JPH0334058U - - Google Patents
Info
- Publication number
- JPH0334058U JPH0334058U JP9370189U JP9370189U JPH0334058U JP H0334058 U JPH0334058 U JP H0334058U JP 9370189 U JP9370189 U JP 9370189U JP 9370189 U JP9370189 U JP 9370189U JP H0334058 U JPH0334058 U JP H0334058U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- anode
- ion plating
- arc ion
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 230000005288 electromagnetic effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9370189U JPH0619565Y2 (ja) | 1989-08-08 | 1989-08-08 | アークイオンプレーティング装置の電極構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9370189U JPH0619565Y2 (ja) | 1989-08-08 | 1989-08-08 | アークイオンプレーティング装置の電極構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0334058U true JPH0334058U (ko) | 1991-04-03 |
| JPH0619565Y2 JPH0619565Y2 (ja) | 1994-05-25 |
Family
ID=31643069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9370189U Expired - Lifetime JPH0619565Y2 (ja) | 1989-08-08 | 1989-08-08 | アークイオンプレーティング装置の電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619565Y2 (ko) |
-
1989
- 1989-08-08 JP JP9370189U patent/JPH0619565Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0619565Y2 (ja) | 1994-05-25 |