JPH0339833U - - Google Patents

Info

Publication number
JPH0339833U
JPH0339833U JP10086989U JP10086989U JPH0339833U JP H0339833 U JPH0339833 U JP H0339833U JP 10086989 U JP10086989 U JP 10086989U JP 10086989 U JP10086989 U JP 10086989U JP H0339833 U JPH0339833 U JP H0339833U
Authority
JP
Japan
Prior art keywords
susceptor
wafer
divided
heats
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10086989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10086989U priority Critical patent/JPH0339833U/ja
Publication of JPH0339833U publication Critical patent/JPH0339833U/ja
Pending legal-status Critical Current

Links

JP10086989U 1989-08-28 1989-08-28 Pending JPH0339833U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10086989U JPH0339833U (US20030199744A1-20031023-C00003.png) 1989-08-28 1989-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10086989U JPH0339833U (US20030199744A1-20031023-C00003.png) 1989-08-28 1989-08-28

Publications (1)

Publication Number Publication Date
JPH0339833U true JPH0339833U (US20030199744A1-20031023-C00003.png) 1991-04-17

Family

ID=31649852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10086989U Pending JPH0339833U (US20030199744A1-20031023-C00003.png) 1989-08-28 1989-08-28

Country Status (1)

Country Link
JP (1) JPH0339833U (US20030199744A1-20031023-C00003.png)

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