JPH0339241U - - Google Patents
Info
- Publication number
- JPH0339241U JPH0339241U JP10021789U JP10021789U JPH0339241U JP H0339241 U JPH0339241 U JP H0339241U JP 10021789 U JP10021789 U JP 10021789U JP 10021789 U JP10021789 U JP 10021789U JP H0339241 U JPH0339241 U JP H0339241U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- slit
- ion source
- plasma generation
- generation container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10021789U JPH0339241U (sl) | 1989-08-28 | 1989-08-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10021789U JPH0339241U (sl) | 1989-08-28 | 1989-08-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0339241U true JPH0339241U (sl) | 1991-04-16 |
Family
ID=31649236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10021789U Pending JPH0339241U (sl) | 1989-08-28 | 1989-08-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0339241U (sl) |
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1989
- 1989-08-28 JP JP10021789U patent/JPH0339241U/ja active Pending