JPH0337230Y2 - - Google Patents
Info
- Publication number
- JPH0337230Y2 JPH0337230Y2 JP5642687U JP5642687U JPH0337230Y2 JP H0337230 Y2 JPH0337230 Y2 JP H0337230Y2 JP 5642687 U JP5642687 U JP 5642687U JP 5642687 U JP5642687 U JP 5642687U JP H0337230 Y2 JPH0337230 Y2 JP H0337230Y2
- Authority
- JP
- Japan
- Prior art keywords
- lid
- hot plate
- dried
- semiconductor wafer
- conveyor belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001035 drying Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 description 17
- 235000012431 wafers Nutrition 0.000 description 15
- 239000002904 solvent Substances 0.000 description 10
- 239000004745 nonwoven fabric Substances 0.000 description 6
- 239000004744 fabric Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5642687U JPH0337230Y2 (enrdf_load_html_response) | 1987-04-13 | 1987-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5642687U JPH0337230Y2 (enrdf_load_html_response) | 1987-04-13 | 1987-04-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63174438U JPS63174438U (enrdf_load_html_response) | 1988-11-11 |
| JPH0337230Y2 true JPH0337230Y2 (enrdf_load_html_response) | 1991-08-07 |
Family
ID=30885216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5642687U Expired JPH0337230Y2 (enrdf_load_html_response) | 1987-04-13 | 1987-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0337230Y2 (enrdf_load_html_response) |
-
1987
- 1987-04-13 JP JP5642687U patent/JPH0337230Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63174438U (enrdf_load_html_response) | 1988-11-11 |
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