.
10il was kept constant at 5.0 at%, Sn,
The amounts of Zn and Bi added were changed. however,
Nα27 is a comparative example in which these were not added. Regardless of whether the additive element is Sn, Zn, or Bi, if the added amount is less than 0.1 atomic %, no effect will be exhibited.On the other hand, if the added amount exceeds 5 atomic %, Kr or/and ε73. /ε.
が低下し、ｄｆｆｌが極端に悪化することがわかる。It can be seen that dffl decreases and dffl becomes extremely worse.
試料に４６〜６７は、ａ、ｂ、ｃ、ｄの値を本発明で定
めた範囲内の一定値にし、且つ、Ｓｎ、 Ｚｎ、旧の添
加量をそれぞれ２．０原子％と一定にした上で、Ｐｂ原
子のＳｒ、 ＤａＳＣａによる置換置を変化させたもの
である。ただし、Ｎ０４６は置換していない比較例であ
る。For samples 46 to 67, the values of a, b, c, and d were set to constant values within the range defined by the present invention, and the amounts of Sn, Zn, and old added were each constant at 2.0 at%. In the above, the substitution positions of Pb atoms by Sr and DaSCa are changed. However, No. 046 is a comparative example without substitution.
これらの電気特性をみれば、置換元素がＳｒ、 Ｈａお
よびＣａのいずれであってもｌ原子％未満では比誘電率
向上の効果がなく、一方、置換がＩＯ原子％を超えると
Ｋｒおよび（ｈ＋が極端に悪化することがわかる。Looking at these electrical properties, it can be seen that no matter whether the substitution element is Sr, Ha or Ca, if the substitution element is less than 1 atomic %, there is no effect of improving the dielectric constant, whereas if the substitution exceeds IO atomic %, Kr and (h+ It can be seen that it becomes extremely worse.
以上の結果から、前記の■から■の式を全て満たし、Ｐ
ｂの一部をＳｒ、ＯａおよびＣａの少なくとも１種以上
で適正量置換するとともに、Ｓｎ、 Ｚｎおよび旧の少
なくとも１種以上を適正量添加すると、高い電気機械結
合係数、誘電率を示し、圧電定数の大きな材料が得られ
ることがわかる。From the above results, all the equations from ■ to ■ above are satisfied, and P
When part of b is replaced with an appropriate amount of at least one of Sr, Oa, and Ca, and an appropriate amount of at least one of Sn, Zn, and old is added, a high electromechanical coupling coefficient and dielectric constant are exhibited, and piezoelectric It can be seen that a material with a large constant can be obtained.
（以下、余白）
（発明の効果）
本発明の圧電材料は、実施例にも示したとおり、径方向
電気機械結合係数、比誘電率、圧電定数のすべてにおい
て優れた特性を有し、先に述べた各種の用途向は材料と
して権めて有用なものである。(Hereinafter, blank spaces) (Effects of the Invention) As shown in the examples, the piezoelectric material of the present invention has excellent characteristics in all of the radial electromechanical coupling coefficient, dielectric constant, and piezoelectric constant. The various uses mentioned make it extremely useful as a material.
Claims (1)
−ｂＰｂ（Ｎｉ＿１＿／＿３Ｔａ＿２＿／＿３）Ｏ＿３
−ｃＰｂＴｉＯ＿３−ｄＰｂＺｒＯ＿３で表され、上記
のａ、ｂ、ｃおよびｄが下記１〜４の式を満足し、且つ
Ｐｂの１〜１０原子％がＳｒ、ＢａおよびＣａの１種以
上で置換されており、更にＳｎ、ＺｎおよびＢｉの１種
以上がそれぞれ０．１〜５原子％添加されていることを
特徴とする圧電材料。 １０≦ａ＋ｂ≦５５・・・・・１ ３０≦ｃ≦５０・・・・・２ ２．５≦ｄ≦６０・・・・・３ ０．０１≦ｂ／ａ≦２．０・・・・４ ただし、ａ、ｂ、ｃ、ｄはモル％で、ａ＋ｂ＋ｃ＋ｄ＝
１００である。[Claims] aPb(Mg_1_/_3Nb_2_/_3)O_3
-bPb(Ni_1_/_3Ta_2_/_3)O_3
-cPbTiO_3-dPbZrO_3, the above a, b, c and d satisfy the following formulas 1 to 4, and 1 to 10 atomic % of Pb is substituted with one or more of Sr, Ba and Ca. and further contains 0.1 to 5 atomic % of each of one or more of Sn, Zn, and Bi. 10≦a+b≦55...1 30≦c≦50...2 2.5≦d≦60...3 0.01≦b/a≦2.0... 4 However, a, b, c, d are mol%, a+b+c+d=
It is 100.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1270038A JPH03131569A (en) | 1989-10-16 | 1989-10-16 | Piezoelectric material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1270038A JPH03131569A (en) | 1989-10-16 | 1989-10-16 | Piezoelectric material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03131569A true JPH03131569A (en) | 1991-06-05 |
Family
ID=17480667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1270038A Pending JPH03131569A (en) | 1989-10-16 | 1989-10-16 | Piezoelectric material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03131569A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1637508A2 (en) | 2004-08-25 | 2006-03-22 | Ngk Insulators, Ltd. | Dielectric composition and dielectric film element |
-
1989
- 1989-10-16 JP JP1270038A patent/JPH03131569A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1637508A2 (en) | 2004-08-25 | 2006-03-22 | Ngk Insulators, Ltd. | Dielectric composition and dielectric film element |
| EP1637508A3 (en) * | 2004-08-25 | 2009-08-26 | Ngk Insulators, Ltd. | Dielectric composition and dielectric film element |
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