JPH0337394A - Rotary vane type two-stage oil rotary vacuum pump - Google Patents
Rotary vane type two-stage oil rotary vacuum pumpInfo
- Publication number
- JPH0337394A JPH0337394A JP17099089A JP17099089A JPH0337394A JP H0337394 A JPH0337394 A JP H0337394A JP 17099089 A JP17099089 A JP 17099089A JP 17099089 A JP17099089 A JP 17099089A JP H0337394 A JPH0337394 A JP H0337394A
- Authority
- JP
- Japan
- Prior art keywords
- groove
- rotor
- oil
- stage
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004891 communication Methods 0.000 claims abstract description 6
- 238000007789 sealing Methods 0.000 abstract description 10
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 2
- 241000951471 Citrus junos Species 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
- F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
- F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/08—Rotary pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
この発明は、１段目のポンプのロータの両側面のシール
性を高めた回転翼形二段油回転真空ポンプに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a rotary vane type two-stage oil rotary vacuum pump that has improved sealing performance on both sides of the rotor of the first-stage pump.
（従来の技術）
従来の真空ポンプとして、第３図に呻図で示すように回
転翼型油回転真空ポンプを二段式に構成したものがある
。この真空ポンプは、ポンプケーシングｌのシリンダ室
１ａ、 ｌｂ内に偏心して、第１段ポンプのロータ２、
第２段ポンプのロータ３が夫々収容され、共通の回転軸
４に取付けられ、１台のモータで駆動されるようになっ
ている。そして第１段ポンプの吸気口５は被排気容器に
接続され、第１段ポンプの排気口６は第２段ポンプの吸
気口７に通路８を介して接続され、第２段ポンプの排気
口９はばねで押圧された排気弁ｌＯを経て外気に解放さ
れている０図におけるｔｓ、 ｔｓは回転１、ｔｚ、１
４は翼溝であり、ロータ２．３の夫々にその一つの直径
方向に沿うように対をなして設けである。また、１５は
オイルポンプ、１６、璽７は油回路であり、シリンダ室
１ａ、 ｌｂへ送られた油はロータ２，３の回転に従っ
てロータとシリンダ内面との隙間に介在してシール作用
をする。油通路１７は高真空側へ脱気された油を送るよ
うになっている。シリンダ室ｌａ内に供給された油の一
部はガスと共に通路８を通ってシリンダ室ｔｂへ送られ
る。(Prior Art) As a conventional vacuum pump, there is a rotary vane type oil rotary vacuum pump configured in two stages as shown in the diagram in FIG. This vacuum pump has a first stage pump rotor 2, which is eccentrically located within the cylinder chambers 1a and lb of the pump casing l.
The rotors 3 of the second stage pumps are housed in each rotor, attached to a common rotating shaft 4, and driven by one motor. The intake port 5 of the first stage pump is connected to the evacuated container, the exhaust port 6 of the first stage pump is connected to the intake port 7 of the second stage pump via a passage 8, and the exhaust port of the second stage pump is connected to the container to be evacuated. 9 is ts in figure 0, which is released to the outside air through the exhaust valve IO pressed by a spring, ts is rotation 1, tz, 1
Reference numeral 4 denotes blade grooves, which are provided in pairs along the diameter direction of one of the rotors 2.3. Further, 15 is an oil pump, 16 and 7 are oil circuits, and the oil sent to the cylinder chambers 1a and lb is interposed in the gap between the rotor and the inner surface of the cylinder as the rotors 2 and 3 rotate, and acts as a seal. . The oil passage 17 is configured to send deaerated oil to the high vacuum side. A part of the oil supplied into the cylinder chamber la is sent to the cylinder chamber tb through the passage 8 together with the gas.
（発明が解決しようとする課題）
前述したような従来の回転翼Ｑ二段抽回転真空ポンプは
、１Ｏ−４Ｔｏｒｒオーダの真空を得るためにはロータ
とシリンダの間の隙間が重要な点となることは周知であ
る。そして真空を保つために隙間と油の量が関係してく
る。この油の量は特に到達真空付近で問題になる。つま
り、高真空側の第１ポンプのシリンダ室１ａへの給油は
低真空側の第２ポンプのシリンダ室１ａを介して行われ
ており、少にである。モしてポンプの構造上高真空側の
排気は記
通路８を介して低置Ａ側”送られ・３の時排気ガスと共
に油も同時に排気されるから、前記隙間に介在してシー
ル作用をする油の量は必ずしも充分ではない、また、シ
リンダ室ｌａ内で油は回転軸方向の中央部へ押しやられ
る傾向となることが知られている。このために、ロータ
とシリンダの隙間を極力挟くする努力が一般的になされ
ている。例えばロータ２の側面とシリンダ室１ａの内面
との隙間は０，０２■鵬とか０．０４■１といった値と
されている。このような非常に小さい隙間とするには組
立て時に高度な技術を必要とする。また、隙間は性能に
も微妙に＃−饗する。(Problems to be Solved by the Invention) In the conventional rotary vane Q two-stage extraction rotary vacuum pump as described above, the gap between the rotor and the cylinder is important in order to obtain a vacuum on the order of 10-4 Torr. This is well known. In order to maintain a vacuum, the gap and amount of oil are related. This amount of oil becomes a problem especially near the ultimate vacuum. In other words, the oil supply to the cylinder chamber 1a of the first pump on the high vacuum side is carried out via the cylinder chamber 1a of the second pump on the low vacuum side, and is very small. Due to the structure of the pump, the exhaust gas from the high vacuum side is sent to the low position A side via the passage 8. At step 3, oil is exhausted together with the exhaust gas, so it is interposed in the gap and acts as a seal. It is known that the amount of oil is not necessarily sufficient, and that oil tends to be pushed toward the center in the direction of the rotating shaft within the cylinder chamber la.For this reason, the gap between the rotor and cylinder should be minimized. For example, the gap between the side surface of the rotor 2 and the inner surface of the cylinder chamber 1a is set to a value of 0.02 mm or 0.04 mm. Creating gaps requires advanced technology during assembly.Also, gaps have a subtle impact on performance.
この発明は、第１段ポンプのロータ側面とシリンダ室内
面との間のシールを少ない拘置て効果的に行うことによ
って従来よりも隙間を大きくすることができるシール４
Ｒ造を具えた回転翼形二段油回転真空ポンプを提供する
ことを課題とする。This invention provides a seal 4 that can make the gap larger than before by effectively sealing between the rotor side surface of the first stage pump and the cylinder chamber inner surface with less restriction.
An object of the present invention is to provide a rotary vane type two-stage oil rotary vacuum pump having an R structure.
（課題を解決するための手段）
この発明の手段は、第１段ポンプの排気通路を第２段ポ
ンプの吸気口に接続してなる回転翼形二段油回転真空ポ
ンプにおいて、第１段ポンプのロータの両側面の翼溝で
分断された各面に夫々ロータ周面に近い位置を通り両端
が翼溝から離れて終端した円弧状の外側溝を設け、前記
各面の各外側溝より内側のロータ軸に接近した位置に円
弧状の内側ｙ４を設け、その内側溝を前記各外側溝のり
−タ回転方向前端部に連通する連絡溝を設け、前記内側
溝の対向するシリンダ端壁内面に開口する油供給路を設
け、その油供給路の基端部に油を供給する油供給手段を
設けたことを特徴とする。(Means for Solving the Problem) The means of the present invention provides a rotary vane type two-stage oil rotary vacuum pump in which the exhaust passage of the first-stage pump is connected to the intake port of the second-stage pump. An arc-shaped outer groove is provided on each side of the rotor divided by the blade groove on both sides of the rotor, passing through a position close to the circumferential surface of the rotor and terminating at both ends away from the blade groove. An arc-shaped inner side y4 is provided at a position close to the rotor axis, and a communication groove is provided that communicates the inner groove with the front end of each of the outer grooves in the rotational direction of the rotor, and a communication groove is provided on the inner surface of the cylinder end wall opposite to the inner groove. The present invention is characterized in that an open oil supply passage is provided, and an oil supply means for supplying oil to the base end of the oil supply passage.
（作 用）
内側溝に油供給手段及び油供給路により供給された油は
、ロータの回転と共に回転するから、遠心力か働き、こ
れによって連絡溝を通って外側溝の回転方向側端部に入
ることになる。外側溝はロータの回転方向の後端側で終
端しているから油が外側溝内に溜る傾向となるが、ロー
タの側面とこれに対向するシリンダ室端壁内面との間に
は隙間があるので、当然この隙間から油が出て行くこと
になる。この状態において、外側溝内の油はシリンダ室
内面に接触していてロータの回転により回転方向後方へ
向う抵抗を受けて移動し、外側溝の回転方向後方偏に押
しつけられる形で圧力が上昇する。従って、その圧力に
よ、って外側溝内から前記隙間へ出る油は押し出される
ことになる。つまり外側溝がポンプのような作用をする
。これによって隙間内の油は高密度となり、シール性か
向上する。この隙間内の油の高密度化作用は隙間が０．
１ｍｓ程度以下で認められる。(Function) Since the oil supplied to the inner groove by the oil supply means and the oil supply path rotates with the rotation of the rotor, centrifugal force acts on the oil, which causes it to pass through the communication groove and reach the end of the outer groove in the direction of rotation. I will be entering. Since the outer groove ends at the rear end in the rotational direction of the rotor, oil tends to accumulate in the outer groove, but there is a gap between the side surface of the rotor and the inner surface of the opposite end wall of the cylinder chamber. So, naturally, oil will come out from this gap. In this state, the oil in the outer groove is in contact with the inner surface of the cylinder chamber, and as the rotor rotates, it moves against resistance toward the rear in the rotational direction, and pressure increases as the oil is pushed toward the rear in the rotational direction of the outer groove. . Therefore, due to the pressure, oil coming out from inside the outer groove to the gap is forced out. In other words, the outer groove acts like a pump. This increases the density of the oil within the gap, improving sealing performance. The densification effect of the oil in this gap is due to the fact that the gap is 0.
It is recognized in about 1 ms or less.
（実 施 例）
この発明のｌ実施例を第１図及び第２図を用いて説明す
る。第１図において第３図と同等部分は同一図面符号で
示してその説明を省略する。第１図の第３図と異なる点
は、ロータ２の両側面に第２図に詳細を示すような溝を
設けた点と、第１段ポンプの排気通路８の途中にトラッ
プ部を設けて捕捉した油をロータ２の両側面の溝に供給
する油供給路を設けた点とである。(Example) An example of the present invention will be described with reference to FIGS. 1 and 2. In FIG. 1, parts that are equivalent to those in FIG. 3 are designated by the same reference numerals, and their explanation will be omitted. The difference between FIG. 1 and FIG. 3 is that grooves are provided on both sides of the rotor 2 as shown in detail in FIG. 2, and a trap section is provided in the middle of the exhaust passage 8 of the first stage pump. Another point is that an oil supply path is provided to supply the captured oil to grooves on both side surfaces of the rotor 2.
ロータ２の両側面の満は、第２図（ａ） 、 （ｂ）に
示すように、外側溝２０、内側溝２１．連絡１１１１２
２からなる。外側溝２０は、ロータ２の両側面に夫々現
われるｇＸ溝１２．１２によって、第２図（ａ）に見ら
れるように、上下に分断されている上側部と下側８８４
分の各々に設けられ、ロータ周面に近い位置を通り両端
が翼溝１２から離れて終端した円弧状をなしている。内
側１ｉ１２１は、各外側溝２０より内側のロータの回転
軸４に接近した位置に設けられ、両端が翼１＋１１２．
１２に達している円弧状のものである。図にロータ２の
回転方向を矢印２３て示す。連絡ｖＩＩ２２は、内側ｌ
Ｉ！Ｉ２１を外側溝２０のロータ２の回転方向の前端部
に接続するように設けである。これら各溝断面の大きさ
は、例えばロータ２の外径が１１０ ａｍのもので、６
溝の幅が５諧鵬、外側溝２０の深さがｌａｍ、内側溝２
１の深さが５■程度であり、連絡溝２２の深さは双方の
溝底を継ぐように内側から外側へ徐々に浅くなっている
。As shown in FIGS. 2(a) and 2(b), both sides of the rotor 2 have outer grooves 20, inner grooves 21. Contact 11112
Consists of 2. The outer groove 20 is divided into an upper part and a lower part 884 by gX grooves 12.12 appearing on both sides of the rotor 2, as shown in FIG. 2(a).
It has an arc shape that passes through a position close to the rotor circumferential surface and terminates at both ends away from the blade groove 12. The inner side 1i121 is provided at a position closer to the rotating shaft 4 of the rotor inside each outer groove 20, and has both ends of the blade 1+112.
It has an arc shape reaching 12. In the figure, the direction of rotation of the rotor 2 is indicated by an arrow 23. Contact vII22 is inside l
I! I21 is connected to the front end of the outer groove 20 in the rotational direction of the rotor 2. For example, if the outer diameter of the rotor 2 is 110 am, the size of each of these groove cross sections is 6 mm.
The width of the groove is 5 mm, the depth of the outer groove 20 is lam, the inner groove 2
The depth of the connecting groove 22 is about 5 cm, and the depth of the connecting groove 22 gradually becomes shallower from the inside to the outside so as to connect the bottoms of both grooves.
トラップ部は、第１図に２４で示すように、排気通路８
の途中に設けてあり１例えば網状物を介在させて排ガス
中の油滴を捕捉するように構成したものである。捕捉さ
れた油はＦ側の油溜２５に溜る。その油溜＼２５からロ
ータ２の両側面の内側溝２１に対向するシリンダ室１ａ
の壁面に達して開口した油供給路２６を設けである。The trap section is connected to the exhaust passage 8, as shown at 24 in FIG.
For example, a net-like material is provided in the middle of the exhaust gas to trap oil droplets in the exhaust gas. The captured oil accumulates in the oil sump 25 on the F side. The cylinder chamber 1a facing the inner groove 21 on both sides of the rotor 2 from the oil sump \25
An oil supply path 26 is provided which reaches the wall surface and opens.
このように構成された真空ポンプは、従来のものと同様
に使用されるが、ロータ２の側面の各溝２０．２１．２
２の存在により、その内側溝２１へ供給された油は、遠
心力により連Ｍ５溝２２を通って外側溝２０に至り１シ
リンダ室１ａの端壁面から抵抗を受けることにより加圧
状態となり、ロータ２の側面とシリンダ室１ａの端壁面
との間の隙間Ｃへ高密度状態で送出される。従って良好
なシール作用をなす。このシール作用が良好であること
により、隙間Ｃを７従来のこの種の真空ポンプにおける
隙間の約２倍に形成しても同程度のシール作用か得られ
る１例えば１０−’Ｔｏｒｒオーダを確保するためには
従来ロ０ロ２■の隙間を０．０４■−に、従来０．０４
ｍ−の隙間を０．０８ｍ５にできる。従って、ロータ２
．シリンダ室１ａの加工精度及び組立精度を緩めること
ができ、製作か容易となる。The vacuum pump configured in this way is used in the same way as a conventional one, but with each groove 20.21.2 on the side surface of the rotor 2.
2, the oil supplied to the inner groove 21 passes through the continuous M5 groove 22 and reaches the outer groove 20 due to centrifugal force, and is pressurized by receiving resistance from the end wall surface of the cylinder chamber 1a. It is sent out in a high-density state to the gap C between the side surface of 2 and the end wall surface of the cylinder chamber 1a. Therefore, a good sealing effect is achieved. Due to this good sealing effect, the same level of sealing effect can be obtained even if the gap C is made to be about twice the gap in conventional vacuum pumps of this type.1 For example, on the order of 10-' Torr In order to do this, the gap between conventional RO 0 RO 2
m- gap can be reduced to 0.08m5. Therefore, rotor 2
．． The machining accuracy and assembly accuracy of the cylinder chamber 1a can be relaxed, making manufacturing easier.
上記実施例において、トラップ部で捕捉した油を油供給
路２６を介して内側溝２Ｉに供給する構成としたが、場
合によっては別の油供給手段例えば強制給油としてもよ
い。要は、脱気された油を内側溝へ供給するような構成
であればよい。In the above embodiment, the oil captured by the trap section is supplied to the inner groove 2I through the oil supply path 26, but depending on the situation, another oil supply means such as forced oil supply may be used. In short, any configuration that supplies deaerated oil to the inner groove is sufficient.
この発明によれば、ロータ両側面に特定の溝を設けてそ
の外側溝からロータ両側面シリンダ室端壁面との間の隙
間へ油を押し出してその隙間を高密度の油でシールする
ようにしたから、到達真空度付近においても良好なシー
ル作用が得られ、１０−’Ｔｏｒｒオーダの真空度を得
るようにする場合に、ロータ両側面とシリンダ室端壁面
との間の隙間を従来よりも大きくすることができて、回
転質層二段油回転真空ポンプの製作が容易となる。According to this invention, specific grooves are provided on both sides of the rotor, and oil is pushed out from the outer grooves into the gap between the both sides of the rotor and the end wall surface of the cylinder chamber, and the gap is sealed with high-density oil. Therefore, a good sealing effect can be obtained even near the ultimate vacuum level, and when trying to obtain a vacuum level on the order of 10-' Torr, the gap between both sides of the rotor and the end wall surface of the cylinder chamber is made larger than before. This makes it easy to manufacture a rotary bed two-stage oil rotary vacuum pump.
第１図はこの発明の１実施例の概略の構成を示す縦断正
面図、第２図は同実施例の主要部を示しくａ）は第１段
ポンプのロータの側面拡大図、（ｂ）は同ロータの部分
縦断正面図、第３図は従来の回転翼形二段油回転真空ポ
ンプを示す縦断正面図である。
ｌ・・・・ポンプケーシング、 ｌａ、 ｌｂ・・・・
シリンダ室、２．３・・・・ロータ、４・・・・回転軸
、５・・・・第１段ポンプの吸気口、６・・・・第１段
ポンプの排気口、７・・・・第２段ポンプの吸気口、８
・・・・通路、９・・・・第２段ポンプの排気口、１１
．１２・・・・回転完、１３．１４・・・−ｍＮ、 １
５−−−−オイルポンプ、１６．１７・・・・柚回路、
２ｏ・・・・外側溝、２１・・・・内（１１１ｔ＋Ｌ２
２・・・・連絡溝、２３・・・・ロータ回転方向矢印、
２４・・・・トラップ部、２５・・・・油溜、Ｃ・・・
・隙間。
特許出穎人Fig. 1 is a longitudinal sectional front view showing a schematic configuration of one embodiment of the present invention, Fig. 2 shows the main parts of the same embodiment, a) is an enlarged side view of the rotor of the first stage pump, and (b) 3 is a partial longitudinal sectional front view of the same rotor, and FIG. 3 is a longitudinal sectional front view showing a conventional rotary vane type two-stage oil rotary vacuum pump. l...pump casing, la, lb...
Cylinder chamber, 2.3...rotor, 4...rotating shaft, 5...intake port of first stage pump, 6...exhaust port of first stage pump, 7...・Second stage pump intake port, 8
... Passage, 9 ... Second stage pump exhaust port, 11
．． 12...Rotation complete, 13.14...-mN, 1
5---Oil pump, 16.17...Yuzu circuit,
2o...outside groove, 21...inner (111t+L2
2... Communication groove, 23... Rotor rotation direction arrow,
24...Trap part, 25...Oil sump, C...
·gap. Patent originator
Claims (1)
に接続してなる回転翼形二段油回転真空ポンプにおいて
、第１段ポンプのロータの両側面の翼溝で分断された各
面に夫々ロータ周面に近い位置を通り両端が翼溝から離
れて終端した円弧状の外側溝を設け、前記各面の各外側
溝より内側のロータ軸に接近した位置に円弧状の内側溝
を設け、その内側溝を前記各外側溝のロータ回転方向前
端部に連通する連絡溝を設け、前記内側溝の対向するシ
リンダ端壁内面に先端が開口する油供給路を設け、その
油供給路の基端部に油を供給する油供給手段を設けたこ
とを特徴とする回転翼形二段油回転真空ポンプ。(1) In a rotary vane type two-stage oil rotary vacuum pump in which the exhaust passage of the first stage pump is connected to the intake port of the second stage pump, the rotor of the first stage pump is divided by the blade grooves on both sides of the rotor. Each surface is provided with an arc-shaped outer groove that passes through a position close to the rotor circumferential surface and terminates at both ends away from the blade groove, and an arc-shaped inner groove is provided on each surface at a position closer to the rotor shaft on the inner side of each outer groove. A side groove is provided, a communication groove is provided that communicates the inner groove with the front end of each of the outer grooves in the rotor rotational direction, and an oil supply passage whose tip is open is provided on the inner surface of the opposite cylinder end wall of the inner groove, and the oil supply path is provided. A rotary vane type two-stage oil rotary vacuum pump characterized in that an oil supply means for supplying oil to a base end of a passage is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17099089A JPH066948B2 (en) | 1989-06-30 | 1989-06-30 | Rotary vane two-stage oil rotary vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17099089A JPH066948B2 (en) | 1989-06-30 | 1989-06-30 | Rotary vane two-stage oil rotary vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0337394A true JPH0337394A (en) | 1991-02-18 |
| JPH066948B2 JPH066948B2 (en) | 1994-01-26 |
Family
ID=15915077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17099089A Expired - Lifetime JPH066948B2 (en) | 1989-06-30 | 1989-06-30 | Rotary vane two-stage oil rotary vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH066948B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009046810A1 (en) * | 2007-10-02 | 2009-04-16 | Ixetic Hückeswagen Gmbh | Vacuum pump, particularly a vane pump |
| WO2011058339A3 (en) * | 2009-11-11 | 2012-01-19 | Edwards Limited | Corrosion resistant shaft sealing for a vacuum pump |
-
1989
- 1989-06-30 JP JP17099089A patent/JPH066948B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009046810A1 (en) * | 2007-10-02 | 2009-04-16 | Ixetic Hückeswagen Gmbh | Vacuum pump, particularly a vane pump |
| DE112008002164B4 (en) * | 2007-10-02 | 2017-02-02 | Magna Powertrain Hückeswagen GmbH | Vacuum pump, in particular vane pump |
| WO2011058339A3 (en) * | 2009-11-11 | 2012-01-19 | Edwards Limited | Corrosion resistant shaft sealing for a vacuum pump |
| CN102656368A (en) * | 2009-11-11 | 2012-09-05 | 爱德华兹有限公司 | Corrosion resistant shaft sealing for a vacuum pump |
| EP2499374B1 (en) | 2009-11-11 | 2016-12-28 | Edwards Limited | Corrosion resistant shaft sealing for a vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH066948B2 (en) | 1994-01-26 |
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