JPH033734U - - Google Patents

Info

Publication number
JPH033734U
JPH033734U JP6467089U JP6467089U JPH033734U JP H033734 U JPH033734 U JP H033734U JP 6467089 U JP6467089 U JP 6467089U JP 6467089 U JP6467089 U JP 6467089U JP H033734 U JPH033734 U JP H033734U
Authority
JP
Japan
Prior art keywords
raw material
liquid raw
vaporization section
sealed chamber
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6467089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0742481Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989064670U priority Critical patent/JPH0742481Y2/ja
Publication of JPH033734U publication Critical patent/JPH033734U/ja
Application granted granted Critical
Publication of JPH0742481Y2 publication Critical patent/JPH0742481Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP1989064670U 1989-06-01 1989-06-01 蒸発器 Expired - Lifetime JPH0742481Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989064670U JPH0742481Y2 (ja) 1989-06-01 1989-06-01 蒸発器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989064670U JPH0742481Y2 (ja) 1989-06-01 1989-06-01 蒸発器

Publications (2)

Publication Number Publication Date
JPH033734U true JPH033734U (enrdf_load_stackoverflow) 1991-01-16
JPH0742481Y2 JPH0742481Y2 (ja) 1995-10-04

Family

ID=31595821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989064670U Expired - Lifetime JPH0742481Y2 (ja) 1989-06-01 1989-06-01 蒸発器

Country Status (1)

Country Link
JP (1) JPH0742481Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291601A (ja) * 1987-05-21 1988-11-29 Mitsubishi Electric Corp 液体材料制御装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291601A (ja) * 1987-05-21 1988-11-29 Mitsubishi Electric Corp 液体材料制御装置

Also Published As

Publication number Publication date
JPH0742481Y2 (ja) 1995-10-04

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