JPH0334918Y2 - - Google Patents
Info
- Publication number
- JPH0334918Y2 JPH0334918Y2 JP9449185U JP9449185U JPH0334918Y2 JP H0334918 Y2 JPH0334918 Y2 JP H0334918Y2 JP 9449185 U JP9449185 U JP 9449185U JP 9449185 U JP9449185 U JP 9449185U JP H0334918 Y2 JPH0334918 Y2 JP H0334918Y2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- semiconductor device
- lower electrode
- electrode post
- insulating ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 25
- 238000001816 cooling Methods 0.000 claims description 16
- 239000000498 cooling water Substances 0.000 claims description 10
- 239000008188 pellet Substances 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000003466 welding Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9449185U JPH0334918Y2 (enrdf_load_stackoverflow) | 1985-06-24 | 1985-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9449185U JPH0334918Y2 (enrdf_load_stackoverflow) | 1985-06-24 | 1985-06-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS624141U JPS624141U (enrdf_load_stackoverflow) | 1987-01-12 |
| JPH0334918Y2 true JPH0334918Y2 (enrdf_load_stackoverflow) | 1991-07-24 |
Family
ID=30653054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9449185U Expired JPH0334918Y2 (enrdf_load_stackoverflow) | 1985-06-24 | 1985-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334918Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-06-24 JP JP9449185U patent/JPH0334918Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS624141U (enrdf_load_stackoverflow) | 1987-01-12 |
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