JPH0338211A - Ceramic filter - Google Patents
Ceramic filterInfo
- Publication number
- JPH0338211A JPH0338211A JP1173567A JP17356789A JPH0338211A JP H0338211 A JPH0338211 A JP H0338211A JP 1173567 A JP1173567 A JP 1173567A JP 17356789 A JP17356789 A JP 17356789A JP H0338211 A JPH0338211 A JP H0338211A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic filter
- main body
- ion exchange
- waste water
- exchange material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 33
- 150000002500 ions Chemical class 0.000 abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 13
- 239000002351 wastewater Substances 0.000 abstract description 9
- 238000005342 ion exchange Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 238000001914 filtration Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 238000010612 desalination reaction Methods 0.000 abstract description 2
- 239000010842 industrial wastewater Substances 0.000 abstract description 2
- 238000000926 separation method Methods 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 241000894006 Bacteria Species 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229910021536 Zeolite Inorganic materials 0.000 description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229920000768 polyamine Polymers 0.000 description 2
- 229920005990 polystyrene resin Polymers 0.000 description 2
- 239000008213 purified water Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000004065 wastewater treatment Methods 0.000 description 2
- 239000010457 zeolite Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229960001126 alginic acid Drugs 0.000 description 1
- 235000010443 alginic acid Nutrition 0.000 description 1
- 229920000615 alginic acid Polymers 0.000 description 1
- 239000000783 alginic acid Substances 0.000 description 1
- 150000004781 alginic acids Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Filtering Materials (AREA)
- Treatment Of Water By Ion Exchange (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はイオン交換可能なセラミックフィルターに関す
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ion-exchangeable ceramic filter.
例えば、半導体製造工程では、インゴットをスライスし
て半導体ウェハを作製するスライス工程や、電極形成ま
でのウニハエ程が終了したウェハを０．３〜０．８ ｍ
１口のペレット又はチップ状に分割するダイシング工程
が行われる。これらの切断工程では、ブレードに水をか
けながら切断することにより、ブレードの冷却と切り屑
の洗い流しを行っている。For example, in the semiconductor manufacturing process, wafers that have undergone a slicing process in which semiconductor wafers are created by slicing an ingot, and a wafer process up to the formation of electrodes are cut into 0.3 to 0.8 m
A dicing step is performed to divide the material into single pellets or chips. In these cutting processes, the blade is cooled and chips are washed away by spraying water on the blade.
前述した切断工程で生じる廃水には、各種金属イオンが
混入し、再使用が困難であった。The waste water generated in the cutting process mentioned above is contaminated with various metal ions, making it difficult to reuse it.
本発明は前記問題点を解決するためになされたものであ
り、各種イオンを除去して廃水の再使用を可能にするセ
ラミックフィルターを提供することを目的とする。The present invention has been made to solve the above problems, and an object thereof is to provide a ceramic filter that removes various ions and enables the reuse of wastewater.
本発明のセラミックフィルターは、管状のセラミックフ
ィルター本体の外面をイオン交換体で覆うか、セラミッ
クフィルター本体の原液流路にイオン交換体を充填する
か、又はセラミックフィルター本体の入口側にイオン交
換体を設けたことを特徴とするものである。The ceramic filter of the present invention covers the outer surface of the tubular ceramic filter body with an ion exchanger, fills the raw solution flow path of the ceramic filter body with an ion exchanger, or installs an ion exchanger on the inlet side of the ceramic filter body. It is characterized by the fact that it has been provided.
本発明において、イオン交換体としては、粒径０．３〜
１．０μのポリスチロール樹脂、ポリアクリル樹脂、ポ
リメタクリル樹脂などのビニル付加重合樹脂、ジルコニ
ム、エポキシポリアミン樹脂、縮重合系ポリアミン樹脂
などに交換基を付加したもの、沸石、アルギン酸、スル
ホン化石灰、合成ゼオライトなどを挙げることができる
。In the present invention, the ion exchanger has a particle size of 0.3 to
Vinyl addition polymer resins such as 1.0μ polystyrene resin, polyacrylic resin, and polymethacrylic resin, zirconium, epoxy polyamine resin, polycondensation polyamine resin with exchange groups added, zeolite, alginic acid, sulfonated lime, Examples include synthetic zeolite.
なお、イオン交換体は前述した２個所以上に設けてもよ
い。Note that the ion exchanger may be provided at two or more of the locations described above.
本発明のセラミックフィルターは、廃水からイオンを除
去して再使用することができ、しかもセラミックフィル
ター本体とイオン交換体とが一体的に構成されているた
め、イオン交換設備を別個に設ける必要がなく、イオン
交換体の取換えや、保守に要する時間や手間を省くこと
ができる。The ceramic filter of the present invention can remove ions from wastewater and reuse it, and since the ceramic filter body and the ion exchanger are integrally constructed, there is no need to install separate ion exchange equipment. , the time and effort required for ion exchanger replacement and maintenance can be saved.
以下、本発明の詳細な説明する。 The present invention will be explained in detail below.
第１図は本発明に係るセラミックフィルターをダイサー
の廃水処理に適用したものである。第１図において、貯
水槽１内には純水が入れられ、この純水はポンプにより
ダイサー２へ供給され、ブレードに水をかけながら半導
体ウェハを切断することにより、ブレードの冷却と切り
屑の洗い流しが行われる。ダイサー２の廃水は、ダーテ
ィタンク３へ送られ、更にポンプによりフィルター容器
４に取り付けられたセラミックフィルター本体５の原液
流路を通過してダーティタンク３へ循環される。また１
、セラミックフィルター本体５でろ過された純水は、フ
ィルター容器４とセラミックフィルター本体５外周との
間に充填されたイオン交換体６を通過して貯水槽１へ循
環される。前記セラミックフィルター本体５としては、
微細孔の孔径が約０．１ ｎのものを用いた。また、前
記イオン交換体６としては、ポリスチロール樹脂にイオ
ン交換設備
この装置を用い、ダイサー２により発光ダイオード用ガ
リウム・ヒ素（ＧａＡｓ）半導体ウェハをダイシングし
た場合の、ろ過前の純水、及びろ過された純水のバクテ
リア量、ダスト量、及びに１Ｎ ａ ％ Ｃａ ｓ Ａ
ｓの各金属含有量を測定した。なお、金属含有量は炭
素炉式原子吸光光度計を用いて測定した。FIG. 1 shows a ceramic filter according to the present invention applied to wastewater treatment using a dicer. In Fig. 1, pure water is placed in a water tank 1, and this pure water is supplied to a dicer 2 by a pump, which cools the blade and removes chips by cutting the semiconductor wafer while spraying water on the blade. Washing is done. The waste water from the dicer 2 is sent to a dirty tank 3, and further circulated to the dirty tank 3 by a pump through the raw solution flow path of a ceramic filter body 5 attached to a filter container 4. Also 1
The pure water filtered by the ceramic filter body 5 passes through an ion exchanger 6 filled between the filter container 4 and the outer periphery of the ceramic filter body 5, and is circulated to the water storage tank 1. As the ceramic filter main body 5,
A material with micropores having a diameter of about 0.1 nm was used. The ion exchanger 6 may include pure water before filtration and filtration when a gallium arsenide (GaAs) semiconductor wafer for light emitting diodes is diced by a dicer 2 using an ion exchange equipment for polystyrene resin. Bacteria amount, dust amount, and 1N a % Ca s A of purified water
The content of each metal in s was measured. The metal content was measured using a carbon furnace atomic absorption spectrophotometer.
従来例として、フィルター容器４とセラミックフィルタ
ー本体５外周との間にイオン交換体６を充填しなかった
以外は前記と同一の構成の装置を用い、前記と同様にろ
過された純水のバクテリア量、ダスロり及びＫＳＮａｓ
Ｃａ、Ａｓの各金属含有量を測定した。As a conventional example, an apparatus having the same configuration as above except that the ion exchanger 6 was not filled between the filter container 4 and the outer periphery of the ceramic filter body 5 was used, and the amount of bacteria in purified water filtered in the same manner as above was measured. , Dasurori and KSNas
Each metal content of Ca and As was measured.
これらの結果を第１表に示す。These results are shown in Table 1.
第１表から明らかなように、前記実施例の装置では、バ
クテリアやダストだけでなく、いずれの金属不純物も有
効に除去できることがわかる。特に、ダイシングに伴い
廃水中に混入するＡｓは、従来例ではほとんど除去する
ことができないが、実施例では除去することができる。As is clear from Table 1, the apparatus of the above example can effectively remove not only bacteria and dust but also any metal impurities. In particular, As mixed into wastewater due to dicing could hardly be removed in the conventional example, but could be removed in the example.
なお、前記実施例では、セラミックフィルターとして、
フィルター容器４とセラミックフィルター本体５外周と
の間にイオン交換体６を充填したものを用いたが、本発
明に係るセラミックフィルターはこれに限定されるもの
ではない。例えば、第２図に示すように、セラミックフ
ィルター本体５の原液流路にイオン交換体６を充填した
ものでもよい。また、第３図に示すように、セラミック
フィルター本体５の入口側にイオン交換体６を設けたも
のでもよい。In addition, in the above-mentioned example, as a ceramic filter,
Although an ion exchanger 6 filled between the filter container 4 and the outer periphery of the ceramic filter main body 5 was used, the ceramic filter according to the present invention is not limited to this. For example, as shown in FIG. 2, an ion exchanger 6 may be filled in the raw solution flow path of the ceramic filter body 5. Alternatively, as shown in FIG. 3, an ion exchanger 6 may be provided on the inlet side of the ceramic filter body 5.
以上詳述したように本発明のセラミックフィルターによ
れば、廃水からイオンを除去して再使用することができ
る。また、本発明のセラミックフイルタは、工業廃水の
ろ過に限らず、淡水化、純水の製造、ガス分離による精
製にも適用できる。As described in detail above, according to the ceramic filter of the present invention, ions can be removed from wastewater and the filter can be reused. Further, the ceramic filter of the present invention is applicable not only to filtration of industrial wastewater but also to desalination, production of pure water, and purification by gas separation.
しかも、セラミックフィルター本体とイオン交換体とが
一体的に構成されているため、イオン交換設備を別個に
設ける必要がなく、イオン交換体の取換えや、保守に要
する時間や手間を省くことができる。Moreover, since the ceramic filter body and the ion exchanger are integrally constructed, there is no need to install separate ion exchange equipment, and the time and effort required for replacing the ion exchanger and maintenance can be saved. .
第１図は本発明の実施例におけるセラミックフィルター
を用いたダイサーの廃水処理装置を示す構成図、第２図
は本発明の他の実施例におけるセラミックフィルターの
断面図、第３図は本発明の５更に他の実施例におけるセ
ラミックフィルターの断面図である。
１・・・貯水槽、２・・・ダイサー ３・・・ダーティ
タンク、４・・・フィルタ容器、５・・・セラミックフ
ィルタ本体、６・・・イオン交換体。FIG. 1 is a block diagram showing a dicer wastewater treatment device using a ceramic filter according to an embodiment of the present invention, FIG. 2 is a cross-sectional view of a ceramic filter according to another embodiment of the present invention, and FIG. 5 is a sectional view of a ceramic filter in still another embodiment. DESCRIPTION OF SYMBOLS 1... Water tank, 2... Dicer, 3... Dirty tank, 4... Filter container, 5... Ceramic filter main body, 6... Ion exchanger.
Claims (1)
で覆うか、セラミックフィルター本体の原液流路にイオ
ン交換体を充填するか、又はセラミックフィルター本体
の入口側にイオン交換体を設けたことを特徴とするセラ
ミックフィルター。The outer surface of the tubular ceramic filter body is covered with an ion exchanger, the ion exchanger is filled in the raw solution flow path of the ceramic filter body, or the ion exchanger is provided on the inlet side of the ceramic filter body. ceramic filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1173567A JPH0338211A (en) | 1989-07-05 | 1989-07-05 | Ceramic filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1173567A JPH0338211A (en) | 1989-07-05 | 1989-07-05 | Ceramic filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0338211A true JPH0338211A (en) | 1991-02-19 |
Family
ID=15962952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1173567A Pending JPH0338211A (en) | 1989-07-05 | 1989-07-05 | Ceramic filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338211A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002119964A (en) * | 2000-10-13 | 2002-04-23 | Enzan Seisakusho:Kk | Waste water circulation system in semiconductor manufacturing process |
-
1989
- 1989-07-05 JP JP1173567A patent/JPH0338211A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002119964A (en) * | 2000-10-13 | 2002-04-23 | Enzan Seisakusho:Kk | Waste water circulation system in semiconductor manufacturing process |
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